3

F C37 1/2 15 G Stainless steel B 100 VAC Grommet With surge voltage suppressor C 110 VAC 5 20A N.C. H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

VQ4000

Cylinder Speed Chart Enclosure Enclosure Bore size IP65 compatible IP65 compatible Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm Series MB/CA1 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Series Average speed (mm/s) 40 50 60 80 100 125 140 160 180 200 1100 1000 900 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Individual wiring type Horizontal actuation VQ4100

Plug-in/Plug Lead: Single Unit

with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5

Plug-in/Plug Lead: Single Unit

with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159(172.5) 159(172.5) 118 (135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40 Refer to page 38 for model selection. How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

An analog voltage or current output is available.  25A-PFM5 is IP40 rated, CE and RoHS compliant.  Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

An analog voltage or current output is available.  25A-PFM5 is IP40 rated, CE and RoHS compliant.  Compatible with the 25A-PFM3 monitor. Flow ranges (lpm): 0.2-10, 0.5-25, 1-50, 2-100; Port sizes: 1/8 or 1/4 (Rc, NPT, G); ø6 or ø8 one-touch fittings; Rated pressure range (MPa): -0.07 to 0.75; Output options: 1-5V or 4-20mA; Accuracy: ±3% F. S.; Repeatability: ±1% F. S.

10

) : Not available Single rod Double rod Cushion Page Air Rubber Air Rubber 392 402 Symbol Specifications Applicable bore size 32 to 100 125 32 to 100 125 32 to 100 125 32 to 100 125 Standard Standard V V V V V V V V Long st Long stroke V V V V V V V V 32 to 125 D Built-in magnet V V V V V V V V MBl-lJ K With rod boot V V V V V V V V 25A Copper (Cu) and Zinc (Zn)-free Note 1) 32 to 100 V

JXCx-OMU0026

0.0 0.0 0.5 Axis 2 CIR-L 40.00 100 0.0 0.0 0.5 2 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-R 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-R 0.00 100 0.0 0.0 0.5 3 Axis 3 0.00 100 0.0 0.0 0.5 Axis 4 20.00 100 0.0 0.0 0.5 Axis 1 CIR-3 100 0.00 1000 1000 100 0.0 0.0 0.5 Axis 2 CIR-3 -40.00 100 0.0 0.0 0.5 4 Axis 3 -20.00 100 0.0 0.0 0.5 Axis 4 -20.00 100 0.0 0.0 0.5

LEY-OM007

[ ] [%] [ ] 40 100 50 70 12 70 20 1.3 85 15 0.8 100 25 40 [%] [%] [ ] [%] [ ] 95 100 100 25 [%] [%] 40 [ ] [ ] 65 100 100 [%] LEY 32* 25 40 [%] [%] [ ] [%] [ ] 65 100 85 50 15 100 -43- 7.3 LEY / [Nm] L[mm] [mm] LEY 16 M50.8 3.0 10 14 LEY 25 M81.25 12.5 13 17 LEY 32 M81.25 12.5 13 22 / [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5

JXCx-OMT0002

Example) When LEY16RA-75 is ordered, input LEY16RA-100. (b) For LEFSH (High precision type) Input LEFS to search. Example) When LEFSH25RH-300 isordered, input LEFS25RH-300 (c) When a Clean type (11-) or Secondary battery type (25A-) is ordered. Search without inputting 11or 25A-, and find the actuator to which 11or 25Ais applicable.

240

or less 100 70 30 3 100 15 1 LEC 11.

SFOD-OMT0010

Example) When LEY16RA-75 is ordered, input LEY16RA-100. (b) For LEFSH(High precision type) Input LEFS to search. Example) When LEFSH25RH-300 isordered, input LEFS25RH-300 (c) When a Clean type (11-) or Secondary battery type (25A-) is ordered. Search without inputting 11or 25A-, and find the actuator to which 11or 25Ais applicable.

5-Port Solenoid Valve

Valve size Valve size 50 50 DOWN DOWN At 300 mm/s Can drive cylinders of Existing up to 50 2 Valve size Valve size 63 63 Existing DOWN DOWN (80 at 100 mm/s) Can drive cylinders of up to 63 2 80 (125 at 100 mm/s) Can drive cylinders of up to 80 2 (160 at 100 mm/s) 2 Values based on comparison with the existing SMC model For details, refer to page 13.

Electromagnetic Digital Flow Switch

aqueous solution Karman vortex IP65 3-color display 0.1 L/min 5 40 10 100 1 L/min 50 250 2 L/min PVC piping type 1 L/min 10 100 Water, Ethylene glycol aqueous solution IP65 3-color display Karman vortex 2 L/min 30 250 PF2D 0.05 L/min 0.4 4 Deionized water (pure water), Liquids which do not corrode nor erode fluoropolymer IP65 1-color display Karman vortex 0.1 L/min 1.8 20 4 40 0.5 L/min

Air cylinder (Series compatible with secondary batteries)

(Page 9) 6 Bushing (bearing) 1000 fR[N] 100 Lateral load applied to rod end 100 80 63 10 50 40 1 0 500 1000 1500 Cylinder stroke [mm] Fig. 1 Allowable lateral load applied to rod end C a u t i o n Be certain to align the rod axis with the load and direction of movement when connecting.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) Supply pressure: 0.5 MPa IR1000-01 IR1000-01 IR1000-01 Back pressure: 0.5 MPa 0.5 0.204 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.4 0.202 0.15 Set point 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 40 20 80 60 100 140 120 0 50 100 200 250 150 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

3 Port Solenoid Valve/

Made to Order Series Compatible with Secondary Batteries 1 For details about 25A-, refer to the WEB catalog Series Compatible with Secondary Batteries/Series 25A-. X536 X538 X555 How to Order 25AVP 4 5DZ1 Fill in according to How to Order above. Note) Electrical entry can be selected only for D type. Check valve type is available only when the thread type is Rc.