5 Port Solenoid Valve

A B A 4 B 2 1 SMC A B D side Stations PE P 1 12 X 2n x 1/4" 4(A), 2(B) port Other dimensions are the same as the side ported type.

VS7-6

America C8 Note 1) C10 Note 1) Note 1) Side ported only 1.19-33 VS7-8 Manifold Exploded View VS7-8 D side end plate assembly Manifold block assembly U side end plate assembly < End plate assembly > AXT512 A AXT512 1A E E End plate position P, R port size Cylinder port position Wiring specification L side R side L R 1/2 3/4 12 One-touch fitting 04 06 C12 L side R

Refrigerated Thermo-chiller

Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.) 170 UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

Cylinder

L L 1===:: . e ~l Nut ftO'a E . d Nilt ;1 ' , 0 , d d u {} B I I H B ILH ~ I Model j Bore,size(rnm} . d , I .Ji'.. ..I ~. e ~:C _ ~1IlIOd, H B C I NTP.()06 I 6 M3XQ.5 1.8 5,5 6,' SNP.oo6 6 Ml0X1.0 3 I. 16.2 _ ~.c1D. '1.0 Mt2X1.0 3 17 19,6 I NTP.()10 10' . M4 X0;7 2.4 , "la.tV NTP.()15 15 M5XO.a I 3,2 I 8 9.2 L.

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

(Normally open) B Port size Rc (Nominal size) VP3145 VP3165 VP3185 Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 Electrical entry 04 CE-compliant 06 10 12 14 20 TL D T G Grommet Conduit terminal DIN terminal Conduit terminal with indicator light SYJ (32A) 1 4 1 (40A) 1 2 1 VQZ TS (50A) 2 Symbol Internal pilot Conduit terminal with surge voltage suppressor TZ VP Conduit terminal

Body Size: 50, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 06 (3/4), Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Body Size: 50, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 3/4, Mounting: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa

Series: 25A-PFMB7, Flow Rate Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Out Specification: D (Out 1: NPN, Out 2: Analog to 20 mA), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Bracket: R (w/Bracket)

5 Port Air Operated Valve Series SYA3000/5000/7000 1

2 VSA4140-04 VSA4140-06 VSA4240-04 VSA4240-06 VSA4340-04 VSA4340-06 VSA4440-04 VSA4440-06 1 8 Rc 2 position single SA 1 2 1.31 1 8 Rc 3 4 1 2 1 8 Rc 2 position double 3 position closed center 1 2 1.50 VA 3 4 1 2 3 4 1 2 3 4 1 8 Rc 1 8 Rc 1 2 1.73 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area:

JSXFA

Series JSXFA Pulse Valve Valve for Dust Collector RoHS How to Order JSXFA B 06 R E 1 Compression tting type Direct piping type IN/OUT port size Piping Thread type E Compression tting type1 F Direct piping type 06 3/4 (20A) 10 1 (25A) 14 1 1/2 (40A) R Rc N NPT F G 1 Seals and washers are included.

rep-modular-e

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

Modular Pressure Control Equipment F.R.L. Replacement Procedure

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 #0 #1 #2 #3 #4 #5 #6 #7 #8 Diaphragm Body 1 1 Chromate treatment Spring Diaphragm shell 2 1 Zinc chromate treatment Zinc chromate treatment Diaphragm shell Diaphragm 1 1 Chromate treatment Washer Valve spring 1 1 Spring holder Chamber 1 1 Chromate treatment Zinc chromate treatment Diaphragm shell holder Seal 1 1 Stem O-ring 1 1 JIS B2401 P7 Valve O-ring 1 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

AWM20 to AWM40

B B B B B N.O.: Black Dimensions B B B N.C.: Gray O S O S 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 14 Width across flats 17 Model Standard specifications Optional specifications Square type pressure gauge Digital pressure gauge Round type pressure gauge P1 P2 A B Note) C D E G J F K H J H J H J AWM20/AWD20 28 27.8 1/8, 1/4 1/8 M28 x 1

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 03 04 1 2 1 4 6 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

VPA4

Without sub-plate VH VPA454/474 00 03 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 VHS standard 5 Body size 04 06 10 12 14 VPA450 Piping 3 4 standard 7 11 4 JIS Symbol 2 position double VPA4250/4270 0 Side ported 1 Bottom ported 2 position single VPA4150/4170 VPA470 4 W/o sub-plate Option Specifications Fluid Air 3 position exhaust center VPA4450 3 position closed center

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Without sub-plate 00 VPA4 54, 4 74 JIS Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 03 2 position double 2 position single Body size VPA4150/4170 VPA4250/4270 04 06 10 0 1 VPA4 5 Piping standard 3 4 standard 11 4 Side ported Bottom ported W/o sub-plate 5 7 0 1 12 14 0 1 VPA4 7 4 Option Side piping only 3 position exhaust center 3 position closed center VPA4350 VPA4450

Digital Pressure Switch (Built-in Regulator Type) ISE35 Series ®

55 mA or less (at no load) Switch output NPN or PNP open collector output: 1 output ISE70 Max. load current 80 mA Max. applied voltage 30 V (With NPN output) ZSE80 ISE80 Residual voltage 1 V or less (With load current of 80 mA) PS Response time 1 s (0.25, 0.5, 2, 3s selections) Short circuit protection Yes ISA3 1% F.S.

(D) A regulator with a backflow function is required. (E) The product was an AR50 or AR60.

Note 1) When only the AR series regulator of an old AC series modular F.R.L. unit (2 digits: AC□□) is replaced, the old spacer cannot be used with an AR-A series regulator. Replace the AR with an AR-A with a new spacer or with an AR-B.

Body Size: 50, Back Flow: w/o Backflow Function, Thread: Rc, Port Size: 10 (1), Mounting: w/o Mounting Option, Set Pressure: 1 (0.02 to 0.2 MPa Setting), Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Knob: Downward, Pressure Units: Unit on Product Label: MPa, Pressure Gauge in SI Units: MPa