Stations: 3 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: 0 (w/o SI Unit), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 4 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 6 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 6 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 7 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 8 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 03 (3/8), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: D Side, Thread: T (NPTF)

Stations: 9 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

Stations: 5 Stations, A, B Port: 03B (Side/Bottom, Side Plugged 3/8), SI Unit: QW (DeviceNet), P, R Port Size: 04 (1/2), P, R Port Location: U Side, Thread: T (NPTF)

VQ5000

U side (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc3/8, 1/2 (ports A, B) B 2 A 4 Indicator light 6 B 2 A 4 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override A 4 B 2 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5 P=41 58.5 P=41 B 2 A 4 1 X 12 Stations R4.5 D side 107.8 179 (single, double, 3 position, rubber type) 184.5 (3 position, metal type) 15.5 17 22

VNB

indicator light: DL) Main port Rc A B C D E F G H I J K L M N P Q R S T U V W Model VNB2V-10A VNB2V-15A VNB3V-20A VNB4V-25A 3 8 1 2 3 4 1 63 42 28 14 72.5 80.5 75 87 97 114 126.5 170.5 173.5 180.5 52 26 4.5 24.3 2.3 25 34 55 80 90 50 60 35 40 17.5 20 84 100 92 108 80 81 92 93 102 103 125.5 141.5 138 154 182 198 185 201 192 208 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 60.5 73 17-

53

Applicable model Minimum operating flow rate [L/min] HRS-BP005 HRSH090-ll-l 20 r t r e q To circulating fluid outlet r t w r Parts List No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (inch) 2 4 4 5 5 5 6 6 6 2 2 3 1 2 3 2 3 4 B B C A B C B C D 6 x 4 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 1/4" x 5/32" 10K-20A 10K-20A 10K-25A 10K-15A 10K-20A 10K-25A 10K-20A 10K-25A 10K-40A 12 x 10 1/2" x 3/8" 19 x 16 3/4" x 5/8" 25 x 22 1" x 7/8" Dimensions Union Flange: LQ3F Metric Size (S) T P M L2 L2 L1 L1