7.5

Note 2) For manifold dimensions including elbow fitting, refer to page 23. 3 4 5 6 7 8 9 10 L1 L2 L3 L4 110.5 110.5 123 135.5 135.5 148 148 160.5 173 100 100 112.5 125 125 137.5 137.5 150 162.5 72.8 80.3 87.8 95.3 102.8 110.3 117.8 125.3 132.8 22 18.5 21 23.5 19.5 22 18.5 21 23.5 18 Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type Dimensions: SJ2000

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

Dimension L Weight (g) 21 360.5 91.2 27 435.5 110.2 20 348 88 22 373 94.4 23 385.5 97.5 24 398 100.7 25 410.5 103.9 26 423 107 28 448 113.3 29 460.5 116.5 No.

Air Slide Table Series MXS

) MXS Stroke adjustment range A dimension (Retracted side mounting) Retraction end Extension end Model MXQ Stroke 10 Shock absorber at retraction end MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 11 21 31 31 26 32 32 32 5 10 20 20 15 20 20 20 Shock absorber at extension end Stroke 75 to 125 MXF A A Maximum 25 MXW MXJ Shock absorber at retraction end MXP MXY Other

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

Table of Contents

Support brackets are not for mounting; use them solely for providing support. 8-14-21 21 Series MY3A/3B Floating Bracket Facilitates connection to other guide systems.

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Metal Seal/Rubber Seal Series VQ Body Ported

125 135.5 61 72 137.5 148 2-4-49 C VQ0/1000/2000 Kit (Connector) Standard with lead wires connected to each valve individually.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

H B C F A E G J K L D Tolerance Size 40 double clevis type 50 double clevis type 63 double clevis type 80 double clevis type 100 double clevis type 125 double clevis type 160 double clevis type +0.027 0 +0.027 0 40 M8 x 20 21 60 45 19 12 R 15 9 12 18 32 47 44 L K counter bore depth 2 J counter bore 50 M10 x 22 23 73 50 23 12 R 18 11 14 21 35 53 53 A B +0.027 0 63 M10 x 25 27 80 55 23 15 R

AC Servo Motor Driver (Network card type ）

App.-21 App .9 Recommended parameter values for each actuator . App.-22 12 - 1. FUNCTIONS AND CONFIGURATION 1.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 L = 100 mm Max. speed = 200 mm/s or less 11LEJS 10 10 LEYG32L LEYG32L 25ALEYG32L LEYG32L Load mass m [kg] Load mass m [kg] LEYG25L LEYG25L LEC LEYG25L LEYG25L 1 1 LEC S LEC SS-T 120 125 120 125 0.1 0.1 Stroke [mm] 100 1000 40 35 10 Stroke [mm] 100 1000 40 35 10 LEC Y LEC Y !1 L = 50 mm Max. speed = Over 200 mm/s !

SY

SS5Y52, #1 40 Type20 Note) [ ]: Values for AC < >: Values with surge voltage suppressor SY7000: SS5Y7-20Stations Grommet (G) Scale: 35% L1 L2 10 Manual override 4-4.5 (mounting hole) 6-Rc 1/4 (P, EA, EB port) 19 21 52.8 39.8 B B B B B 39.4 60.7 <61.4> [62.3] 134.4 <135.8> [137.6] P EB EA P EA EB 121.4 <122.8> [124.6] 21 21 30 60 20 26 A A A A A 11.5 16.5 (lead wire length) Approx. 300 (Pitch

SQ1000/2000

A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

ZP

63 B10 63 M10 x 1.5 80 B12 80 M12 x 1.75 100 100 125 125 B01 Vacuum entry Pad type Rc 1/8 HB Large bellows pad Material N NBR S Silicon rubber U Urethane rubber F Fluoro rubber E EPR 13-11-91 Series ZPX ZPX HB-B01-B (Female thread) 40 50 ZPX HB-B01-B (Female thread) 65 80 Rc 1/8 I I Rc 1/8 Hexagon width across flats 21 11 Hexagon width across flats 21 11 Width across flats 37 4-M4 x

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Model Auto switch mounting Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Port size Lubrication Model Rubber Air 10-/21-CM2R20 10-/21-CM2R25 10-/21-CM2R32 10-/21-CM2R40 11-/22-CM2R20 11-/22-CM2R25 11-/22-CM2R32 11-/22-CM2R40 25, 50, 75, 100, 125, 150 1/8 Relief type Vacuum suction type 25, 50, 75,100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 1/4 Non-lube

MB

125 is not included in MBK, MBQ and MBB.