Compact Cylinder

75, 100 10 to 50 75, 100 10 to 50 75, 100 46 56 53.5 63.5 63 73 64 74 73.5 83.5 85 95 63 74 56 9 9 80 92 108 M FV 80 83.5 63.5 11 11 99 116 134 FT L FX FZ 4 x FD 100 95 73 11 11 117 136 154 B + Stroke A + Stroke Bore size (mm) Stroke range (mm) L L1 M 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 18 43.5 60 80 20 53.5 77 L1 100 22 53.5 94 Head flange: CQ2GS/CDQ2GS Flange bracket material

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

Smooth Cylinder/Low Speed Cylinder

7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

D-A73H LED Brown OUT (+) Brown Contact protection box CD-P11 CD-P12 Resistor Reed switch Mass Zener diode ~ (g) OUT () Blue Blue D-A72H D-A73H D-A76H D-A80H Auto switch model 10 11 10 10 0.5 Lead wire length (m) 47 52 47 47 3 D-A76H 77 5 DC (+) Brown LED (+) Resistor Load Reed switch DC power supply OUT Black Reverse current prevention diode Dimensions (mm) () D-A7H, D-A80H DC () Blue 8 3.2

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

M5 x 0.8 M5 x 0.8 M5 x 0.8 R 44 53 62 76 95 NB TB 8 8 10 10 12 Q 11 12 14 17 20 O 4.5 4.5 5 5.5 6 SC 8 11 14.5 17 23 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M 2 2 2 3 4 NA 16 18 20 26 30 NC 10 10 12 14 16 SA 4.5 5.5 5.5 6.6 6.6 SB 8 9.5 9.5 11 11 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 UB 6 10 10 12 12 VA VB 3 4 4 5 6 L Model MHSL3-32D MHSL3-40D MHSL3-50D MHSL3-63D MHSL3-80D MRHQ

Air Cylinder Series MB

11 11 11 10 13 13 13 14 14 15 17 9 9 10 11 11 11 10 D-Y59/Y69 D-Y7P/Y7V D-Y7W/Y7WV D-Y7BAL 5.5 5.5 7 7.5 6.5 5.5 7 D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D3.5 4 4 4.5 4.5 4.5 5 -X D-G39/K39 D-P4DWL 9 9 9 10 10 11 11 Individual -X 4 4 4 4.5 4 4.5 4.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Air Cylinder

Up to 500 54 4 7 30 134 3.2 55 75 23 10 27 171 Up to 500 Up to 300 52 47.3 7 5 66 36 82 45 143 Up to 300 10 15 30 39 11 18 177 188 Up to 300 10 11 53 53 77 44.5 143.5 154 154 * Dimensions other than mentioned above are the same as on page 256.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time s Initial

MHZ

point L (mm) Gripping point L (mm) MHS MHZJ2-10D/11-MHZ2-10D External Grip MHZAJ2, MHZJ2, 11-MHZ2 MHC 20 Gripping force (N) Pressure 0.7 MPa Pressure 0.7 MPa MHT 15 0.6 MPa 0.6 MPa 0.5 MPa 0.4 MPa 0.3 MPa 0.2 MPa 0.5 MPa MHY 10 0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.

MHZ

MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa

5

7.5 2.5 10 7.5 4.5 10 7.5 25 6 3.5 1.5 [1] 6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.

Magnetically Coupled Rodless Cylinder

50 300 200 100 10 5 Usable range 20 30 40 50 Usable range 1 0 1 2 3 4 5 6 10 0 1 2 3 4 5 6 Distance from cylinder shaft center Lo (cm) 7 8 9 10 11 12 13 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) CY3B25 500 Allowable driving force Fn (N) 300 200 100 20 30 40 50 10 Usable range 5 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 Distance from cylinder shaft center Lo (cm) 3 Model

Electric Actuator/Slider Type

4 680 700 952 706 867 10 4 680 800 1052 806 967 12 5 850 900 1152 906 1067 14 6 1020 1000 1252 1006 1167 14 6 1020 1100 1352 1106 1267 16 7 1190 1200 1452 1206 1367 16 7 1190 1300 1552 1306 1467 18 8 1360 1400 1652 1406 1567 20 9 1530 1500 1752 1506 1667 20 9 1530 1600 1852 1606 1767 22 10 1700 1700 1952 1706 1867 22 10 1700 1800 2052 1806 1967 24 11 1870 1900 2152 1906 2067 24 11 1870 2000

Made to Order

21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5 12.5 14 14 16.5 58 64 83 93 112 120 148 162 M4 x 0.7 10 12 13 15 20 20 22 22 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200, 250 94 M5 x 0.8 M5 x 0.8 109 M5 x 0.8 M5 x 0.8 20, 30, 40, 50, 75, 100,

Air Cylinder Series CA2

15 8 M8 x 1.25 6 14 11 M14 x 1.5 27 1/4 3/8 3/8 1/2 1/2 CS2 50 Up to 600 20 to 600 35 32 70 27 52 20 40 10 17 11 M8 x 1.25 7 18 11 M18 x 1.5 30 63 Up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 14 M18 x 1.5 31 80 Up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 10 22 17 M22 x 1.5 37 100 Up to 750 20 to 750 40 37 116 41 92 30 52 14 21 16 M12 x 1.75 10 26 17

Air Cylinder

(12) 35 5 26 M4 x 0.7 depth 7 8 M8 x 1.25 24 1/8 69 (77) 11 11 M5 x 0.8 106 (114) 25 Up to 300 301 to 1500 22 19.5 17 16.5 11 14 2 12 10 (12) 40 6 31 M5 x 0.8 depth 7.5 10 M10 x 1.25 29 1/8 69 (77) 11 11 M6 x 0.75 111 (119) 32 Up to 300 301 to 1500 22 19.5 17 20 12 18 2 12 10 (12) 40 6 38 M5 x 0.8 depth 8 10 M10 x 1.25 35.5 1/8 71 (79) 11 10 (11) M8 x 1.0 113 (121) 40 Up to 300 301 to 1500

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

-9200-www.stevenengineering.com 11-11-10 Reed switch Solid state switch CRA1 11-11-11 D-90/97 D-A90/A93/A96 D-A90V/A93V/A96V 11-11-12 CRQ2 Grommet D-90A/93A 11-11-13 Direct MSQ D-R731/R732 11-11-14 D-R801/R802 11-11-14 MRQ 11-11-15 D-R731C/R732C Connector 11-11-15 D-R801C/R802C DRail D-A79W 11-11-16 2-color indication 2-color indication With diagnosis output 2-color indication Water resistant

XM, XY

-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

15

1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NY M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 7.5 19 M3 x 0.5 5.5 45 30 5 11 38 NX M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 8 4.5 19 M4 x 0.7 7.5 46 30 3.7 11 42 NM1 M3 x 5 0.63 M3 x 8 0.63 M4 x 10 1.5 5 11.8 19 3.4 7.0 31 28 3.5 8.5 42 NM2 M2.5 x 10 1.0 M3 x 8 0.63 M4 x 10 1.5 6 48 19 3.4 7.0 31 28 3.5 8.5 42 25 NZ M3 x 12 1.5

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

12.5 8 10 13.5 11 7.5 Auto Switch Mounting Bracket Part No.