C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5

Compact 5-Port Solenoid Valve

(Tightening torque: 0.15 Nm) 11) For products with a switch, mount the switch assembly. (Be careful not to drop the O-ring.

C95

11 16 10 72 94 50 36 5 20 45 16 50 CS1 100 110 60 115 12 11 20 10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14

High Power Cylinder Series RHC

Applicable bore size C D d H Applicable bore size C D d H 5 12.5 15 26 30 M8 x 1.25 8 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 16.5 19.6 32 36.9 M10 x 1.25 8 M24 x 1.5 32 17 25/32 25 SOR-25 NT-03 8 21.0 25.4 38 43.9 M14 x 1.5 9 M30 x 1.5 38 22 40 32 SOR-32 NT-04 11 26 31 41 47.3 M18 x 1.5 11 M33 x 2.0 41 27 50 40 SOR-40 NT-05 11 26 31 M18 x 1.5 27 63 NT-05 13 31 37 M22 x 1.5 32 80 NT-08 16 39

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

Electric Actuator

Note 10) With lock only Note 11) For an actuator with lock, add the power consumption for the lock.

MNB

18.3 54 12 4 88.5 19.5 1/8 83 45.5 10 35 10 40 to 800 30 22 8 52 104 38 16 13 14 16.5 19.5 63 12 4 96.5 27 1/8 91 52.5 14 40 12.5 50 to 1000 35 27 11 65 120.5 46.5 20 14 15.5 19 22.4 75 15 5 111.2 32 1/4 104.5 58.5 18 45 17.5 63 to 1000 35 27 11 75 134.5 56.5 20 14 16.5 23 20.7 90 12 9 123.5 32 1/4 119.5 68 18 45 22 80 to 1000 40 32 13 95 169 72 25 20 19 33 26 102 18 11.5 157 37 1/4 150

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Rubber Seal 3 Port Solenoid Valve Series 10-SYJ300/500/700 Directional Control Valves Air Grippers Modular F. R.

IDU/IDF

E Q P N M L K J I H G F D C B A Port size Model 71 50 90 700 700 600 356 328 398 219 642 63 445 70 1235 1155 750 300 R 1 IDU22C1/22C 112 50 90 780 776 680 416 388 463 269 722 68 550 136 1350 1260 830 360 R 1 1/2 IDU37C1/37C 87 50 95 800 800 700 461 433 508 267 722 68 530 155 1440 1340 850 405 R 2 IDU55C 87 50 95 800 800 700 481 453 528 317 722 68 530 220 1575 1475 850 425 R 2 IDU75C : Power

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

560 700 470 470 620 470 620 560 700 560 700 560 700 4.5 0.61 15 1 4 (8A) 1.0 6 1.1 26 6 1.1 26 8 1.6 38 3 0.33 7.9 0.5 500 10 4.5 0.61 15 1.9 46 3 8 (10) 660 500 660 3 7.9 0.33 6 1.1 26 4.5 0.61 15 1.0 Note) Weight of grommet type.

AC Servo Motor Driver (Pulse input type/Positioning type ）

OPTIONS AND PERIPHERAL EQUIPMENT . 11-2 11.1 Cable/connector sets . 11-2 11.1.1 Combinations of cable/connector sets . 11-3 11.1.2 STO cable . 11-6 11.1.3 Encoder cable/connector sets . 11-7 11.1.4 Motor cables . 11-9 11.1.5 Lock cables . 11-10 11.2 Regenerative options . 11-11 11.2.1 Combination and regenerative power . 11-11 11.2.2 Parameter setting . 11-11 11.2.3 Selection of regenerative

CL

11 11 14 17 17 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 1/4 3/8 3/8 1/2 1/2 6 7 7 11 11 MGQ MGG MGC CLAB40SCLA40, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB50SCLA50, #1 (#1+#11) CLAB63SCLA63, #1 (#1+#11) CLAB80SCLA80, #1 (#1+#11) CLAB100SCLA100, #1 (#1+#11) MGF CY1 MY1 3.1

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Double acting Single rod Air cushion (Both sides)

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

CA H6 R1 32 E5032 11 10 6.6 38 51 10 21 7 18 260.2 0.6 31 32 8 10 40 E5040 11 12 6.6 41 54 10 24 9 22 280.2 0.6 35 36 10 11 50 E5050 15 12 9 50 65 12 33 11 30 320.2 0.6 45 45 12 12 63 E5063 15 16 9 52 67 14 37 11 35 400.2 0.6 50 50 12 15 80 E5080 18 16 11 66 86 18 47 12.5 40 500.2 0.6 60 63 14 15 100 E5100 18 20 11 76 96 20 55 13.5 50 600.2 0.6 70 71 15 19 l3 l1 Single clevis with ball joint

C95Series

20 11 22 14 60 60 129 MB-SIO . 100 11 4 \20 90 15 158 132 \84 26 13.5 24 17 75 100 '29 25 +008001 (mm) [~ "r.

Environment

-LEFS Series Clean Room Specication Model Selection LEFS SeriessPage 76 11-LEFS SeriessPage 522 Selection Procedure Step 1 Check the work loadspeed.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

-LEJS Series AC Servo Motor Clean Room Specication Specifications 11-LEJS40, 63 AC Servo Motor Model 11-LEJS40S2 6 11-LEJS63S3 7 Stroke [mm] Note 1) 200, 300, 400, 500, 600, 700, 800 900, 1000, 1200 300, 400, 500, 600, 700, 800, 900 1000, 1200, 1500 Work load [kg] Note 2) Horizontal 30 55 45 85 Vertical 5 10 10 20 Up to 500 1200 600 1200 600 501 to 600 1050 520 1200 600 601 to 700 780 390

SYJ3000/5000/7000

length) Pg7 20 20 20 20 107 [111.4] 3 3 3 3 87.4 [91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6 (For mounting) 23 23 23 27 2-2.6 (For mounting) Refer to page 1-5-79 for dimentions with connector cable. 1-5-32 33 5 Port Solenoid Valve Rubber Seal Series SYJ5000 3 Position Closed Center/Exhaust Center/Pressure Center [ ]: AC 3 4 5 3 4 5

3 Port Air Operated Valve

441 426 468.5 453.5 496 481 523.5 508.5 551 536 578.5 563.5 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 1571 VPA300/500/700 Series VPA500 Series/Dimensions Type 41/Common exhaust: VV3PA5-411-03 Stations 92.5 2 x 7.2 (For mounting) 30 N.C.

/

560 700 470 620 470 620 470 620 560 700 560 700 560 700 3 0.45 0.33 3.0 4.5 2.3 0.46 0.61 1/4 (8A) 6 4.1 0.30 1.10 8 6.4 0.30 1.60 1.0 10 8.8 0.30 2.00 3 1.2 0.45 0.33 3.0 4.5 2.3 0.46 0.61 3/8 (10A) 6 4.1 0.30 1.10 1.60 8 6.4 0.30 1.0 10 11 2.20 0.30 1/2 (15A) 10 11 2.20 0.30 Note) Weight of grommet type.