Manifold Specifications

(L) 3 position 142 Double 132 Single 88.5 3 position: 157.5 Double: 147.5 Single 104 300 (Lead wire length) 300 (Lead wire length) With light/surge voltage suppressor: Type LZ DIN terminal (D) Plug connector (M) 3 position: 161 Double 151 Single 98 300 (Lead wire length) MAX.10 3 position 156.5 Double 146.5 Single 95.5 73 With light/surge voltage suppressor: Type MZ With light/surge voltage

KJ

11 !2 !33 !4 !5 !

45

Triangle mark position Stations n 11 stations 12 13 14 15 16 17 18 19 20 stations 310.5 323 235.5 248 248 260.5 273 285.5 298 310.5 L1 L2 L3 L4 (Rail mounting hole pitch 12.5) 300 312.5 225 237.5 237.5 250 262.5 27.5 287.5 300 286.5 297 202.5 213 223.5 234 244.5 255 265.5 276 12 13 16.5 17.5 12 13 14 15 16 17 1-6-96 Base Mounted Series SX3000/5000 SS5X3-45PDStations U(26 pins) C4 C6 (Pitch

5

11 11 D-A59W 13 13 13 14 14 15 D-A3m/A44 9 9 10 11 11 11 D-Y59m/Y69m D-Y7P/Y7mV D-Y7mW/Y7mWV D-Y7BA 5.5 5.5 7 7.5 6.5 5.5 D-F5m/J59 D-F5mW/J59W D-F5BA/F5NT D-F59F 3.5 4 4 4.5 4.5 4.5 D-G39/K39 9 9 9 10 10 11 D-P3DWA 3 4.5 4.5 5 5 5.5 D-P4DW 4 4 4 4.5 4 4.5 DValues which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and

45

to 20 stations: W = 22n + 140 2 to 10 stations: W = 47n + 156 11 to 20 stations: W = 47n + 190 Manifold base weight W (g) n: Stations Note) For more than 11 stations, supply pressure to P port on both sides and exhaust from R port on both sides.

SZ3000

Switch (When equipped with switch) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 310.5 300 286 12.5 285.5 275 254.5 15.5 298 287.5 265 16.5 310.5 300 275.5 17.5 235.5 225 202 17 248 237.5 212.5 18 248 237.5 223 12.5 260.5 250 233.5 13.5 273 262.5 244 14.5 198 187.5 170.5 14 210.5 200 181 15 223 212.5 191.5 16 148

SZ3000

Switch (When equipped with switch) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Internal Pilot Manifold L Dimension n: Stations (n1 + n2) L1 L2 L3 L4 310.5 300 286 12.5 285.5 275 254.5 15.5 298 287.5 265 16.5 310.5 300 275.5 17.5 235.5 225 202 17 248 237.5 212.5 18 248 237.5 223 12.5 260.5 250 233.5 13.5 273 262.5 244 14.5 198 187.5 170.5 14 210.5 200 181 15 223 212.5 191.5 16 148

SZ3000

Double wiring specification Symbol D Mounting position 11 12 10 11 10 stations 11 stations D Side 11 stations 12 stations Specified layout Note 2) Specified layout (up to 22 solenoids possible) ... ... ... ...

Modular/F.R.L. Units Series AC

11 6.4 AG Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

273 262.5 244 14.5 17 285.5 275 254.5 15.5 18 298 287.5 265 16.5 19 310.5 300 275.5 17.5 20 310.5 300 286 12.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15 10 223 212.5 191.5 16 11 235.5 225 202 17 12

New

The surface roughness of the orifice machining should be Rz6.3 or less. 89.1p0.8 156p0.3 65 or more 76.3p0.7 144p0.3 B B R1 R1 A 0.1 0.1 A R2 R2 80 or more 0.05 0.05 B R1 R1 A A 0.1 Rz25 Rz25 0.1 B 18.3p0.2 340.2 65A Steel tube 80A Steel tube VXF27B<<< VXF28B<<< 8 x M10 x 1.5 x 20 /C1 8 x M10 x 1.5 x 20 /C1 7 x 45o 7 x 45o 22.5o 22.5o A A A A 1780.2 178p0.2 A-A A-A The surface roughness of

K35-OMW0030

300 mm 350 350 mm 450 450 mm 530 530 mm 15 (6) Rod boot Part number Bore size Stroke (mm) (mm) Silicone rubber material Nylon tarpaulin 125 200 C96A2G-1461V-R C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1-J25-530 530 320 Ambient temperature specifications

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Manifold Specifications

172.2 Double 165 Single 114.5 300 (Lead wire length) Single 99 300 (Lead wire length) With light/surge voltage suppressor Plug connector (M) DIN terminal (D) With light/surge voltage suppressor 3 position 176 Double 168.5 Single 108.5 300 (Lead wire length) 3 position 171.5 Double 164 Single 106 MAX.10 79 With light/surge voltage suppressor Pg7 103 95.4 PE P EB EA n: Stations L Stations

Possible to transfer a workpiece at low-speed.

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 10 10 10 10 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket 15 Wear ring 15 Wear ring 15 Wear ring 15 Wear ring 4 4 4 4 16 Piston seal 16 Piston seal 16 Piston seal 16 Piston seal 4 4 4 4 25 Seal washer 25 Seal washer 25 Seal washer 25 Seal washer 2 2 2 2 A set includes all

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Large Size Vacuum Module: Series ZR

Symbol ZR1-R1 -R2 -R3 -R4 -R5 -R6 -R7 -R8 BM1 ZR1 R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 PV PV PV PV PV PV PV PV PE PE Refer to Example 1).

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 23 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch for General Fluids

Manifold Specifications

EVS (Pitch) Manual override (Non-locking) VFN M5 x 0.8 (PE port) 4-4.5 Mounting hole 2-Rc 1/8 (1(P) port) (4(A), 2(B) port) 300 (Lead wire length) (Pitch) (5(R1), 3(R2) port) (mm) Stations 2 3 50 40 66 56 20 338 328 L1 L2 4 82 72 5 98 88 6 114 104 7 130 120 8 146 136 9 162 152 10 178 168 11 194 184 12 210 200 13 226 216 14 242 232 15 258 248 16 274 264 17 290 280 18 306 296 19 322 312 3-3

High-Precision Digital Pressure Switch

or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 24 or more Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel fitting dimensions (Bottom ported) Individual mounting 36 x n pcs. +