ZP -57 Series ZP Vacuum Pad/Components Refer to page 13-11-62 to 13-11-64 for part numbers of e to y.
11 20.5 41 (P, EA, EB port) 1/8 L plug connector (L): 10-SY3 40(R)-L-01 3 4 5 M plug connector (M): 10-SY3 40(R)-M-01 3 4 5 M8 connector (WO): 10-SY3 40(R)-WO-01 3 4 5 Approx. 300 (Lead wire length) 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 66.5 34 41.4 115.3 60 97.5 [101.9] 117.1 [121.5] 42.3 [44.5] 20.5 11 11 20.5 11 20.5 11 11 11 32.5 [34.7] 27.5 7.5 16.5
(mm) T U Y V Without lock With lock F G W X Z W X Z 25 15 to 100 92 1 26.5 40 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 32 20 to 100 118 1 34 60 80 120 14 120 160 14 2 4 105 to 500 63 50 to 200 146 4 32.2 60 98.5 138.5 12.5 (13.5)138.5 178.5 12.5 (13.5) 4 8 205 to 500 505 to 800 L lead Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1
page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.
Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.
-87 Series ZPT ZPT HB-A16 (Male thread) 100 125 100 125 ZPT HB-B (Female thread) M16 x 1.5 Hexagon width across flats 22 Rc 1/8 6 6 Hexagon width across flats 24 70 25 70 Width across flats 60 4-M5 x 0.8 G 4-M5 x 0.8 11 11 G Width across flats 60 F F E E Y Y 8 10 40 40 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT100HB-A16 ZPT100HB-B12 M12
207 M16 x 1.5 0.025 0.064 50 50 46 40 M24 x 1.5 35 32 28 11 24 65 233 30 27 22.4 9 19 60 228 M20 x 1.5 0.15 63 63 55 46 M30 x 1.5 45 42 35.5 13 30 80 258 35 32 28 11 24 70 248 M24 x 1.5 0.030 0.076 0.2 80 80 65 55 M39 x 1.5 60 57 45 15 41 95 297 45 42 35.5 13 30 80 282 M30 x 1.5 0.030 0.076 0.036 0.090 0.23 0.3 0.18 100 100 80 65 M48 x 1.5 75 72 56 16 50 115 327 60 57 45 15 41 100 312 M39
Control power supply (+) Lock release (+) [I/O cable] LEC CK4 Cable length (L)[m] 1 3 5 1.5 3 5 Controller side PLC side (16) (10) (11) (30) (60) (L) Conductor size: AWG26 Terminal no.
Hz), 200 to 230 VAC (50/60 Hz) Reference page Page 607 522 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series AC Servo Motor Clean Room Specication Specifications 11-LEFS25, 32, 40 AC Servo Motor Model 11-LEFS25S2 6 11-LEFS32S3 7 11-LEFS40S4 8 Stroke [mm] Note 1) 50 to 600 50 to 800 150 to 1000 Work load [kg] Note 2) Horizontal 20 20 40 45 50 60 Vertical 8 15 10 20 15 30 LEF Up
Rc1/8 60 40.5 140 11 6.5 19 30 68 16 M8 x 1.25 6.8 132 74 88 13 M6 x 1 80 26 MY1M32 35 37 50 52.3 74 Rc1/8 80 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 162 89 104 13 M6 x 1 96 32 MY1M40 65.3 94 Rc1/4 100 38 45 63.5 P indicates cylinder supply ports.
60 75 75 75 242 269 288 336 365 437.5 456 494 11 11 11 11 11 16 16 18.5 16 19 23 28 36 35 40 45 244 273 296 347 381 443.5 465 509 16.5 16.0 16.0 18.0 18.0 40 40 40 8 11 11 13 16 8 0 0 0 0 59 66 66 80 81 133 133 141 6 7 7 11 11 15 15 17 51 58 58 71 72 110 110 120 14 18 18 22 26 31 31 36 30 35 40 48 58 65 75 80 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M30 x 1.5 M30 x 1.5 M36 x 1.5
(Refer to page 6-3-60.) Standard stroke (mm) Same as the standard. (Refer to page 6-3-60.)
60, 70, 80, 90, 100 Weight/( ): Denotes the values with D-A93.
25 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) 20 0.5 MPa 15 0.4 MPa 0.3 MPa 10 L 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa 60 0.6 MPa 50 0.5 MPa 40 0.4 MPa 30 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa 0.6 MPa 80 0.5 MPa 60 0.4 MPa 0.3 MPa 40 0.2 MPa 20 0
-D IS10L-40-m02-D IS10L-40-m03-D IS10L-40-m04-D IS10L-60-m04-D IS10L-60-m06-D IS10L-60-m10-D Pressure switch with L-shaped piping adapter*5, *6 IS10L-20-m01-D IS10L-20-m02-D IS10L-50-m04-D IS10L-50-m06-D p. 56 IS10E-40-m02-D IS10E-40-m03-D IS10E-40-m04-D IS10E-40-m06-D IS10E-60-m06-D IS10E-60-m10-D IS10E-60-m12-D IS10E-60-m14-D IS10E-20-m01-D IS10E-20-m02-D IS10E-20-m03-D IS10E-30-m02-D IS10E
VQ7 EXH block disk SUP block disk 1305 Series VFR5000 Manifold: Plug-in Type/Non Plug-in Type 235.5 Plug-in type (With terminal block): VV5FR5-01TStation 1Bore size 204 (72) 60 11 60 4 U side Manual override (Non-locking) 21 R5.5 B B B B n A A A A B B B A B B B B A A A A 3 A A L2 L1 2 P = 51 11 11 71.5 (Pitch) P = 51 (Pitch) 1 6 [2] 71.5 Stations 24 [23] 20 91 114 179 Light/Surge voltage
point L (mm) Gripping point L (mm) Internal Grip MHZJ2-10D/11-MHZ2-10D MHZAJ2, MHZJ2, 11-MHZ2 Pressure 0.7 MPa Pressure 0.7 MPa 25 0.6 MPa 0.6 MPa 20 Gripping force (N) 0.5 MPa 0.5 MPa 15 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa
MPa 10 L 0.2 MPa 0.2 MPa 5 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-16D/11-MHZ2-16D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20 0.2 MPa 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D 100 Pressure 0.7 MPa Pressure 0.7 MPa 0.6 MPa 0.6 MPa 80 Gripping force (N) 0.5 MPa
Type MHSH3-32DA MHSH3-32DB 11 60 PA 50 10 PB PA Pusher thrust (N) Pusher thrust (N) Spring force (N) 9 40 PA: Pusher thrust 8 30 20 7 10 6 PB 0 0.1 0.2 0.3 0.4 0.5 0.6 0 1 2 3 4 5 6 Pusher stroke (mm) Supply pressure (MPa) PB: Spring force MHSH3-40DA MHSH3-40DB 16 180 15 150 PA PB Spring force (N) 14 120 13 90 12 60 11 30 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1 2 3 4 5 6 Supply pressure (MPa) Pusher