Stations: 06

Stations: 09

Stations: 17

Stations: 12

Stations: 05

Table of Contents

-04 AS121F-M5-03 5/32" M5 x 0.8 M5 x 0.8 8 17.3 22.2 7 9.3 22.1 9.6 4 25 25.8 22.1 28.6 9.3 17.3 AS121F-U10/32-04 AS121F-U10/32-03 5/32" 10-32UNF 10-32UNF AS121F-M5-06 AS121F-M5-05 3/16" M5 x 0.8 M5 x 0.8 11.4 21.3 26.1 7 16.5 13.5 11.7 22.9 11.6 18.1 6 AS121F-U10/32-06 AS121F-U10/32-05 3/16" 10-32UNF 10-32UNF 8 11.7 28.6 25.8 22.2 25 9.6 AS221F-01-23 AS2 1F-M5-07 20.4 16 9.3 27.5 3.2 1/4

2

, 03, 04, 06, 07 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 100 200 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Table of Contents

(mm) M5> M5> Weight (g) Model A M L Nylon Urethane 0.9 KJH23-M3 KJH23-M5 KJH23-01S KJH04-M3 KJH04-M5 KJH04-01S KJH06-M5 KJH06-01S M3 x 0.5 M5 x 0.8 R M3 x 0.5 M5 x 0.8 16.3 16.7 13.7 13.6 12.7 0.9 1.6 2 4.7 1.9 2.4 4.6 3.3 5.2 7 3.2 3 2.5 9.8 1 8 13.8 16.3 17 13.7 13.9 14.8 17.8 19.4 10 0.9 0.9 8 12.7 4 4 4 10.8 R 1 8 10 M5 x 0.8 14.7 4 10 4 10 13.5 10 6 15.4 R 1 8 Applicable

CATALOG

2 7 21.5 18 14.5 2.5 2.9 3.2 M5x0.8 KJF23-M5 7 7 21 7.5 14.5 3/2.5 2.9 4 M3x0.5 KJS04-M3 1.5 8 18 15.5 14.5 1.4 1.5 4 M3x0.5 KJF04-M3 8 8 18 5.5 14.5 4 3.2 4 M5x0.8 KJS04-M5 2.5 8 20.5 17 14.5 4 2.6 4 M5x0.8 KJF04-M5 8 8 20.5 7.5 14.5 4 3.8 4 R(PT)1/8 KJS04-01S 3 9.8 21.5 17.5 14.5 4 5.3 6 M5x0.8 KJF06-M5 10 10 20 7 15.5 10 5.1 6 M5x0.8 KJS06-M5 2.5 10 21.5 18 15.5 4 3.2 6 R(PT)1/8 KJS06

Speed Controller with Indicator

[L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Air Fittings & Tubing

KQ2W23-M5 30 8 31 10 M5 X 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 3.2 1 8 KQ2W23-01S KQ2W23-02S 10 14 1 4 8 32 38.5 18 30 37.5 KQ2W04-M5 KQ2W04-01S M5 X 0.8 11 3.0 3.0 8 10.4 16 4 1 8 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 33.5 42.5 30.5 40 KQ2W06-M5 KQ2W06-01S 3 3 8 M5 X 0.8 8 1 8 10 6 17 12.8 20 10 1 4 46 46.5 17 14 KQ2W06-02S 10.9 8.6 41 3 8 KQ2W06-03S 48

1

T.T. 12 10 1 (P) 10.5 (37.1) (47.6) (A) 2 3 port 30 12 10 1 (P) 3 (R) 17 44 2 x 4.6 mounting hole 25.4 2 x M5 x 0.8 depth 4 14 8.5 * 0.5 MPa supply F.O.F.* 13 N P .T. 3.2 mm O.T. 2.3 mm T.T. 5.5 mm One way roller lever VM123-M5-02A VM133-M5-02A VM123-M5-02SA VM133-M5-02SA 10 Polyacetal or hard steel roller 46.5 29.2 (A) 2 Symbol 2 port 8 P.T. O.T. T.T.

Table of Contents

Thread dia. 4, 6 tube 4, 6, 8 tube 6, 8 tube Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x

KJ

(inch) Connection thread R Model H (Width across flats) L2 A M Min. port size <M5> Note) Weight (g) D1 D2 L1 15.3 10 KQ2L01-M5 M5 x 0.8 7 1 8 10 2.5 8.4 12.7 24 13.2 14.3 2.3 KQ2L05-02S KQ2L05-01S 1 8 22.5 26.5 11.4 10 19.5 16.5 3.5 3 16 1 4 3.2 19 18 26 14 12 16.1 KQ2L07-M5 M5 x 0.8 7 13.6 15.1 2.3 1 8 1 4 KQ2L07-01S 23.5 26 10 4.6 10 20 32 12 20 28 23 Applicable tubing 1 4 KQ2L07-02S

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size With One-touch fitting 01 03 05 07 09 11 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 04 06 08 10 12 4 6 8 10 12 Stainless steel specifications (SUS303) AS Thread type ASP Port size Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT ASN M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AQ ASV AK ASS ASR Needle Valve/Flow Characteristics ASF ASD230FG ASD330FG ASD430FG

VM

VM120-01-07 VM120-01-07S VM130-01-07 VM130-01-07S VM122-M5-07 VM122-M5-07S VM132-M5-07 VM132-M5-07S Cross roller plunger Toggle lever VM120-01-08 VM130-01-08 VM122-M5-08 VM132-M5-08 VM130-01-30R VM130-01-30B VM130-01-30G VM130-01-30Y VM132-M5-30R VM132-M5-30B VM132-M5-30G VM132-M5-30Y VM120-01-30R VM122-M5-30R VM122-M5-30B VM122-M5-30G VM122-M5-30Y VM-30AR Red Push button (Mushroom) VM-30AB

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 KE N AS-FG AS-FG AS-FP Note) For applicable tubing O.D. selection, refer to the Model on page 680. Use 1/8" tube.

F

2 7 21.5 18 14.5 2.5 2.9 3.2 M5x0.8 KJF23-M5 7 7 21 7.5 14.5 3/2.5 2.9 4 M3x0.5 KJS04-M3 1.5 8 18 15.5 14.5 1.4 1.5 4 M3x0.5 KJF04-M3 8 8 18 5.5 14.5 4 3.2 4 M5x0.8 KJS04-M5 2.5 8 20.5 17 14.5 4 2.6 4 M5x0.8 KJF04-M5 8 8 20.5 7.5 14.5 4 3.8 4 R(PT)1/8 KJS04-01S 3 9.8 21.5 17.5 14.5 4 5.3 6 M5x0.8 KJF06-M5 10 10 20 7 15.5 10 5.1 6 M5x0.8 KJS06-M5 2.5 10 21.5 18 15.5 4 3.2 6 R(PT)1/8 KJS06