10

45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 100 114 73 64 45 14 86 30 111 12.5 11 22 10 65 228 22+0.084 0 MB-B12 125 136 90 78 60 15 110 32 136 13 13.5 24 14 75 267 25+0.084 0 Rotating Angle Model without air cushion is designed to include rubber bumpers.

Compact Cylinder

, 30, 35, 40, 45, 50 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Other intermediate strokes can be manufactured upon receipt of order.

Mechanically Jointed Rodless Cylinders

MY316 300 400 500 500 400 300 950 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 240 N 100 100 30 40 50 50 40 30 20 20 10 10 1 2 3 4 5 10 20 30 10 5 4 3 2 1 0.2 0.4 0.3 m1max m3max m1max m2max m3max m2max Weight (kg) Weight (kg) MY320 MY340 500 400 300 300 400 500 370 N Collision deceleration (m/s2) Collision deceleration (m/s2) 200 200 1500 N 100 100 50 40 30 30 40

Clamp Cylinder Series CK1

Auto Switch l1 50 Safety distance (mm) 40 Operational range 30 l1 20 l1 Dangerous range 10 0 5000 10 15000 20 Welding current (A) l2 50 40 Safety distance (mm) 30 l2 l2 Operational range 20 10 0 5000 10 15000 20 Welding current (A) 1340

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) Applicable Auto Switch Auto switch mounting Applicable air grippers Applicable rotary actuators Auto switch model Electrical entry Page Type CRB2 Size Size CRBU2 30 50-100 10/15 20-40 10-40 32/40 1/3 7/20 10-200 05/1 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB2 CDRBU2 CDRQ2MRQ

Electric Actuator

20 30 40 50 0 10 20 30 40 60 70 80 50 Work load [kg] Work load [kg] 1,000 1,000 800 800 Overhang: L2 [mm] Overhang: L3 [mm] Overhang: L4 [mm] Overhang: L5 [mm] 600 600 Mey m 400 400 L2 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Precautions LECS; Work load [kg] Work load [kg] 1,000 1,000 800 800 600 600 L3 m Mer 400 400 200 200 0 0 0 10 20 30 40 60 70 80 50 0 10 20 30 40 50 Work

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 10 75 80 85 D-A9V 10 + 30 (n2) 2 75 + 30 (n4) 2 80 + 30 (n4) 2 85 + 30 (n4) 2 n pcs. (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 2, 4, 6, 8) 2 pcs. (Different surfaces, Same surface), 1 pc. 15 105 110 115 D-M9 D-M9W 15 + 40 (n2) 2 105 + 40 (n4) 2 110 + 40 (n4) 2 115 + 40 (n4) 2 n pcs.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

10 20 20 ZZ + 2 Stroke S + Stroke (mm) A AL Bore size Stroke range Standard Long B1 C D E F GA H H1 I J K KA MM NA P RA S 1 2 ZZ 20 20 20 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 8 10 12 16 20 20 25 30 14 16.5 20 26 32 38 50 60 13 17 17 19 27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

24 Series MGZR Double Power Cylinder (Without non-rotating mechanism) Double Clevis Bracket DX B Z + Stroke DB DD 4-DT B DS DH MX MTS 4-DR DA DU DU DL DC DE DO DO MY Bore size (mm) 22 22 30 30 45 45 60 CY DX DS DH Z DDH10 DC DT DU DR DO DL DE B DA DB Model 20 25 32 40 50 63 80 14 14 20 20 30 30 32 7 7 8 8 10 10 14 44 44 60 60 86 86 110 15 15 18 18 22 22 24 10 10 11.5 11.5 14 14 15 6.6 6.6

48

Size 6 10 Rotation angle() 310, 180, 90 Rotation angle() 310, 180, 90 Size Size 10 30 50 10 30 50 25, 50, 75 25, 50 320, 180, 90 320, 180, 90 CAT.NAS100-94 CAT.NAS100-92 Gripper Step Motor (Servo/24 VDC) With dust cover Z type (2 fingers) Series LEHZJ F type (2 fingers) Series LEHF S type (3 fingers) Series LEHZ Series LEHS Opening/closing stroke Opening/closing stroke 4 6 10 14 22 30 Opening

Air Slide Table

10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30 30 40 40 40 40 40 40 Stroke 50 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

1 Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) Applicable Auto Switch Auto switch mounting Applicable rotary actuators Applicable air grippers MHZ Auto switch model Electrical entry Size Page Type Size MHF 30 50-100 10/15 20-100 10/15 20-40 32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB

Dual Rod Cylinder Series CXSJ/CXS

15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Specifications Suction flow rate of vacuum suction type (Reference

24

16 12 12 1 1 12 12 12 0.5 10 30 31 50 100 101 200 300 0.5 10 30 31 50 100 101 200 300 Stroke [mm] Stroke [mm] MGPL32 to 63, MGPA32 to 63 MGPL32 to 63, MGPA32 to 63 50 50 50, 63 50, 63 Load mass m [kg] Load mass m [kg] 50, 63 50, 63 32, 40 50, 63 32, 40 32, 40 32, 40 10 10 50, 63 32, 40 32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100,

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-M9mAV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 15 + 30 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 15 D-A9m n 10 + 40 (n 2) /2 n = 2, 4, 6, 8 15 + 40 (n 2) /2 n = 2, 4, 6, 8 2 (Different surfaces, Same surface) 1 10 D-A9mV n 10 + 30 (n 2) /2 n = 2, 4, 6, 8 D-F5m D-F5mW

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

20 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Transfer speed [m/min] = 0 Transfer speed [m/min] =