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AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR

PAB-OM-H007-D PRODUCT NAME Process Pump MODEL / Series / Product Number PAF3410 Contents Safety Instructions P.2 to 3 1. Precautions for handling P.4 2. Precautions for installation -P.5 3. Description and function of individual port -P.5 4. How to use -P.5 to 6 5. Maintenance and check -P.6 6. Specification and how to order P.7 to 8 7. Discharge capability -P.9 to 10 8.

min) 15 *Limited flow shows the limit of converter oil level speed (0.2m/s) which can maintain stability of converter oil level. 4.12-8 Air-hydro Converter Series CCT Air-hydro Converter/CCT63/CCT100/CCT160 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC (mm) Model Air port size Rc (PT) Oil port size Rc (PT) A B lC DA DB DL H NL P QB QL S T W MTS CCT63-l CCT100-l CCT160-l 3/8 3/4 9.5 11

A K = 1 L A L A End plate mounting Mp Mr W My W W W L A W L A L A K = 0.6 W Mey Mep L A A L Note 1) Static moment: Moment generated by gravity Dynamic moment: Moment generated by impact when colliding with stopper Max. allowable load weight: Wmax(kg) Allowable kinetic energy: Emax (J) Table 1 Table 2 Allowable load weight coefficient: Graph 1 Model Allowable kinetic energy Adjuster option

x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted type: M5 x 0.8 Enclosure IP40 Note 1) Instant pressure supply of 0.5 MPa has no influence on the switch.

200W/60 400W/60 Electric specification Motor type AC servo motor (AC100/200V) Motor type S2,S3,S4: Incremental 17bit encoder (Resolution: 131072 p/rev) Motor type T6,T7,T8: Absolute 22bit encoder Resolution: 4194304 p/revFor LECSB2-T, LECSS2-T Encoder Note7) Motor type T6,T7,T8: Absolute 18bit encoder (Resolution: 262144 p/revFor LECSC2-T Max. 725 Power [W] Note5) Max. 445 Max. 1275 Type

[Torque : 0.1Nm{1kgf/cm2} or less] L P Connector housing Socket While pressing, turn in the direction of the arrow. If you do not turn, the mechanism does not lock in position. Lead wire Hook Plug Connector Type Lead Wire Length Standard length is 300mm, but the following lengths are also available.

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 07 0.5 0.7 Applicable tubing O.D. Part no. KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 Symbol 1 2 4 5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

Stroke + 126 3.3 24 1 5 3 5.8 8 3 21 59 F 5H9 +0.030 0 depth 5 T-slot dimensions (2/1) 29.5 5H9 +0.030 0 depth 5 6 T-slot 4-M5 x 0.8 (for body mounting) thread depth 8 (11.5) 38 E Refer to page 299 for mounting.

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: P (PNP Open Collector 1 Output), Unit Specification: P (w/Unit Selection Function, Initial Value psi), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 1 Output, Unit Specification: w/Unit Selection Function, Initial Value psi, Piping Specification: M5 Female Thread, Option 1: Lead Wire w/Connector, 2m, Option 2: -, Option 3: -

Warning How to Find the Flow Rate (at air temperature of 20 ) Subsonic flow when (P2+0.100)/ (P1+0.100)>0.5 Q=240S P(P1+0.100) Sonic flow when (P2+0.100)/ (P1+0.100)0.5 Q=120S (P1+0.100) Q: Air flow ratedm 3 /min(ANR) S: Effective sectional area (mm 2 ) P: Differential pressure P1P2MPa P1: Upstream pressureMPa P2: Downstream pressureMPa Correction for different air temperatures Multiply