Intrinsically Safe Valve 71.7 Max. 10 L (Lead wire length) L (Lead wire length) 39 41.7 67 67 Stations n 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations 11 stations 12 stations 13 stations 14 stations 15 stations 16 stations 17 stations 18 stations 19 stations 20 stations 388 L1 L2 55 74 93 112 131 150 169 188 207 226 245 264 283 302 321 340 359 378 397 46 65 84 103
Regulator with Mist Separator AMR3000 to 6000 Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103
Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)
plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103
Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page
Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95
D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103
TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0
Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page
Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard
HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!
J K l .. oN D P Q W X Z ..J (mm) 50 89 55.5 26 20 64 10.5 M1Bxl .5 B6 7 17 33.5 50 6.6 11 Depth 8 1/4 10.5 71 28.5 19 4" 80 112 68.5 32.5 25 98 12.5 M22xl .S 132 6 22 43.5 77 11 17.5 Depth 13.5 3/8 16 104 35.5 26 65.5 83 94.5 81 26 20 n 10.5 Ml8xl .5 103 7 17 33.5 60 90 14 Depth 10.5 1/4 15 84 28.5 19 55.5 High Magnetic Field Resistallce Sellies COQ2BP Foot Mount: COQ2LPO-OOM-OO H Thread
+ 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5 Width across flats 8 5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103
Without connector + 0.05 + 0.02 4 depth 4 (Positioning pin hole) ML2B 4 45 4 x M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4 x M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 5 Width across flats 8 70 0.5 7 3 10 18f8 6f7 3.8 44 17 27 18 SR3.5 26.6 3 18 M5 x 0.8 13 27 40 17 5 67.5 14.5 4 x M4 x 0.7 2 x M5 x 0.8 Thread depth 7.5 71.5 (Port size) 103
Reference Standard (Center trunnion) Minimum stroke Bore size 32 40 50 63 80 100 92 91 102.5 114.5 118.5 130.5 126 + stroke 127 + stroke 133.5 + stroke 141.5 + stroke 153.5 + stroke 161.5 + stroke 125.5 + stroke 126.5 + stroke 133 + stroke 141 + stroke 153 + stroke 161 + stroke 113 + 1/2 stroke 113 + 1/2 stroke 121 + 1/2 stroke 132 + 1/2 stroke 146 + 1/2 stroke 156 + 1/2 stroke 92.5 91.5 103
. -/---[-~ 6 50(61) 66(77) 10811 19) 10 OUT 0.85 ~.98 Series CJP 118(129) 15 Stroke 56(67~+ 73(84) [-'t-Id~K95 . 4.12 Nosemount lO ~ (mm) 62(73) 79(90) 127(138) 20 OUT 2.36 3.93 5.50 93(104) 148(159) 25 I I 15 92(103) 146(157) 8.84 1,2.37 OUT 5.30 30 .
S Z A A1 GB P Q QA R T B C D E GA GC H J L MM Bore size 5 30 40 50 5 10 15 20 25 30 40 50 10 15 20 25 20 16 12 11 5.5 4.5 9 4 4.5 2 16 12 26 20 40 32 8 6 30 27 M6 x 1.0 M5 x 0.8 14 12.5 21.5 19 22 19 19 16 16 14 6 5 7.6 depth 6.5 81 72.5 86 77.5 91 82.5 96 87.5 101 92.5 106 97.5 116 126 100 88.5 93.5 103.5 108.5 135 145 40 36.5 110 98.5 113.5 9.5 depth 8 105 115 120 125 83 88 93 98 103
(mm) Female rod end (mm) With air cushion ZZ Bore size H Bore size S A1 GA RA ZZ WH WB WA MM Rubber Air 8 8 12 13 18 18 21 25 87 (96) 102 (114) 102 (114) 13 14 14 15 16 16 19 22 22 26 26 8 9 9 15 (17) 16 (18) 17 (18) 26 30 30 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.5 M10 x 1.5 M14 x 1.5 M16 x 1.5 139 (148) 162 (174) 162 (174) 1.5 3 3 40 50 63 92 (100) 93 (101) 95 (103) 95 (104) 108 (
30 Single shaft Double shaft 75 10 8 6 0 0.2 8 (g6) 7.8 0 0.2 28 Auto switch 8 x M5 x 0.8 depth 6 (Opposite side 4 locations) 28 40 4 x 6 (Mounting hole) 9 16 0 0.1 8g6 9.2 14 3 M5 x 0.8 (Vacuum suction port) 0 0.025 3 2 x Cushion valve (Width across flats 1.5) 22 25 2 x M5 x 0.8 Port size 2 65 69 4 4 9 5 9 4.5 4.5 24 11 B port A port 5.5 2.2 40 5 3.2 5.5 98 (117): With auto switch 84 (103
TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2