Vacuum Equipment 3.06 2.88 2.70 2.52 2.34 2.16 1.98 1.80 1.62 1.44 0.503 4.28 4.02 3.77 3.52 3.27 3.02 2.77 2.52 2.26 2.01 0.785 6.67 6.28 5.89 5.50 5.10 4.71 4.32 3.93 3.53 3.14 2.01 17.1 16.1 15.1 14.1 13.1 12.1 11.1 10.1 9.05 8.04 4.91 41.7 39.3 36.8 34.4 31.9 29.5 27.0 24.6 22.1 19.6 8.04 68.3 64.3 60.3 56.3 52.3 48.2 44.2 40.2 36.2 32.2 1.33 11.3 10.6 9.98 9.31 8.65 7.98 7.32 6.65 5.99 5.32 12.6 107 101
Station L1 L2 2 33.5 27.5 11 128 122 12 13 149 143 14 15 170 164 16 17 191 185 18 19 212 206 3 44 38 20 4 54.5 48.5 5 65 59 6 75.5 69.5 7 86 80 8 96.5 90.5 9 107 101 10 117.5 138.5 159.5 180.5 201.5 222.5 111.5 132.5 153.5 174.5 195.5 216.5 2.1-14 Series SY Made to Order (Contact SMC for further specifications, dimensions and delivery lead time.)
66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5 36 17 11 41 90 45 8 22 107 70 74.5 103 74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class
VHKm-01S-01S 1 8 1 8 32.6 65.2 VHKm-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKm-02S-02S 1 4 1 4 1 4 17 VHKm-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHKm-03S-03S 3 8 3 8 3 8 19 VHKm-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101
RED ON: MAC_ID duplication error, or BUSOFF error (major communication abnormality). 11 VQC4000 Base-Mounted Type Plug-in Unit VV5QC41 S Kit (Serial Transmission Kit: EX240) L2 (1 input block: 8 inputs) 14.5 (128.5) L1 8 6.5 Indicator light 54 P = 25 65.5 Manual override Min.0 to Max. 4 unit (0 to 216mm) 9 9 163 A B A B A B A B A A A B 10 143 32 98.8 143 101 Mounting hole for 2-M5, with input
closed Q M L K J Q R T R R Q S S Q R 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 40 (47) 47 (57) 55 (65) 84 (91) 94 (104) 48 (55) 56 (66) 63 (73) , , , VX21l2 VX22l2 VX23l2 1 8 1 4 1 4 1 4 3 8 3 8 68 (78) 76 (93) 84 (99) 40 45 45 18 21 21 VX21l0 VX22l0 VX23l0 23 25 28 36 46 46 11 13 13 39 44 44 10 30 35 40 46 56 56 39 41 44 59 60 62 47 48 50 59 62 64 92 95 97 20 23 9 10.5 10.5 11.5 101
Description ZFB100/101 ZFB200/201 ZFB300/301 ZFB401 q O-ring for clear cover S11.2 S12.5 S16 S18 Selection O-ring is a set with spare element (I-S-A). Warning 1. Do not use it in a line that is kept pressurized because it could cause the body to break. 13-10-5 3 Series ZFB Dimensions Element Replacement 1.
Display LCD LED LCD with backlight 101 to 0 kPa 101 to 10 kPa Pressure setting range 200 kPa Maximum operating pressure Operation indicator light (Lights up when ON) OUT1: Green OUT2: Red Green Response frequency 200 Hz (5 ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Fixed (3 digits) Window comparator mode Fluid Air, Non-corrosive gas Temperature
3 13 Dimensions by Stroke 16 18 12.5 21.5 1.2 3.5 30.4 46.5 10 16 J Model Dimensions by Stroke G H G H 10, 13 16 ZPRD10-0-A10 60 23 83 61 84 J Model G H G H ZPRD20-0-A10 70 132 71 133 51 U C ZPR 20-0-A10 U C ZPR 30-0-A10 U C ZPR 40-0-A10 U C ZPR 50-0-A10 U C ZPRD30-0-A10 ZPR 10-0-A10 80 142 81 143 57 91 23 57.5 91.5 ZPRD40-0-A10 90 178 91 179 67 129 67.5 129.5 77 51 ZPRD50-0-A10 100 188 101
ZQ Lifting force = Theoretical lifting force t ZF Theoretical Lifting Force (Theoretical lifting force = P x S x 0.1) (N) 40 50 63 80 100 78.5 125 Pad diameter (mm) ZP Adsorption area (cm2) 12.6 19.6 31.2 50.3 122.7 85 107 167 264.9 427 667.3 1042.6 ZCU 80 101 157 249.3 401.9 628 981.3 75 94.5 147 233.7 376.8 588.8 920 AMJ 70 88.2 137 218.1 351.7 549.5 858.6 Vacuum pressure (kPa) 65 81.9
Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .
= 2 m1: Cylinders moving parts weight kg m2: Load weight kg V: Piston speed at the end m/s * The piston speed when the piston (rod) of a cylinder is reached at the stroke end is calculated by multiplying the average speed by 1.4 Moving Parts Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 34 36 38 41 43 46 16 39 42 44 46 49 51 20 67 70 75 79 83 88 92 97 101
Valve model Type of actuation Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) b Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] 90 Single 2.2 0.58 0.34 0.63 2.4 0.36 2 position 110 Double Closed SA 1.8 0.45 0.35 0.49 2.0 0.37 center 1/8 SYJA720-01 0.35 0.73 3.0 Exhaust VA 1.2 120 0.34 0.50 3 position [0.52] [0.39] [1.3] center 3.0 0.78 0.37 Pressure SA 0.37 0.45 1.8 [0.83] [0.25] [0.50] center 101
Pad Type , ]>:]TYpr I '101 t6, 25 40 50 a a o o a a o a a a o a ) a o a o a o a a O a a a 86llaws o a a o a a a a o a Uentical True Uacuum InFy tllit[ Bufle Specif ications Butfer type 360" Rotating type (J), Non-rotation type (K) Pad size o2-s8: Std. 6mm Pad size s10-s50: Std. 10mm 20,25,32,40,50 NBB (50"), Silicone rubber (40"), Urethane rubber .
Class M1.5 [Class 1] 101 Non-contact construction 100 0.01 0.1 1 10 There is no particulate generation from sliding, because the construction avoids contact between the cylinder tubes exterior surface and the slide tables interior surface. Particle diameter (m) Note 1) This chart indicates the level of cleanliness inside the measurement chamber.
Other dimensions are same as grommet type. 10 117.5 111.5 9 107 101 8 96.5 90.5 7 86 80 6 75.5 69.5 5 65 59 4 54.5 48.5 3 44 38 20 222.5 216.5 2 33.5 27.5 11 128 122 12 138.5 132.5 13 149 143 14 159.5 153.5 15 170 164 16 180.5 174.5 17 191 185 18 201.5 195.5 19 212 206 Station L1 L2 4-3-13 Series SY100 Type S41 Manifold: Side Ported/SS3Y1-S41-M3/M5 Stations Grommet (G), (H) 11.5 P = 10.5
Polypropylene resin Chuck Stainless steel 304 Guide, Stopper, Drive bushing Stainless steel 304 Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relation between Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101
VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-02S-02S 1 4 1 4 1 4 17 VHK-03S-02S 22 46 85.1 44.3 40.8 44.3 88.6 21.5 4 14 13.7 16.1 3.2 65 17 72 73 76 19 VHK-B2A 49 17 1 30 25 21.5 31 VHK-03S-03S 3 8 3 8 3 8 19 VHK-04S-03S 22 46 93 48.7 44.3 48.7 97.4 21.5 4 14 15.1 17.5 3.2 90 19 22 101
Switch 100 kPa 0 100 kPa 1 MPa 2 MPa Pressure range 0 101 kPa For vacuum pressure ZSE80 111 kPa 10 kPa 100 kPa 100 kPa For compound pressure ZSE80F 110 kPa 110 kPa 1 MPa 0.1 MPa ISE80 0.105 MPa 1.1 MPa For positive pressure 2 MPa 0.1 MPa ISE80H 2.2 MPa 0.105 MPa Rated pressure range of switch Set pressure range of switch 745
Symbol 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC With pressure sensor (0 to 101 kPa, accuracy 2% F.S.) With pressure sensor (0 to 101 kPa, accuracy 1% F.S.) With pressure sensor (100 to 100 kPa, accuracy 2% F.S.) With pressure sensor (100 to 100 kPa, accuracy 1% F.S.)