REC

150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25, 32 40 36 5 66 82 22 14 24 21 52 41 16 12.5 50 200 to1000 32 RHC NA S Z ZZ NN P H1 H2 I K MM N Bore size Stroke range 1 8 30 20 M20 X 1.5 146 37 200 150 to700 M8 X 1.25 5 8 33.5 5 20 MTS 1 8 34.5 M26 X 1.5 25 146 41 204 150 to700 M10 X 1.25 6 8 37.5 5.5

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Model no. of switch rail accessory is listed on pages 8-15-32 and 8-15-41.

CHKD/CHKG

Bore size (mm) 30 d 20 NTH-020 13 15 M8 x 1 12.5 5 20 NTH-025 17 19.6 M10 x 1.25 16.5 6 25 NTH-032 19 21.9 M12 x 1.25 18 7 32 NTH-040 22 25.4 M16 x 1.5 21 10 D C 40 NTH-050 27 31.2 M20 x 1.5 26 12 50 NTH-060 32 37 M24 x 1.5 31 14 63 NTH-080 41 47.3 M30 x 1.5 40 17 H B 80 NTH-100 55 63.5 M39 x 1.5 54 20 100 NTH-125 70 80.8 M48 x 1.5 69 26 Note) There may be a slight difference between the

CLS

46 56 14 14 14 17 17 20 35 35 39 39 39 49 Up to 1000 3 5 30 46 M14 x 1.5 M30 x 1.5 161 78 18 110 146 128 16 114 64 110 27 Up to 1000 M16 x 1.5 M36 x 1.5 182 95 23 132 169 144 18.5 130 74 120 30.5 Up to 1200 16 21 35 5 5.5 6 30 34 42 25 31 41 M18 x 1.5 M40 x 1.5 204 106 36 167 195 162 18.5 149 86 135 35 Up to 1200 M12 x 1.75 118 226 124 40.5 187 216 182 18.5 165 97 135 M20 x 1.5

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

MXQ

42 41 42 41 19 19 19 19 27 47 47 47 47 57 36 66 84 75 84 75 75 Note) Use the average speed when calculating static moment.

Basic type / Direct mount type Series CY3B/CY3R

51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 Model CY3RG10 CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 CY3RG50 CY3RG63 CYP QW 14 18 17 20 26 34 48 60 PW 26 32 38 43 54 64 82 94 Q 68 84 95 105 116 134 159 171 N 4.5 6 7 6.5 8.5 11 15 16 WP 13 16 19 21.5 27 32 41 47 MM M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 W 20 25

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

CV/MVGQ

85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

51 62 HS 8.5 7.5 6.5 7 8 HT 28 33.5 41 50 L 53 62 70 76 90 C 4.2 5.2 5.2 6.5 6.5 K 14 11 15 13 15 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 HC 31 38 43 54 66 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39 44 55 67 HA 30 36 41 52 62 HB 17 21 23.5 29 36 Model CY3RG15 CY3RG20 CY3RG25 CY3RG32 CY3RG40 LD 4.3 5.6 5.6 7 7 T 19 20.5 21.5 24 26

IZT40/41/42

Refer to the how to order above. 1 Only bar is ordered, 41 cannot be selected. 19

Air Cylinder Series CS1

B C D E EA F FA G J K KA M MM N P S (mm) 125 140 160 180 200 250 300 1 2 1 2 3 4 3 4 3 4 to 1000 50 47 145 115 36 90 59 43 14 16 15 31 27 35 98 M14 x 1.5 M30 x 1.5 Lube Non-lube Air-hydro to 1000 50 47 161 128 36 90 59 43 14 16 15 31 27 35 98 M14 x 1.5 M30 x 1.5 to 1200 56 53 182 144 40 90 59 43 14 18.5 17 36 30.5 39 106 M16 x 1.5 M36 x 1.5 to 1200 63 60 204 162 45 115 70 48 17 18.5 20 41

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

CV/MVGQ

41 50.5 42.5 85 41 93 49 42 48 42 85.5 91 93.5 CE2 80 107 49.5 48.5 59 51 93.5 48.5 101.5 55.5 50 54 50 94 107 102 100 ML2B 104 121 58.5 56 69.5 59 56 112 63 57.5 62 57.5 104 121 112 Operating Range C J G5-S CV Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

C76

XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore CZ XB 47 57 XC AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CE CG 41

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

63 103 154 3.5 Model ZPX63HJ25-01-A18 ZPX63HJ50-01-A18 ZPX63HJ75-01-A18 ZPX80HJ25-01-A18 ZPX80HJ50-01-A18 ZPX80HJ75-01-A18 63 65 14.5 26 41 63 136 189 3.5 40 ZPX40HJ75-01-A18 42 171 222 63 65 14.5 26 41 63 172 225 3.5 50 ZPX50HJ25-01-A18 52 100 151 80 82 16.5 28 43 65 105 156 4.5 50 ZPX50HJ50-01-A18 52 135 186 80 82 16.5 28 43 65 138 191 4.5 50 ZPX50HJ75-01-A18 52 171 222 80 82 16.5 28 43

C76

XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis, Head clevis AB 7 9 Bore AB 7 9 AO AU 14 20 LS LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XL 120 154 XS 48 60 12 0.032 0.059 NB TDe8 TZ 47.9 59.3 XB 47 57 XC CW 13 17 LT 4 5 CZ XB 47 57 XC CE CG 41

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

KA M D MM E EA F FA G J N P S (mm) 125 140 160 180 200 250 300 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 15 145 31 115 27 36 90 59 43 14 16 35 98 Lube Non-lube Air-hydro 1/2 Up to 1000 M14 x 1.5 M30 x 1.5 50 47 161 15 31 128 36 27 90 59 43 14 16 35 98 3/4 Up to 1200 M16 x 1.5 M36 x 1.5 56 53 182 17 36 144 30.5 40 90 59 43 14 18.5 39 106 3/4 Up to 1200 M18 x 1.5 M40 x 1.5 63 60 20 204 162 41

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

51 63.5 B 52 62 70 86 106 NB 8h9 AC 3 3 3 4 5 NA 14 16 18 24 28 AA 44 47 55 66 82 AB 41 44 52 62 77 M 2 2 2 3 4 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 0 -0.036 0 -0.036 0 -0.036 0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7

Vacuum Pad

51 11 14.5 20.5 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."