3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

P R DC 24V, 12V 24V, 12V Coil rated voltage AC 50/60 Hz (inrush) 110V 110V A DC 3.1W, 0.3W Note3) (Holding) 1.5W Power consumption AC 1.45VA P R Plug-in, L/M type connector (With indicator light and surge voltage suppressor) Electrical entry Latching type specification Note 1) Consult P/A for available combinations. Grommet type entry is N/A with any of these options.

70pvvna

PB Note) Parts e and r are for selection of valve composition.

Clamp Cylinder with Lock Series CLK1

Ht BY IA 43 25 Max.Wc 40 36 35 13 D 30 Width across flats K Ws Width across flats 44 R15 Clevis width CLK1A: 16.5 0.050 0.093 +0.027 0 Shaft: 12d9 Hole: 12H8 F +0.3 0 +0.4 0 CLK1B: 19.5 Z + Stroke S + Stroke 1.5 27 2 40 57 97 ZZ + Stroke Approx.

Series SYJA300 3 Port Air Operated Valve

) 8 1 (P, A, R port) 0.8 P R 54.5 1.8 (Bleed port) 16 14.5 20 With filter (80mesh) 1.8 (Bleed port) 12 With filter (80mesh) 23 15 3-Rc(PT) (P, A, R port) , 8 1 4 1 48 3.3-4

Steam Valve

) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 TQ 80 90 50 60 35 44 17.5 22 85 101 93 109 5

Centering Unit

When r the center shaft lowers, t the bearing holder plate is pressed, and the table is locked.

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

Angular Air Gripper Series MHC2/MHCA2/MHCM2

0 r !4 u !5 !7 y !3 !2 Parts list No. Description Parts list No.

PSxx-OMF0005CN

[s] [mm] [mm] 1.5 64 100 kPa 0.15 mm 2.0 64 100 kPa 0.3 mm [s] [s] [mm] [mm] -21No.PS-OMF0005CN-E ISA2-G ISA2-H 100 kPa 1.5 64 5 m 100 kPa 2.0 64 5 m [mm] [mm] [kPa] [kPa] -22No.PS-OMF0005CN-E ISA2 () 1 ON ( +)ON ()ON OFF Yes 2 No ( OFF +)ON 1 ()ON 3 ()ON 1,3 OFF 4 5 ON OFF 6 7 8 -23No.PS-OMF0005CN-E No.

Series DXT474

/LITHUANIA SMC Pneumatik A/S SMC Pneumatiques (Canada) Ltd.

ZPT/ZPX

Description Material Surface treatment ZR t NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR u o Pad q ZM r e w Adapter plate Aluminum w ZH w Hard chrome plated Piston rod Carbon steel e w Spring Stainless steel r ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

3 Port Solenoid Valve Series VQ100 1

VZ 1 (P) 3 (R) VS VFN Latching type (A) 2 1 (P) 3 (R) Clean Series Clean series is available for both standard and option specifications.

Compact and Lightweight

The standard bracket and silencer are not assembled with the product, but shipped together. 20 54.5 228 Body Ported Type Vacuum Ejector ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L One-touch and screw-in connection ZK2 SUP. EXH. ZQ L4 ZR ZB H2 Connection thread 2 ZA VAC.

AR Series Modular Type Regulator

r q w w Component Parts No.

CUJ

Bore size Contents 7 Piano wire Return spring CUJB4-S-PS 4 8 Sintered metal BC Bronze element CUJB6-S-PS 6 Above number 11 and an exclusive grease pack. 9 Magnet CUJB8-S-PS 8 10 Nickel plated Steel Rod end nut CUJB10-S-PS 10 11 NBR Piston seal 12 NBR Rod seal 13 NBR Tube gasket 5 Mini Free-mount Cylinder Series CUJ Dimensions for 4 Double Acting/Single Acting Without magnet/CUJB4 Note) The

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

Vacuum Equipment

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Air cylinder (Series compatible with secondary batteries)

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 9 Position for application of grease Table 10 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 20 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.9, ) Pay attention to the mounting direction of the seal.

AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel