Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: N (NPT)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: N (NPT), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Model: 50R (Side Ported/External Pilot), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8)

Model: 51 (Bottom Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 8 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: T (NPTF)

Model: 50 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 3 Stations, P, E Port Location: D (D Side), A, B Port Size: 01 (1/8), Thread: T (NPTF)

DOC1020530

(d) Output signal (DO) forced output Output signals can be switched on/off forcibly independently of the servo status. Use this function for output signal wiring check, etc.

Precision Regulator

We guarantee that the product complies with the outline dimensions provided. d.

Precision Regulator

We guarantee that the product complies with the outline dimensions provided. d.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Example) ARP30K-03BE-1RY Symbol 20 30 40 Body size Description Nil K Without backflow function With backflow function With backflow function + Nil N F Rc NPT G Thread type + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) a Without mounting option With bracket With set nut (For panel mount) Mounting H + Note 1) Nil E G E1 Note 3) Without pressure gauge Square embedded type pressure

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Note Panel mount adapter Waterproof seal, screws included ZS-26-B Front protective cover ZS-26-01 Front protective cover + Panel mount adapter Waterproof seal, screws included ZS-26-C ZS-26-D 48 conversion adapter 48 conversion adapter This adapter is used to mount Series PSE200 on the panel fitting of Series PS100. Order panel mount adapter separately.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Parallel Seal Type Slit Valve

Auto switch and the connector Parallel seal type slit valve Symbol Auto switch Connector Nil A Lead wire: 0.5m Multiple connector(AMP) *C016 30D006 100 12 made by AMP is recommended for the connector (female type) C D-A93 (2pcs) D-sub connector *CDE-9SF05 made by HIROSE ELECTRIC CO.,LTD. is recommended for the connector (female type). F 5 - 3.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii INR-244-831 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1