Body Size: 4000, Thread: F (G), Port Size: 04 (1/2), Option: S (Silencer), Voltage: 5 (24 VDC), Lead Wire: Y (Type Y, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: Flow Direction: Left to Right

Process Pump

From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

PF2D

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Terminal q DC (+) w N.C e DC () r IN (1 to 5 V) e w q Power supply/Output connection cable (Accessory) Power supply/Output connector (8P) Pin no. 7 Green 8 Yellow 6 Red 5 Gray 4 White 3 Black 2 Blue 1 Brown i u y t r e w q Pin no.

Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

(Select wiring bottom entry when the semi-standard Y is chosen simultaneously.) Note 4) The only difference from the standard specifications is the pressure regulator spring. It does not restrict the setting of 0.2 MPa/0.6 MPa or more.

IR1200-A/2200-A/3200-A

Regulator IR1200-A/2200-A/3200-A Series How to Order 0 2 0 IR 1 01 BG r t y u e w q A ARJ Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specication is required, indicate in alphanumeric order.

Model: U (Union Y, Plug-in Y, Branch), Applicable Tube OD: Ø12, Port Size Applicable Tube: 04 [R(PT) 1/2], Sealant: S (Sealant), Color Option: W2 (White)

Model: U (Union Y, Plug-in Y, Branch), Applicable Tube OD: Ø10, Port Size Applicable Tube: 04 [R(PT) 1/2], Sealant: S (Sealant), Color Option: W2 (White)

Model: U (Union Y, Plug-in Y, Branch), Applicable Tube OD: Ø12, Port Size Applicable Tube: 04 [R(PT) 1/2], Sealant: S (Sealant)

Model: U (Union Y, Plug-in Y, Branch), Applicable Tube OD: Ø10, Port Size Applicable Tube: 04 [R(PT) 1/2], Sealant: S (Sealant)

Model: Union Y, Plug-in Y, Branch, Applicable Tube OD: Ø12, Port Size Applicable Tube: 04 [R(PT) 1/2], Sealant: Sealant, Color Option: -

Model: Union Y, Plug-in Y, Branch, Applicable Tube OD: Ø10, Port Size Applicable Tube: 04 [R(PT) 1/2], Sealant: Sealant, Color Option: -

ALF400 to 900, ALT-5/-9

T0604 How to Order Max. operating pressure Max. operating pressure T 0604 B 20 Length per roll Color Nylon tubing 20 20 m 100 m roll (Black, white only) Operating temperature (C) Symbol Color B W R BU Y G Black White Red Blue Yellow Green Maximum operating pressure is 1/3 max. of burst pressure at 60C, considering the safety ratio. Tube size 100 O.D. 6 I.D. 4 14-13-10

AR425 to 935

1 y u IC Main valve side diaphragm assembly Valve assembly VBA Adjusting spring i 135053 (AR425) 135025 (AR435) 135053 (AR625) 135025 (AR635) 135053 (AR825) 135025 (AR835) 135053 (AR925) 135025 (AR935) Steel wire VE o !0 Stainless steel ABS Valve spring Handle 132713 13289 135211 132656 13414 Note) Diaphragm is included.

ITV

(Atmospheric pressure) VEX q Vacuum pressure solenoid valve y Atmospheric pressure valve AMR Input signal Set pressure + t Control circuit r Diaphragm Pilot valve w Atmospheric pressure solenoid valve ITV IC u Pressure sensor VBA Series ITV209 VE Linearity Hysteresis Repeatability 0 1.0 1 VY1 Output deviation factor (% F.S.) Output deviation factor (% F.S.)

VCB

y Return spring Stainless steel CAC406 u Body Dimensions: Bracket A J 4-G C 1.5 B D E L 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Valve model Bracket part no.

IIIIIII

. @ w B" ** rr', ,& Y: ACTUATOR TRAVEL INOEX NVM 830 MOUNTING METHOD Not Recommended Recommended Avoid Sudden Movement of Cam & Lever Floom lor limit to oDerale Protect Acluato6 TERMS O.P. = Operating Position Position Valve is shifted when force is applied to actuator to begin operation. F.O,F. Whole Stroke Force -Force required to move actuator.

Miniature Tubing & Miniature Fittings

When reusing the tubing, cut off the previously installed portion of the tubing to avoid possible leakage and/or disconnection of the tubing. 3.2, 4 Port size 3 5 32 04 M3 x 0.5 M5 x 0.8 3.2 4 2 Barb fitting: M-3AU-2, M-5AU-2 Series M Applicable tubing O.D. x I.D.

Body Size: 4000, Thread: N (NPT), Port Size: 04 (1/2), Option: None, Voltage: 4 [220 VAC (230 VAC)], Lead Wire: Y (Type Y, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: Z (Name Plate and Pressure Gauge in Imperial Units)

Body Size: 4000, Thread: F (G), Port Size: 04 (1/2), Option: None, Voltage: 5 (24 VDC), Lead Wire: Y (Type Y, DIN Terminal w/Connector), Surge Suppressor: None, Manual Override: Non-locking Push Type, Flow Direction/Pressure Unit: R (Flow Direction: Right to Left)