AMR3000 to 6000

Switch assembly Adjusting screw Working principle When the MR units OUT side pressure is applied to piston q, piston q moves until it balances with the force of pressure adjustment spring w. The movement of piston q is detected by switch assembly e and outputs ON and OFF signals. The set pressure can be adjusted by turning adjustment screw r, which adjusts the spring force.

Multistage Ejector Series ZL112/212 1

Sound absorbing material PVF AMJ PVF P397114 Suction cover q o P397230 When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 13-7-5. Front cover A w !0 Misc.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Digital Gap Checker

Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AMP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Clean Rodless Cylinder Series CYP

B Counter bore depth C 4-LD Thread depth M QW PB N A E depth EK Q + Stroke Z + Stroke G A A LW Stroke adjustment screw (inner cover) Note 2) Note 3) Note 2) Operating direction Plug [P (port g)] Plug [P (port h)] P (port a) P (port b) 0.5 0.5 Plug [P (port c)] Plug [P (port e)] Left Right Auto switch mounting groove HI HP H HL HG HT HS HB HA HB HA HG HT HI Note 3) Plug [P (port d)] Plug [

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.

3 Way,3 Port Solenoid Valve NVZ Series

Q,/N.O. +Including armature ass y How To Ord.er Lead qiJe length When ordering the valve and long connector ass'y include both lhe valve and conneetor ass'y producl numbe6.

ZSE20(F)_ISE20

Panel mount adapter ZS-46-B Panel mount adapter + Front protection cover ZS-46-D Lead wire with connector ZS-46-3L 3-core, 2 m, Non-waterproof (Without waterproof cover) Front protection cover ZS-27-01 D Panel mount adapter + Front protection cover ZS-46-D R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 7

NAIV

N Body 2Yq 3-3/s s-Y4 6 1 A 1 y 2 9-2 B Brackel D Threaded draln poft (Female) except 220. Port slzo o2% o3-% 04-'/z 06 % to1 741'/z 20-2 Thread 1 Male 2fumale. ,NAMC220, 32O,520 only HowTo Select Flow Characteristics Supply prossure: 71 PSI Supply pressurei 71 tl 12 10.5 I 6 ! e E , q 1.5 8 1 2 1 6 2 0 Cylinder speed (in/sec.)

NAMUR interface valve, 4/5 PORT SOLENOID VALVE, I30, 240.00000 lb

Ionizer Nozzle type IZN10 Series IZS

Note 1) 20 16 17 Elbow for piping port/IZN10D B C 180 10 (mm) B Model C 16 D 11.5 IZN10-16 (mm) IZN10-17 (inch) 22 24.5 18.5 12 Female threads for piping (Rc1/8)/IZN10-11 16 Rc1/8 13 Width across flats 14 456 Ionizer IZN10 Series Dimensions L-bracket/IZN10-B1 IZS (Mounting angle adjustable range) 40 7.5 17 IZN IZN 2 x R10 3.4 2 x M3 2 x 3.4 IZF 25 40 5 ZVB 50 Internal mounting IZD IZE 20.5

4-channel Flow Monitor ( compatible)

(Display pattern for 3rd, 4th, 5th, 8th and 9th digit from the left) Characters Q, X, Z, /, or cannot be displayed. (Display patter for 1st., 2nd., 6th., and 7th digit) Characters A to Z can be displayed (the same as the 3 digits on the right).

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA