Intrinsically Safe Valve

In the case of complex arrangement, specify them on the manifold specification sheet. 53 42 SS5Y 05 5 02 Manifold series Stations 5 7 02 53-SY5000 2 stations 53-SY7000 20 20 stations Thread type A, B port size Nil F N T Rc Thread piping G Symbol Port size Applicable series NPT 1/4 53-SY5000 53-SY7000 02 NPTF Warning If a resin tubing is used, take precautions against static electricity.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

N02 NPT 1/4 NPT 3/8 Note 2) N03 N04 NPT 3/8 NPT 1/2 NPT 3/8 NPT 1/2 Note 1) AS220-02 Note 2) AS320-02 597 Series AS20-D Construction AS3200-02-D Meter-out M5 type U10/32 type Meter-in M5 type U10/32 type AS3210-02-D Component Parts No.

HRX-OM-S004

/60Hz 3 kW 9.0 / 9.5 13.0 / 14.5 Heating capacity4 kW 1.7 / 2.2 2.5 / 3.0 Temperature stability5 oC 1.0 Rated flow rate 50/60Hz (Outlet) 6 L/min 42 / 56 Pump capacity Maximum flow rate 50/60Hz L/min 55 / 68 Maximum lifting height m 50 Minimum operating flow rate 50/60Hz 7 L/min 28 / 42 Circulating fluid system Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc3/

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

OUT1: Orange Digital filter*4 0, 10, 50, 100, 500, 1000, 5000 ms Enclosure IP40 Withstand voltage 1000 VAC for 1 minute between terminals and housing Insulation resistance 50 M or more (500 VDC measured via megohmmeter) between terminals and housing Environment Operating temperature range Operating: 5 to 50C, Stored: 10 to 60C (No condensation or freezing) Operating humidity range Operating

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

PFxx-OMJ0005CN

/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min] [L/min] [L/min] -57No.PF-OMJ0005CN-I (350[kPa]) 25[L/min] 10[L/min] [kPa] [kPa] [L/min] [L/min] 100[L/min] 50[L/min] [kPa] [kPa] [L/min] [L/min] -58No.PF-OMJ0005CN-I PFM7-(N)01/(N)02/F01 17 2 -59No.PF-OMJ0005CN-I PFM7-(N

HRX-OM-Q026

Table 7-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70 or

VFN2000N

*D-02* 9.4 32 2 x 6 M.T.G.

Soft Start-up Valve AV2000/3000/4000/5000 1

) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other VY1 G Option D: Type D DIN terminal Nil G None PPA With pressure gauge AL How to Order Pilot Valve Assembly SF4 1 G 80 Y: Type Y DIN terminal Rated coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 to 120 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Soft start-up valve Note) The

F

-02 M14x1 17 17 31.5 15 15 17 13.1 3/8 3/8 KQE11-36 1/8-14 25.4 25.4 35.5 14.5 23 21 7 6 38 KQE06-03 M14x1 19 17 33.5 17 15 17 13.1 1/2 3/8 KQE13-36 1-12 28.57 28.57 36.5 14.5 26 22 9.6 8 14 KQE08-02 M16x1 17 19 33 12 17 18.5 26.1/18 1/2 1/2 KQE13-37 1-12 28.57 28.57 40.5 18.5 26 22 9.6 8 38 KQE08-03 M16x1 19 19 35 15 17 18.5 26.1/18 10 14 KEQ10-02 M20x1 22 24 35 12 21 21 41.5/29.5 10 38

A

S Z Port size Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 G: Grommet Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal

Sine Cylinder Series REC

50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100 + 100 (n 2) 35 + 30 (n 2) 10 35

Sine Cylinder Series REC

50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100 + 100 (n 2) 35 + 30 (n 2) 10 35

HEC-OM-S008

31 32 35 30 30 03 3F 38 0D Answer 25.0 deg.C. 31 Temperature setting (without writing FRAM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38

Fieldbus System

Note 4) Refer to page 50 for details on enclosure.

Soft Start-up Valve AV2000/3000/4000/5000

S Z Port size Electrical entry 1/4 (AV2000 only) 3/8 (AV3000 only) 1/2 (AV4000 only) 3/4 (AV5000 only) 1 (AV5000 only) 02 03 04 06 10 G: Grommet Rated coil voltage 100VAC (50/60Hz) 200VAC (50/60Hz) 110 to 120VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Other 1 2 3 4 5 6 9 Option D: Type D DIN terminal Nil G None With pressure gauge How to Order Pilot Valve Assemblies Y: Type Y DIN terminal

Round Type Low Pressure Hydraulic Cylinder Series CH
M

Different sides Same side Different sides Same side D-C7 D-C8 15 50 10 50 + 45 (n 2) 15 + 45 n 2 2 D-H7 D-H7W D-H7BAL D-H7NF (n = 2, 4, 6 ) 60 + 45 (n 2) 15 60 10 Air Release D-C73C D-C80C D-H7C 15 + 50 n 2 2 Caution 15 65 10 (n = 2, 4, 6 ) 65 + 50 (n 2) 1.

Table of Contents

amount (mm) Plate displacement amount (mm) MGP MGPA16-250 MGPA16-250 0.35 MGPA -400 50 50 63 63 MGPA -400 50 63 0.6 0.3 50 50 63 63 MGPA -300 0.5 50 63 MGPA -300 MGPA16-150 MGPA16-150 MGPA16-100 MGPA16-75 0.25 0.4 MGP MGPA16-100 50 50 63 63 MGPA -200 50 63 MGPA -200 0.2 MGP MGPA16-75 0.3 0.15 50 50 63 63 MGPA -150 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -50 0.2 50 50 63 63 MGPA -100 0.1

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

T NPTF Coil rated Electrical entry 3 8 G F 1 100 VAC, 50/60 Hz Grommet Nil T Conduit terminal Standard 4 1 2 Option 2 200 VAC, 50/60 Hz Port size Manual override P None Nil Option WTB Dripproof conduit terminal 3 110 VAC, 50/60 Hz 1 4 Rc 3 8 Rc 1 2 Rc 3 4 Rc 02 03 04 06 TZ Conduit terminal w/ surge voltage suppressor 4 220 VAC, 50/60 Hz How to Calculate the Flow Rate 5 24 VDC 9 Other TL