EX600-DX_DY_DM_eng

Output 2 Output 6 Output 7 Input 4 Input 2 Input 7 Input 5 Input 3 Input 1 Input 0 Input 7 Input 5 Input 4 Input 2 Input 0 Input 6 Input 3 Input 1 Input 6 NC FE NC NC NC NC FE EX600-DMNE EX600-DMNF EX600-DYNE EX600-DYNF Signal name Group Group Pin number Pin number 7 7 4 4 5 5 6 6 EX600-DYNB 24 24 25 25 23 21 19 16 14 23 21 19 16 14 18 18 22 20 22 20 17 15 17 15 24 V(output) Pin number Pin

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

,,: ,.

n*n" ,n ,n"n"" I *' ,.o... .,"," 1 9 1 9 21 t8 1 8 1 8 21 '17 I ,u,*""0" 1 7 17 1 9 1 9 29 23 Note: See specific page # for which combinations ar available. fcEd lmft [ilrtrc ol PS lhcaft 1/4 NPT B ( # ) 3/8 NPT 1i2 NPT D 1/8 NPT A /A, \v .540" DtA .666" DIA .840' OIA .,tsS'DIA 1 6 T.Pl. = Threads oer inch L.NGNTPPLE Longr lengihs a\,ailaH upon rqu$t CLOSE NIPPLE HEX NIPPLE Long paurn 138Inchs

Speed Controller with One-touch Fittings

Flow Rate and Sonic conductance AS1002F 3.2, 4, 6 1/8", 5/32" 1/4" 100 0.28 AS2002F 4 AS3002F AS2052F AS4002F 12 Series Metric size 8 1/4" 5/16" 460 1.3 6 10, 12 8 6 6 10 2 Flow Direction Symbol on Body Tube O.D.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 4, 6) Note 4) Rail mounting D-A7mH D-A80H 5 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-A79W 10 15 10 + 15 (n 2) (n = 4, 6) Note 4) D-F7m D-J79 5 5 15 + 15 (n 2) (n = 4, 6) Note 4) D-F7mV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-F7mW/J79W D-F7BA/F79F/F7NT 10 15 15 + 20 (n 2) (n = 4, 6) Note 4) D-F7mWV D-F7BAV 10 15 10 + 15 (n 2) (n = 4, 6) Note 4)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Side 1/4 1/4 1,3,5 (P,EA,EB) Port 1/8 C6 (One-touch fitting for 6) C8 (One-touch fitting for 8) 1/4 Port size 1/4 C6 (One-touch fitting for 6) 4,2 (A,B) Port C10 (One-touch fitting for 10) C8 (One-touch fitting for 8) Manifold base weight W (g) n: Station W = 61n + 101 W = 79n + 127 W = 100n + 151 Note 1) For more than 10 stations (more than 5 stations in case of SS5Y7), supply pressure to

Thermo-chiller/Rack Mount Type

6 !7 @0 @1 !8 No.

Speed Controller with

-08A 8 15.2 13.5 56 8.5 18.1 37.1 35.5 19 13.8 AS3002F-06A 6 13.2 11.5 57.8 9.8 21.7 42.9 41.3 21.8 25 12 20.5 17 18.1 AS3002F-08A 8 15.2 13.5 63.8 19 20 AS3002F-10A 10 18.5 16.5 68.6 21 24.8 AS3002F-12A 12 20.9 18.5 73.8 10.9 22.8 44 42.4 22.1 22 29.1 AS4002F-10A 10 18.5 16.5 4.3 8 18.8 26 74.7 11.3 23.7 51.3 49.7 28 33 14 26.2 21 36.3 AS4002F-12A 12 21.7 18.5 79.1 22 42 4.5 8 16.6

IP8101 Series

Adjustment of fork lever-type fitting angle 21 3. Simple balance current adjustment 23 4.Calibration 24 5.

1.63

MGF MGPWL, MGPWA Common Dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA DB FA FB G GA GB H J K L MM ML MGZ 20 25 32 40 50 63 34 35 37 41 42 49 10 10 14 14 18 18 10 13 16 16 20 20 7.5 9 10 10 12.5 12.5 3 3 5 5 6 6 36 42 48 54 64 78 9.9 10.3 11.4 13.5 14 15.5 7.5 8.7 9 10.5 11.1 13.5 137 157 190 206 258 286 18 21 24 27 32 39 18 21 24 27 32 39 24 30 34 40 46 58 M5 x 0.8 M6 x 1 M8

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

6 !7 !8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

6 !7 !8 !

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Check the model selection section of the catalog -21- 5. Do not apply load or impact or resistance in addition to the transferred during return to origin. 6. In pushing operation, set the product to a position of at least 2 mm away from a workpiece.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VQZ 285.5 21 273 No.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01MS-X3 G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

-) 21-ARP20(K) 21-ARP30(K) 21-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01MS-X3 G49-4-02MS-X3 0.4 MPa Pressure gauge G49-2-01MS-X3 G49-2-02MS-X3 Round type Note 2) 0.2 MPa G49-7-01MS-X3 G49-7-02MS-X3 0.7 MPa Note 1) Assembly includes a bracket and set nuts.

3 Port Air Operated Valve Series SYJA300 1

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions.

MHF2-E

Contents MHF2-8D MHF2-8D1 MHF2-8D2 For guide: GR-S-010 (10g) Seal kit MHF8-PS MHF8-PS MHF8-PS-2 12, 20, 21 For cylinder: GR-L-005 (5g) Order with the order No. as parts No. 12, 20 and 21 are provided as a seal kit.

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

CL

6 !7 No.