0.4

stations C3 (For 3.2) C4 (For 4) C6 (For 6) M5 (M5 thread) 1 to 12 stations P kit: Flat ribbon cable 26P C8 (For 8) Side 20 420 1 to 9 stations 20P SS5Q13-SQ130 SQ131 J kit: Flat ribbon cable PC wiring system compatible 1 to 8 stations Option Built-in silencer, direct exhaust 20 420 F L3 (For 3.2) L4 (For 4) L6 (For 6) L5 (M5 thread) 1 to 12 stations L kit: Lead wire 35 460 kit Top (2) S

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38

MHZ

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 12-2-59 59 Parallel Style Air Gripper Long Stroke Type Series MHZL2 Size: 10, 16, 20, 25 How

MHZ

M4 x 0.7 M5 x 0.8 M5 x 0.8 5.2 5.2 8.3 8.3 10.5 10.5 13.1 13.1 12 9 16 12 20.8 15.5 25 19 3.6 3.6 6 6 8 8 10 10 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Dimensions other than the above are identical to the standard type; refer to pages 12-2-33 to 12-2-36. 12-2-58 58 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office

Parallel Style Air Gripper Series MHZ

M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 through (Thread for mounting attachment) 20 Auto Switch Mounting Groove Dimensions 12 0 0.05 M5 x 0.8 (Finger opening port) 10 6 12 Auto switch mounting groove Note) 6.2 33 (43) 5 11.5 4 For single action, the port on one side is a breathing hole. 19 Auto switch mounting groove 11.5 3.5 5 6.2 Note) Through-hole mounting is not possible when using

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Table of Contents

Recommended torque: 12 to 14 Nm.

0.4

screw R R B B B B B B B B X X P P 7.7 18.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Magnetically Coupled Rodless Cylinder

M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103 132 137 156 182 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 Model 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 P (Piping port) Model Mounting nuts (2 pcs.) are shipped together.

Tamper Proof and Flat Head Screw

-11ST AS421F-04-10ST 18.5 33.6 3/8" 17.9 33.6 47.9 21 21 10 47.9 28.6 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 25.4 63.8 1.5 55.8 22 R 1/2 24 1.5 63.8 12 55.8 25.4 AS421F-N04-13ST AS421F-04-12ST 20.9 34.6 12 48.9 22 Reference dimension for M5 x 0.8 and R threads after installation.

Series VQ Base Mounted Metal Seal/Rubber Seal

VVQ10001A2 Port size One-touch fitting for 3.2 One-touch fitting for 4 One-touch fitting for 6 M5 thread C3 C4 C6 M5 Replaceable Parts No. Ass'y No. Name Material Number VVQ1000-80A-1 VVQ1000-80A-2-2 VVQ1000-80A-3 VVQ1000-80A-2-4 Gasket O ring Clamp screw Clip 12 12 12 12 NBR NBR Carbon steel !0 !1 !2 !

Slide Unit Series CX2/CXWM/CXWL

x 0.8 hexagon socket head cap plug (Cylinder port) 2 x 2 x M6 x 1.0 thread depth 12 2 x M5 x 0.8 Hexagon socket head cap plug 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 End lock mechanism Max. 12 25 0.06 (6H7 hole pitch) 4 x M6 x 1.0 thread depth 9 6H7 depth 4 +0.012 0 2 positions for set screws for fixing shock absorbers 2 x RB1006-X552 Shock absorber +0.012 0 6H7 depth 8 2 x M5

Slide Unit Series CX2/CXWM/CXWL

x 0.8 hexagon socket head cap plug (Cylinder port) 2 x 2 x M6 x 1.0 thread depth 12 2 x M5 x 0.8 Hexagon socket head cap plug 2 x 2 x 5.2 through 2 x 2 x 9.5 counterbore depth 5 End lock mechanism Max. 12 25 0.06 (6H7 hole pitch) 4 x M6 x 1.0 thread depth 9 6H7 depth 4 +0.012 0 2 positions for set screws for fixing shock absorbers 2 x RB1006-X552 Shock absorber +0.012 0 6H7 depth 8 2 x M5

Air Slide Table Series MXQ

M3 x 12 M4 x 12 M5 x 16 M6 x 20 M8 x 20 M3 x 12 M4 x 12 M5 x 16 M6 x 18 M8 x 18 0.9 2.1 4.4 4.4 7.0 0.9 2.1 4.4 7.0 18.0 0.9 2.1 4.4 7.0 18.0 M3 x 8 M4 x 10 M5 x 12 M5 x 14 M6 x 18 1.2 million cycles RB08 2 million cycles RB10 to RB14 Metal Stopper Note) Specified service life (suitable replacement period) is the value at room temperature (20 to 25C).

VQZ1000/2000/3000

C3: One-touch fitting assembly for 3 C4: One-touch fitting assembly for 4 2n-C3, C4, C6, M5 C3: One-touch fitting assembly for 3 C4: One-touch fitting assembly for 4 C6: One-touch fitting assembly for 6 C6: One-touch fitting assembly for 6 45.5 2.5 M5: M5 thread M5: M5 thread 10.5 (5) Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24 stations) 21.5 L n 5 7 8 9 1 2 3 4 6 10 11 12 7.5

CJ2

M4 X 0.7 NTJ-010A M5 X 0.8 NTJ-015A (mm) Refer to p.1.3-12 for details of the mounting nut.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

One-touch fitting) A port M3 x 0.5 M3 x 0.5 Flow Rate Characteristics Flow rate characteristics Effective area (mm2) Port size 12 (PA) 23 (AR) Manifold C [dm3/(sbar)] 1(P), 3(R) Port 2(A) Port b Cv C [dm3/(sbar)] b Cv Body ported for internal pilot 0.9 M3 x 0.5 Type 10-SS3YJ3-20 10-SYJ32M M5 x 0.8 Type 10-SS3YJ341 S41 10-SYJ34M M5 x 0.8 1.5 M3 x 0.5 Type 10-SS3YJ3-42-M5 Type 10-SS3YJ3-42-

Mini Free Mount Cylinder

x 35 l M5 x 40 l M5 x 45 l M5 x 50 l M5 x 55 l M5 x 60 l M5 x 65 l M5 x 70 l M5 x 75 l M5 x 80 l 20 8.5 M4 x 20 l 9.5 9.5 25 M4 x 25 l 8 7.5 25 M5 x 25 l 11.5 12 Series CUJ Clean Series How to Order Double acting 10 12 30 D C D UJ B F8N Number of auto switches Clean Series Nil 2 pcs. 1 pc.

Dual Rod Cylinder Series CXSJ/CXS

x 0.8 thread depth 7.5 2 x M5 x 0.8 thread depth 8 CXS20 64 25 62 23 11.5 50 28 6 12 12 30 10 53 2 x M5 x 0.8 2 x 9.5 counterbore depth 5.3 2 x 6.9 through CXS25 80 30 78 28 14 60 35 6 12 12 30 12 64 2 x M6 x 1.0 2 x 11 counterbore depth 6.3 2 x 6.9 through CXS32 98 38 96 36 18 75 44 8 16 14 30 16 76 2 x M6 x 1.0 2 x 11 counterbore depth 6.3 Q QQ R T TT U W UU V Model 4 x M5 x 0.8 thread