Free Mount Cylinder for Vacuum Series ZCUK

(mm) Operation Range 20 Bore size Auto switch model 10 6 16 9 25 12.5 32 14 D-A9, A9V D-M9, M9V D-M9W, M9WV 11 7 4 5 7 7 Since this is the average value at a normal temperature including hysteresis (tolerance 30%), it is not guaranteed.

VQ4000

: Rc3/8 VQ4 0 1 G H 0 1 G H 0 1 G H G H 3 position double check: VQ465 0 1 2 position double: VQ425 l 3 position closed center: VQ435 l 3 position exhaust center: VQ445 l 3 position pressure center: VQ455 l VQZ VQD 0 1 178.5 105.5 73 42.5 50 VZS 164.5 178.5 Indicator light 11(A port) (12.5) 11(B port) (12.5) 59 73 42.5 105.5 VFS Indicator light 50 11 (A port) 11 (B port) VS 2 4 (12.5) (12.5

End Lock Cylinder Series CBG1

81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

LTF8PH100LTF8PH200LTF8PH300LTF8PH400LTF8PH500LTF8PH600LTF8PH700LTF8PH800LTF8PH900LTF8PH-1000100 200 300 400 500 600 700 800 900 2 3 4 5 6 7 8 9 10 11 1000 Positioning Time Guide Positioning time A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.5 sec.) Maximum acceleration: 3000 mm/s2 Positioning time (sec.)

CYP_EN

Applicable grease pack Grease pack Weight GR-X-005 5 g 10/11 10-1. Model Selection 1 11/11 10-2.

Mini Rotary Actuator

Effective torque table (Nm) Operating pressure(MPa) Size 0.15 0.2 0.3 0.4 0.5 0.6 0.7 05 0.013 0.017 0.026 0.034 0.042 0.050 0.059 1 0.029 0.038 0.057 0.076 0.095 0.11 0.13 18 - Internal structure and parts description CRJB05~1 7 4 3 12 8 1 9 11 10 2 11 9 8 12 12 Hexagon socket head set screw 2 11 Wear ring 2 10 Magnet 2 9 Piston seal 2 8 O-ring 2 7 Round head no. 0 Philips screw 3 6

IDU/IDF

15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D IDF3D IDF4D Dryer IDF6D IDF8D IDF11C IDF15C Dryer IDF22C1 IDF37C1 IDF55C IDF75C Symbol 1 2 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDF1D IDF2D IDF3D IDF4D

Brake mechanism added

25 to 800 25 to 650 35 50 32 80.5 27 70 46 21 52 24 20 28.5 10.5 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 25 to 800 25 to 650 35 60 32 98.5 27 85 23 64 24 20 28.5 13.5 40 10 15 17 26 67 18 11 M10 x 1.25 9 48.5 174 14 25 to 750 25 to 600 40 70 37 32 23 78 25 15.5 52 14 17 21 30 72 23 13 M12 x 1.75 11 117.5 102 55 26.5 36 189 17 25 to 750 25 to 600 40 80 37 131.5 41 116 56.5 25 92 35.5

CE2

6 27 71.5 60 42 22 21 150.5 8 M8 x 1.25 25 to 800 25 to 650 50 35 12 13 10 59 40 27 11 27 21 52 20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600

High Vacuum L Type Valve

XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMV0017 6.

Compact Guide Cylinder Series MGQ

11 12, 16 4 14 6 9 21 2 20, 25 Over 50 stroke 50 stroke or less MGQM32 to 100 18 17 2 22 13 3 16 1 7 5 15 10 11 23 8 20 11 21 4 14 6 9 Over 50 stroke Component Parts Description Material Note Retaining ring Retaining ring Bumper A Bumper B Magnet Slide Bearing Felt Holder Ball bushing Piston seal Rod seal Gasket A Gasket B No.

2/3 Port Solenoid Valve for Chemicals

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Industrijska Avtomatika d.o.o.

Manifold Specifications

DIN Rail Manifold DIN Rail Manifold Common SUP/Common EXH Note) For more than 11 stations, supply air to both sides of 1(P) port and exhaust air from both sides of 3(R) port.

Line Filter

P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

N.C. 3 2 1 11 11 IN port 3 x M6 x 1,1/4-28UNF OUT port (LVM13R,14R) 6 Plug (2) 5 11 6 2 (COM) port (LVM115) Plug (LVM16R) 10 1 (N.C) port 3 (N.O) port 13 For LVM115 2 x M3 Thread length 5 The broken lines indicate the bracket type. For direct mounting 6

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

CE2

32 10 10 150.5 15 26 54 10 8 M8 x 1.25 6 11 27 25 to 800 25 to 650 50 35 80.5 27 70 46 21 52 24 20 28.5 10 40 10 12 162.5 17 27 59 13 11 M8 x 1.25 9 11 32 25 to 800 25 to 650 60 35 98.5 27 85 48.5 23 64 24 20 28.5 13 40 10 15 174 17 26 67 18 11 M10 x 1.25 9 13.5 32 25 to 750 25 to 600 70 40 117.5 32 102 55 23 78 26.5 25 36 15 52 14 17 189 21 30 72 23 13 M12 x 1.75 11 16.5 37 25 to 750 25

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

Air cylinder

P.11 3.

MIST SEPARATOR

SPECIFICATIONS OF BOWL ASSEMBLY 11-18 10. REPLACEMENT PROCEDURE 19-22 11. DISASSEMBLY DRAWING 23 12. DIMENSIONS 24 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.