XMD/XYD Series

55 41 84 20 15 XYD-50 178 128 79 2 53 75 52 95 20 17.5 XYD-63 209 163 100 3 61 87 95 70 121 20 19.5 XYD-80 268 193 117 3 80 114 110 83 144 20 26.5 10 XL-OMP0003-A 7.

REGULATOR

M62X1.5 AR50K-B 1/8 90 125 43 43.3 43.3 3.2 28 44.3 42.5 80.8 42.5 80.8 1 M62X1.5 AR60K-B 1/8 95 130 46 43.3 43.3 3.2 28 44.3 42.5 80.8 42.5 80.8 Optional specifications Model Bracket mount dimensions Panel mount dimensions M N Q R S T U V W Y Z AR20K-B 30 34 43.9 5.4 15.4 55 2.3 24.7 28.5 14 6 AR25K-B 30 34 43.9 5.4 15.4 55 2.3 25.7 32.5 16 6 AR30K-B 41 40 45.8 6.5 8 53 2.3 31.1 38.5 19

VK300

Base mounted VK300-41-2A Manifold gasket and screw assembly Note 1) Mounting direction is fixed, do not mount on opposite side.

F

03 38 04 12 D I M E N S I O N S S E R I E S (N)ASN H Hexagonal Width Port Size Model D Min Max Across Flats 20.5 23.3 8 M5x0.8 (N)ASN2-M5 10 30 34 14 1/8 (N)ASN2-01 15 34.2 38.2 17 1/4 (N)ASN2-02 20 37 41 21 3/8 (N)ASN2-03 25 49 55 24 1/2 (N)ASN2-04 30 y, South San Francisco, CA 94080-6370 !

Multistage Ejector (N)ZL Series

Option Specifications Vacuum pressure gauge specifications GZ30S Part number Fluid Pressure range Scale range (angular) Accuracy Class Operating temperature range Material Air 100 to 100kPa (-14 to 14 psi) 230 3% F.S.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01 Enter the valve and option models to be mounted under the manifold base part number.

Electromagnetic Digital Flow Switch

S Without bracket (Bottom view) Model Port size A B C D E F G H I J K L M N O P Q R S T U LFE13 3/8 90 73 40 23.5 56 83 89 30 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE14 1/2 104 73 40 23.5 56 83 89 30 6 1.6 96 87 48 39 4.6 12 11.5 52 28 2.5 depth 8.5 2 LFE2 3/4 105 78 50 29 67 94 100 41 6 1.6 115 106 62 53 4.6 9.5 14 56 38 2.5 depth 8.5 2.6 LFE3 1 120 90 55 32 73 100 106 46

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

ZSE30A(F)/ISE30A

12 ISA2 ISE35 PSE C4H C6H N7H IS One-touch fitting 4 mm 5/32 inch straight One-touch fitting 6 mm straight One-touch fitting 1/4 inch straight ISG 18 21.8 17.6 ZSM1 10.3 9.8 14 10 14 14 10.9 10.9 10.9 C4L C6L N7L One-touch fitting 4 mm 5/32 inch elbow One-touch fitting 6 mm elbow One-touch fitting 1/4 inch elbow 20.7 22.9 23.5 15.6 16.1 16.1 9.3 11.6 12 10.9 10.9 10.9 37 ZSE30A(F)/ISE30A

Large Size Vacuum Module: Series ZR

-A(a set of six threads) Components Valve unit 3 ZR1-SR2-41-1A(a set of two threads) ZH ZR1-SR2-5-A(a set of six threads) 7 ZR1-SR2-8-A(a set of six threads) ZU ZR1-SR2-49-A(a set of four threads) 11 Standard (Without options) [For ZSE30A spec.]

EXxx-OMY0006CN

X PROFINET FW 24 H watch dog FW EX##-OMY0004 1 No.EX##-OMY0006CN . 1 . 2 2. . 10 2.1. . 10 2.2. . 11 2.3. . 12 2.4. . 12 2.5. . 13 2.6. . 13 3. . 14 3.1. . 14 3.2. . 15 3.3. ()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10.

K35-OMW0030

Operation Examples (Timing Chart)" of this instruction manual. 14 3-2.

Secondary Batteries

Port size Size Applicable body size 650 850 Symbol 10 14 20 1 1 1 2 2 *Specifications and dimensions for the 90-series are the same as standard products.

CRQ2

Refer to Page 14 for details.

Activated Carbon Filter

Performance P13 to 14 Particles flow from the outlet side. 1. From the filter installed on the inlet side, particles come out. Replace the element of the filter on the inlet side and the element of the activated carbon filter. P13 to 14 2.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Refer to Page 14 for details.

Rotary Table

Table 14 shows the recommended tightening torque. Use the designated slotted set screw (M2.54L) to mount the auto switch. Table 14. Recommended tightening torque Auto switch model Recommended tightening torque [Nm] D-M9 0.05 to 0.15 D-M9A (Water resistant) 0.05 to 0.10 D-A9 0.10 to 0.20 Fig. 12 Set screw Auto switch -38- Auto switch proper mounting position at rotation end Table 16.

LJ1H

It will cause failure of the driver or its peripheral devices. 14. Do not use the product in an environment subject to a 5. If a danger against the personnel is expected due to an temperature cycle.

Table of Contents

The range in the chart below that is delineated by bold solid lines indicates the relation between load weights and maximum driving speeds. 6 8 10 4 Bore size (mm) 0.05 to 0.5 Piston speed (m/s) 3.8 x 103 6.25 x 103 9.35 x 103 12.5 x 103 Allowable kinetic energy (J) 10 6 8 10 Load weight (kg) 1 4 0.1 0.01 0.1 1.0 0.01 Maximum speed V (m/s) 7-2-14 14 Series CUJ Specific Product Precautions

PFxx-OMX0007

measurement value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 OUT2 OUT1 Item Error output Reservation Flow Fixed diagnosis Reservation diagnosis Switch output The process data of this product is Big-Endian type.