5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

See page 5 for How to Order Pilot Valve Assembly See page 5 for How to Order Port Block Assembly SY3000-41-2A (with screw & gasket) SY5000-41-2A (with screw & gasket) Description Pilot valve assembly Port block assembly Note No. 6 7 Die-cast aluminum SY3000 is die-cast zinc 1 Body White ( ) Note) 8 Bottom cover assembly 2 3 4 5 Adapter plate End plate Piston Spool valve assembly White White

EXxx-OMU0020CN

(M12 ) (EX245-DX1EX245-DY1) IP65 0.2Nm EX9-AWTS M12 10 . 10-4 (EX9-AWTS) 66 No.EX-OMU0020CN 11. 11.1. . 11-1 . 11-1 Length the EX245 series module n 0 1 2 3 4 5 6 7 8 L 113.6 167.6 221.6 275.6 329.6 383.6 437.6 491.6 545.6 L = 54n + 113.6 (8 ) mm 67 No.EX-OMU0020CN 12. 12.1.

Flow Control Equipment

4.6 7.5 6 12 7.2 6.6 18 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 TMH-06J TMH-06 TMH-08 TMH-10 4.3 7.1 7.2 11 10 20 11 10.6 26.5 TMH-07 TMH-09 TMH-11 4.3 9.5 9.6 14 14 28 14.2 14.6 34 TMH-12 TMH-13 Note 1) Mounting bracket is not available.

Compact Vacuum Unit

Example) 5-station manifold with pressure sensors 0.035 (16) Weight Ibs (g) 0.049 (22) 0.062 (28) 0.075 (34) 0.09 (41) 0.104 (47) 0.117 (53) 0.132 (60) 0.146 (66) 0.159 (72) 0.174 (79) 0.187 (85) 0.088 Ibs x 5 pcs. + 0.011Ibs x 5 pcs. + 0.09 Ibs = 0.585 Ibs (40 g x 5 pcs. + 5 g x 5 pcs. + 41 g = 266 g ) 4 Series ZB Ejector Exhaust Characteristics/Flow-rate Characteristics K J Nozzle Size

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

Process Valve Series VNA

(mm) Symbol 3 2 1 Port size Rc 100 VAC 50/60 Hz 1 2 3 Note 1) 4 Symbol 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz Nil: Non-locking push type N.C. 1 MPa N.C. 0.5 MPa N.O. 1 MPa C.O. 1 MPa Note 2) Note) Note 2) 4 5 6 7 9 Other A: Non-locking push type A (projecting) 1 6A 8A 10A 1 8 1 4 3 8 24 VDC 12 VDC 7 Note 2) Valve size 1 to 4 Note 2) 240 VAC 50/60 Hz 11 15 11 10A 3 8 Note 2) B:

Air Cylinder NCQ7 Series Compact Cylinder

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

Rotary Table

Table 10 shows the part number of the special angle adjustment tool and Table 11 shows the dimensions of the special tool. Angle adjustment using the special tool Table 10. Part number of special angle adjustment tool Size Part number 10 P8910195 20, 30 P8910295 50 P8910495 Table 11.

Speed Controller with One-touch Fittings

L4 Note) Weight (g) 5 5.5 6.5 8.5 9.5 19 22 35 38 52 86 95 Model Applicable tubing O.D. d AS1002F-01 AS1002F-03 AS1002F-07 AS2002F-03 AS2002F-07 AS2052F-07 AS2052F-09 AS3002F-07 AS3002F-09 AS3002F-11 AS4002F-11 AS4002F-13 MIN.

CQM

12 16 14 4.5 5 9 10 11 15 13 1.5 2 6 7 8 12 10 Data Bore size (mm) The dimension inside ( ) is for D-A93.

PF-OMN0011_C

12 1 L/min -13No.PF-OMN0011CN-C SI SI Ta ON-OFF Na ON 0 Ha -14No.PF-OMN0011CN-C M38 L(2 ) (ZS-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

LEH_C

6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15 16 17 18 ( DC24V) 4 - 4.

3 Port Air Operated Valve Series SYJA300 1

-2 to 5-11-6. 0.6 1 (P) 3 (R) 1 (P) 3 (R) Pilot pressure (MPa) Pilot pressure range 0.5 N.C.

Line Filter

P A B C D G J M N Q R S T U V B AFF50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AFF60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Mist Separator

P A B C D G J M N Q R S T U V B AM50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AM60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Micro Mist Separator

P A B C D G J M N Q R S T U V B AMD50 3/41 90 237.7 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.2 AMD60 1 90 314.8 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 336.3 Semi-standard specifications SUS bowl Model No.

Rotary Table: High Precision Type

Fig.11 Component parts of MSUA1/3 switch unit No.

High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5 23.3 26.5 23.3 26.5 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9