Compact Cylinder

301 315 330 402 475 40 264 282 299 316 333 351 368 385 403 420 506 593 Additional Mass Unit (g) Size 20 25 32 40 32 32 19 Male thread 19 How to Calculate (Example) CQUD32-50M Basic mass: CQUB32-50 330 g Additional mass: Rod end male thread 42 g Rod end male thread 10 10 4 Nut 4 162 122 91 84 Vertical foot (Including mounting bolt) 203 145 113 105 Lateral foot (Including mounting bolt

CLK1

Nil s n A 12mm 32 32 Bore size 32 40 50 63 32mm 40mm 50mm 63mm 40, 50, 63 A B 16.5mm 19.5mm 40, 50, 63 50, 63 Nil Without auto switch (built-in magnet) Auto switch type 40 is only available with A:16.5mm clevis width. Select applicable auto switch models from the table below. Cylinder stroke (mm) 32, 40, 50, 63 50, 75, 100, 125, 150 Built-in magnet cylinder part nos.

MRQ

Size/Standard stroke (mm) Angle of rotation 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to p.1.5-18 and 1.5-19 for middle and long strokes other than standard stroke.

45

323 19 335.5 20 348 21 360.5 L dimension 22 373 23 385.5 24 398 25 410.5 No. 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 Caution Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

AC Servo Motor Driver (CC-Link Type)

of point table No.19 Motor speed of point table Writes the motor speeds of point table No.1 to 255 to RAM.

CRB2/CRBU2/CRB1

Refer to pages 31 and 32 for detailed description of Made to Order.

Clamp Cylinder with Lock Series CLK1

Nil s n A 12mm 32 32 Bore size 32 40 50 63 32mm 40mm 50mm 63mm 40, 50, 63 A B 16.5mm 19.5mm 40, 50, 63 50, 63 Nil Without auto switch (built-in magnet) Auto switch type 40 is only available with A:16.5mm clevis width. Select applicable auto switch models from the table below. Cylinder stroke (mm) 32, 40, 50, 63 50, 75, 100, 125, 150 Built-in magnet cylinder part nos.

OMU0023

2 82 52 R 114 72 r 19 13 DC3 51 33 3 83 53 S 115 73 s 20 14 DC4 52 34 4 84 54 T 116 74 t 21 15 NAK 53 35 5 85 55 U 117 75 u 22 16 SYN 54 36 6 86 56 V 118 76 v 23 17 ETB 55 37 7 87 57 W 119 77 w 24 18 CAN 56 38 8 88 58 X 120 78 x 25 19 EM 57 39 9 89 59 Y 121 79 y 26 1A SUB 58 3A : 90 5A Z 122 7A z 27 1B ESC 59 3B ; 91 5B [ 123 7B { 28 1C FS 60 3C < 92 5C \ 124 7C | 29 1D GS 61 3D = 93 5D

Vacuum Unit

No. 11 12 13 14 15 16 17 18 19 20 Exploded View y VVQ1000 51A C8 L Dimension 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 Port size L Dimension 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 C8 8 One-touch fitting N9 5/16" One-touch fitting No. 31 32 33 34 35 36 37 38 39 40 L Dimension 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 33 Exploded

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Vacuum

Air Pressure settiflq range 0 -3oinHs (0 760mmHo) Hystersis 3% or less (fixed) Accuracv a3% full scale (40 100"F) 15% full scale (32 140'F) Supply voltage 12 24VDC (Ripple r'10% max.) Port srze M5 ( 10 32 nom.)

Transfer

Nil Without spacer Bore size Long spacer 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit part no.

SI unit ( device)

Specifications 32 Dimensions 34 -1No.EX-OMW0016-A Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

ITV

Note) Breathing hole (M3 x 0.5) 3.7 3.7 13.7 1 SUPz VACz OUT port (4, 5/32") SUP, VAC port (4, 5/32") OUTx 3 EXHc ATMc 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L-bracket (Option) Flat bracket (Option) 6-3.5 19 74 2-3.5 19 27 19 64 Minimium bending radius 80 28 Body +50 0 3000 15 35 (30.9) 4 8.7 9.9 Cable connector (4-wire) Straight type (Option) 7

Electric Actuator

For auto switches, refer to pages 19, 20.

KR

(mm) Connection thread R Model A M Weight (g) Note) D2 L1 L2 10 D1 KRL06-02S KRL06-01S 1 8 12 22 33 13 21 35 25 26 36 25.5 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 10 20 29 27.5 1 4 19 4.2 14 17 12 14 17 12.8 6 Applicable tubing 9.0 3 8 1 8 KRL06-03S 28 14.9 KRL08-01S KRL08-02S KRL08-03S KRL10-01S KRL10-02S KRL10-03S 1 4 3 8 1 8 1 4 3 8 30 31.5 32 33 34.5 15.2 12 23 8 20.5 21.6 14.9 21.6

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

Process Valve Series VNA

(mm) Model Rc FlangeNote) Cv 7 12 11 18 11 18 19 28 19 28 29 43 29 43 Effective area (mm2) 130 220 210 320 210 320 330 500 330 500 520 770 520 770 VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 16 25 22 32 22 32 28 40 28 40 33 50 33 50 1.4 1.5 1 2.5 2.6 1 4 1 5.7 5.8 32 4.1 4.2 1 2 1 JIS Symbol Valve

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

(The rack has a specified mounting direction, so this should be checked when removing it from the body.) 17 15 3 10 14 27 11 5 12 19 9 12 14 1 11 27 4 2 6 15 4 43 - Assembly procedure 1. Apply the grease provided in the seal kit to parts shown in Table (19).

Electric Actuators

Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball screw drive Ball screw drive Belt drive Series LEFS Series LEFB