CL

17 17 21 21 16 16 18.5 27 30 31 37 40 35 35 39 15 17 17 21 21 16 16 18.5 84 90 98 116 126 98 98 106 11 11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405

Step Motor Controller

Refer to the dimensions on page 15 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448 460.5

KJ

17 18.5 21 22 17.46 17.46 17.46 17.46 22.23 25.4 28.6 17.46 17.46 17.46 17.46 22.23 25.4 28.6 31 31 34.5 35 38.5 43 46 17.5 18 19.5 20.5 23.5 25.5 28 5 32 3 16 1 4 5 16 3 8 1 2 Mounting plate thickness 7 mm or less Note) D: Max. diameter 15-4-22 15 Inch-size One-touch Fittings Series KQ2 Bulkhead Connector: KQ2E Applicable tubing O.D.

Stability of suction position,

Pad diameter 32 to 50 Dimensions/With Set Screw: Vacuum Inlet Vertical Pad form Flat type with groove ZP3E-T32UMl-A10 ZP3E-T40UMl-A10 ZP3E-T50UMl-A10 6 M10 x 1 40 Seal washer Seal washer M10 x 1 31 31 6 Seal washer 6 M10 x 1 Width across flats 6 Width across flats 6 21.5 4.9 21 4.9 21 4.9 Width across flats 6 14.5 14.5 15 3 2 2.5 35 32 43 40 53 50 Weights [g] Weights [g] Weights [g] Pad material

CL

17 17 21 21 16 16 18.5 27 30 31 37 40 35 35 39 15 17 17 21 21 16 16 18.5 84 90 98 116 126 98 98 106 11 11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405

Electric Actuator

L1 12 Series LEY Dimensions Body bottom tapped/Motor parallel/LEY ll -lllU 16 25 32 A B C Body Bottom Tapped [mm] Stroke range (mm) L MA MB MC MD MH ML Size 6 x MO thread effective depth MR 10 to 39 17 23.5 XA H9 depth XA 40 16 35.5 23 40 to 100 32 31 10.5 15 101 to 300 62 46 60 15 to 39 24 32 MH 50 40 to 100 42 41 25 46 29 101 to 124 14.5 20 75 125 to 200 59 49.5 MD Section XX 201 to 400

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

14 124 21 31 76 25 19 16 M12 x 1.75 10 26 131 Bore size [mm] MM N P PG PH PL PW S TDe8 TT TX TY TZ Without rod boot With rod boot H Z ZZ e f h l Z ZZ 40 M14 x 1.5 27 1/4 42 11 20 45 153 15 0.032 0.059 22 85 62 117 51 162 209 43 11.2 59 1/4 stroke 170 217 50 M18 x 1.5 30 3/8 46 10 21 50 168 15 0.032 0.059 22 95 74 127 58 181 232 52 11.2 66 1/4 stroke 189 240 63 M18 x 1.5 31 3/8 48.5 13 23

Air Cylinder Series CS1

31 30 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke Lube Non-lube Air-hydro 15 31 24 M30 x 1.5 35 98 110 318 82 75 40 133 341 364 0.2 stroke 17 36 26 M36 x 1.5 39 106 120 346 82 75 40 141 367 388 0.2 stroke 20 41 31 M40 x 1.5 39 111 135 381 92 85 45 153 399 417 0.2 stroke Lube Non-lube 20 46 31 M45 x 1.5 39 111 135 381 96 90 45 153 399 417 0.2 stroke 25 56 35 M56 x 2 49 141 160

Step Motor Controller

Refer to the dimensions on page 15 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimension [mm] No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 L 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 398 410.5 423 435.5 448 460.5

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Positioning Operation Pushing Operation ON OFF ON OFF IN IN Input Input 15 ms or more Output the step data no. 15 ms or more Output the step data no.

C95

18 25 80 25 65 4.3 4 5 36 16 45 20 95 72 10 18 11 22 30 100 115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47

C95

ER 32 11 10 38 51 21 18 31 14 32 10 15 6.6 8.5 10.5 40 11 12 41 54 24 22 35 16 36 10 18 6.6 8.5 12 50 15 16 50 65 33 30 45 21 45 12 20 9 10.5 15 63 15 16 52 67 37 35 50 21 50 12 23 9 10.5 15 80 18 20 66 86 47 40 60 25 63 14 27 11 11.5 18 100 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 6-12-10 Series C95 ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Dimensions: Piston

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 49 st 50 st or more 10 st or more 15 to 49 st 50 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 64 st 65 st or more 10 st or more 15 to 74 st 75 st or more 10 st or more 15 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more 15 st or more 20 to 74 st 75 st or more Trunnion

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

30 31 M30 x 1.5 35 98 364 Lube Non-lube Air-hydro 1/2 341 133 40 75 110 318 0.2 stroke 15 31 24 M30 x 1.5 35 98 364 3/4 141 367 75 40 120 346 0.2 stroke 17 36 26 M36 x 1.5 39 106 388 3/4 399 153 45 85 381 135 0.2 stroke 20 31 41 M40 x 1.5 39 111 417 3/4 1 399 45 153 381 90 135 0.2 stroke 20 31 46 M45 x 1.5 39 111 417 Lube Non-lube 477 176 55 105 160 461 0.17 stroke 25 56 35 M56 x 2 49 141

CG1

(22.5) 15 (22.5) 15.5 (23.5) 18 (27) 22.5 (34.5) 22.5 (34.5) 31 (45) 31 (45) CA1 20 24 27.5 29 25.5 30 24.5 27 27 27.5 CS1 25 24 27.5 29 25.5 30 27 27 29.5 30 32 25 28.5 30 26.5 31 30.5 28 33 33.5 40 29.5 34.5 33 35.5 31 35 32.5 37.5 38 50 37 42 40.5 38.5 43 40.5 40 43 43.5 63 37 40.5 42 38.5 43 40 47.5 50 50.5 80 46.5 48 49.5 59 100 46.5 48 49.5 69.5 ( ): Long stroke, bore size

JIS Standard Hydraulic Cylinder

(mm) With rod boot Stroke range (mm) Bore size (mm) e f B C F GA GB J M NA NB P R S T l Q B-rod C-rod B-rod C-rod 32 21.5 15 52 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 25 to 1400 40 12 15 52 52 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 25 to 1400 1/3.5 stroke 50 15 15 52 55 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 25 to 1400 63 15 20 55 65 90 63 15 42 19 M12 x 1.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

Cylinder with Lock

H6 K1 K2 (Max.) l2 S5 32 ES5032 32 10 11 14 15 10.5 21 18 31 10 38 51 8.5 6.6 40 ES5040 36 12 11 16 18 12 24 22 35 10 41 54 8.5 6.6 50 ES5050 45 16 15 21 20 15 33 30 45 12 50 65 10.5 9 63 ES5063 50 16 15 21 23 15 37 35 50 12 52 67 10.5 9 80 ES5080 63 20 18 25 27 18 47 40 60 14 66 86 11.5 11 100 ES5100 71 20 18 25 30 18 55 50 70 15 76 96 12.5 11 21 Accessories CP96N/C96N Series Dimensions:

LEC-OM069xx

Parameter Classification.2-15 2.4.2 Notation for Parameters.2-16 2.4.3 Setting Parameters.2-16 2.5 Monitor Displays.2-16 3.

CLS

h + l ZZ1 + l + Stroke Bore size (mm) Stroke range (mm) J M AL B C E F FA GA K KA N A BA BB BC BD BG BE BZ BV BW BP D EA GB GC H MM P BY MB MA 125 140 160 180 200 250 14 14 14 17 17 20 15 15 17 20 20 25 31 31 36 41 46 56 19 19 22 26 26 30 47 47 53 60 60 67 43 43 43 48 48 60 35 35 39 39 39 49 50 50 56 63 63 71 1/4 1/4 1/4 3/8 3/8 1/2 36 36 40 45 50 60 59 59 59 70 74 86 1/2 1/2 3/4 3/4 3/4