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Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

Large Size Vacuum Module: Series ZR

Pressure Switch for Vacuum: ZSE2-0RIndicator light (Red) Pressure setting trimmer Indicator light (Red) Pressure setting trimmer ZSE2-0RZSE2-0R-L ZSE2-0R-C ZSE2-0R-CL ZSE2-0R-CN L SET H L SET H 15 15 9 9 2 x M2.5 x 41L Mounting thread 2 x M2.5 x 41L Mounting thread 25 25 31 31 600(3000) 42 600(3000) 49.5 40 40 3 3 20 20 18 18 16 16 13 11 13 11 9 9 Vacuum supply port 3.3 Vacuum supply port

Cylinder with Lock Series CNG

200 201 to 350 44.5 8 201 to 350 6.5 9 20 to 300 22 19.5 17 45 103 1/8 16.5 10 14 2 97 10 (12) 25 7 6 31 to 300 301 to 400 51.5 10 301 to 400 6.5 9 20 to 300 22 19.5 17 45 104 1/8 20 12 18 2 97 10 (12) 25 7 6 38 to 300 301 to 450 51.5 10 301 to 450 7 11 20 to 300 30 27 19 52 112 1/8 26 16 25 2 104 10 (13) 26 7 8 47 to 300 301 to 800 58.5 12 301 to 800 (mm) Bore size (mm) 20 25 32 40 P J

CNG

38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to

51

Applicable bore size (mm) 20 25, 32 40 50, 63 80 100 d H1 H2 B1 C D A (20.7) (39.8) 42.1 NT-02G3 NT-03G3 NT-04G3 NT-05G3 NT-08G3 NT-10G3 M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 5 6 8 11 13 16 4 4 5.5 8 9.5 9.5 13 17 19 27 32 41 (15) (19.6) (21.9) (31.2) (37) (47.3) 12.5 16.5 18 26 31 39 10 12 16.4 20.4 28 33 (23.6) (49.4) 53.8 (27.3) (58.4) 64.6 (29.7) (72.4) 79.2 (34.3

CJ5-S

16.5 25 8 18 12 35 5 31 M4 x 0.7 5 6 14 3 M8 x 1.25 29 1/8 9 83 13 MVGQ + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.084 0 25 8 Up to 300 16 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19

CJ5-S

16.5 25 8 18 12 35 5 31 M4 x 0.7 5 6 14 3 M8 x 1.25 29 1/8 9 83 13 MVGQ + 0.058 0 + 0.058 0 + 0.058 0 + 0.070 0 + 0.070 0 + 0.084 0 + 0.084 0 25 8 Up to 300 16 22 19.5 17 18.5 27 10 18 12 40 6 33 M5 x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 Up to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19

Electric Actuator

Option Page 36 Regeneration option Part no.: LEC-MR-RB-; Option Motor cable Page 36 I/O connector Part no.: LE-CSNS Page 36 Standard cable Robotic cable LE-CSM-S;; LE-CSM-R;; Control circuit power supply connector (Accessory) Page 31 Lock cable Page 36 CN1A Standard cable Robotic cable LE-CSB-S;; LE-CSB-R;; CN1B CN1A Electric actuator Motor connector (Accessory) Page 31 Option SSCNET III

5 Port Air Operated Valve

(31) 30 (31) 30 (31) VPA3 14 (15.5) 14 (15.5) 1/4, 3/8, 1/2 [1 (P), 5 (EA), 3 (EB) port] 50 (54.5) 50 (54.5) 4.5 (0.5) 92 (100) 3 position closed center/exhaust center/pressure center 3 4 5 VFA5 44(-P) 02 03 04 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 36 (39.5) 27 (31) 14 (15.5) 20.5 (24.5) 1/8 [Pilot port: Lateral (-P)] 2 x 5.3 (2 x 6.5) (For mounting) 82 (87) 5 (6.5) 51.5 (55.5) 2B 4A 42 (45)

CG5-S

19 (21.9) M14 x 1.5 8 CD-E08SUS 80, 100 NT-05SUS 50, 63 22 C type 22 for shaft 26 21 87.2 79.4 2.55 1.35 27 (31.2) M18 x 1.5 11 NT-08SUS 80 31 32 (37.0) M22 x 1.5 13 NT-10SUS 100 39 41 (47.3) M26 x 1.5 16 (mm) Inch (for X165US option cylinders) Part no.

Stainless Steel 316

(mm) Effective area Note 2) (mm2) Note 1) L M Weight (g) Model D 2 x applicable tubing 4 6 8 10 12 KQGH04-00 KQGH06-00 KQGH08-00 KQGH10-00 KQGH12-00 11 37 18 16 5.6 D D 13 38 18.5 22 13.1 M M 15 42.8 20.9 31 26.1 L 19 47 23 54 41.5 21 50.6 24.8 66 58.3 Note 1) D is maximum diameter.

HRX-OM-M091

52 50 56 31 03 65 Response message (Slave to Master) STX Slave Address ACK Command Reading data ETX BCC 02 30 31 06 50 56 31 30 30 31 38 37 03 0F 5.5 Message configuration HRS Series 5-14 HRX-OM-M091 Chapter 5 Simple communication protocol function 5.6 BCC EXOR algorithm of all characters from STX to ETX is read with the check code for error detection.

Tie-rod Type Hydraulic Cylinder

15 11 13 17 19 11 13 15 17 11.5 13.5 14 16.5 11 13 CHN 63 23.5 24.5 20 21 25 26 13.5 14.5 19.5 20.5 13.5 14.5 17.5 18.5 13.5 14.5 80 23.5 26.5 20 23 25 28 15.5 18.5 13.5 16.5 19.5 22.5 13.5 16.5 17.5 20.5 14 17 16.5 20 13.5 16.5 CHM 100 27 31 23.5 27.5 28.5 32.5 19 23 17 21 23 27 17 21 21 25 17.5 21.5 20 24.5 17 21 Note 1) The auto switches listed below cannot be mounted on 63.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 1 0-7 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 2 8-15 All enable Setting value FF 1 1 1 1 1 1 1 1 Output No. 23 22 21 20 19 18 17 16 3 16-23 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 31 30 29 28 27 26 25 24 4 24-31 Output 24-27: Disable Output 28-31: Enable Setting value F0 1 1 1 1 0 0 0 0

CNG

38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200 201 to 350 20 to 200 201 to 350 22 19.5 17 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to

High-Precision Digital Pressure Switch

0 0.4 31 0 0.4 4 x R2 or less Multiple (2 pcs. or more) secure mounting Panel mount example 31 x n pcs. + 3.5 x (n pcs. 1) 24 or more 31 0 0.4 4 x R2 or less Panel mount example 31 0 0.4 24 or more 31 x n pcs. + 3.5 x (n pcs. 1) 4 x R2 or less 18 2 Outputs + Analog Output (Voltage/Current) 3-Screen Display High-Precision Digital Pressure Switch

Square Tube Type Air Cylinder Series MB1

13 14 14 20 20 13 14 15.5 16.5 19 19 47 51 58 58 72 72 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800

HRX-OM-M005

This system Your system Communication data TEMP PV 31 TEMP PV TEMP PV 31 TEMP SP 30 External communication 31 Discharge temp.: OFFSET 1 31 Heat dissipation: 1 Circulating fluid temp. in your system: 30 Figure 8-4 When MODE1 is selected HRZD Series 8.4 Offset Function 8-15 HRX-OM-M005 Chapter 8 Appendix When MODE2 is selected With OFFSET value set at -1C, TEMP PV and communication data shows

Filter Regulator

Tighten others with 0.60.05Nm. -44- 13. Dimensions 13-1.

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.