3

With arm Port side M With Arm Rotary direction: R During unclamping (Extension end) Rotary direction: L During unclamping (Extension end) Model (mm) N N O P U V AD 18 18 22 22 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 67 67 88 88 45 45 65 65 20 20 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 15 to 25 15 to 25 30 to 40 30 to 40 10 mm Clamp stroke M Rod state Model O P 10 50 mm 85.5 150.5 93 158 103

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 MX B A MTS Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) MY 16 20 Mounting position 16 20 Mounting position Mounting position 16 20 93 94 A A A 73 74 70 90 CY 107 106 B B B 87 86 90 110 6.5 7 8.5 6.5 Operating range Note) Operating range Note) Operating range Note) 11 7.5 MG CX MY1MW25/32

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

25 NC 14 17 NE 49.5 55.5 NH 16.5 21.7 NW 56 60 Bore size (mm) 16 20 90 110 PP SS 2.5 5.0 PA 40 50 PB PG 3.5 4.5 Q 153 191 QQ QW 48 45 RR 11.0 14.5 TT 15 18 UU 14 12 VV 10.0 12.5 W 102 110 WW 13 14 YW 54 58 Z 180 220 Bore size (mm) 16 20 9 10 94 100 7.5 11.5 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

RZQ

34 CE2 40 72 18 40 50 90 22 50 ML2B 63 108 28 60 FV M C J G5-S CV M L B + Full stroke FT FZ AH + Full stroke MVGQ CC RB Double clevis style: RZQD Double Style (mm) J CT Cap bolt Bore size (mm) Hole: CD H10 d9 A B CD CL CT CU CW D32 112.5 82.5 10 102.5 5 14 20 -X 40 124 92 10 114 6 14 22 50 134.5 96.5 14 124.5 7 20 28 2063 30 146 102 14 132 8 20 CU Data Bore size (mm) L B + Full stroke RR

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0: None, 1: 2 value average, 2: 4 value average, 3: 8 value average, 0..3 (Ch0 in

3 Port Air Operated Valve

19 20 stations Station n L1 L2 1573

Compact Guide Cylinder

TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25 10 7.1 7 Compact Guide Cylinder

Air Slide Table Series MXQ

Nil S n L Auto switch type Nil Without auto switch Cylinder bore size (stroke mm) Refer to the table below for auto switch part numbers. 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 Functional option Nil F R Note 2) Standard With buffer With

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirens , Pad Diameters @2 . s4 .

Vacuum

50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.! 734 78.5 8.7 1 9 7.5 ZPR168 1 8 20 29137.9 54 75 80 9.9 40 43 34 47.l5 U : 76.1 25 102 92 24.4 48 50 53 38 51 t 80.1 106 96 32.4 1 9 lP[ $enies Without Buflen luirensio Pad Diameters @2 . s4 .

P

D16 16 ZP16Dl 18 4 13 11.7 16 7 D25 25 ZP25Dl 28 4 15 15.5 20 10 D40 40 ZP40Dl 43 7 18 24.2 29 17 3.8-59 Series ZP Replacement Parts: Adaptor/Buffer (Series ZPR) The same symbol Construction Without Buffer Replacement of the symbol R ZP 16 A5 UN 04 [Pad model no.]

5 Port Solenoid Valve SY Series

port Type 20 Bar stock type Individual wiring SY3 20 SY5 20 SY7 20 P. 37 Direct piping to the main unit of a valve.

Escapements Series MIW/MIS

Kit components main parts MIS12-10D MI-A1201-10 MI-A1202-10 MI-A1203-10 MIS12-20D MI-A1201-20 MI-A1202-20 MI-A1203-20 MIS12-30D MI-A1201-30 MI-A1202-30 MI-A1203-30 MIS20-10D MI-A2001-10 MI-A2002-10 MI-A2003-10 MIS20-20D MI-A2001-20 MI-A2002-20 MI-A2003-20 MIS20-30D MI-A2001-30 MI-A2002-30 MI-A2003-30 Standard Finger Tapped on upper and lower faces Tapped on all faces 3 12 13 14 20 Seal kit

Heavy Duty Stopper Cylinder Series RSH/RS1H

30 40 10 20 30 40 0 0 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graphe Graphr Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 0 5000 1000 2000 3000 4000 Lateral load F [N] 32 70 70 60 60 50 50 32 40 40 30 30 20 20 20 20 10 10 0 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 16

RSH

30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10 20 30 40 0 0 Load speed : u (m/min) m=0 Load speed : u (m/min) m=0.1 4.3-4 Heavy

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

CRQ2

) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

H9) TL JJ US TA TD G L UW TB TC M N b l 90 180 90 180 90 180 3 29 104 130 122 153 20 0 0.03 1 15 59 24.5 8 11 9.6 11.5 4 13.5 27 4 4 2.5 74 20 M5 x 0.8 depth 6 0 0.03 30 2 18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment

Compressed Air Preparation Filter

42.5 Size 40 2 1/4, 3/8, 1/2 145.2 35.5 38.4 72.6 40 35.5 50 40 55 9 18 7 50 65 Size 50 2 3/4, 1 186.2 43 93.1 30 45 70 50 70 11 20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.