Series CQ2

Switch connection side 0.5m Load connection side 0.5m A 38.5 (1.5) 42 (1.7) B 38.5 (1.5) 42 (1.7) Bore size (mm) 180 200 Dimensions are the same for single rod and double rod. Minimum Strokes for Mounting of Auto Switches Contact protection box internal circuits CD-P11 OUT Brown [Red] Surge absorber Choke coil D-Z7, Z8 D-Y5, Y6, Y7 D-Y7W D-Y7BAL OUT Blue [Black] 180, 200 2 pcs.

Large Bore Compact Cylinder Series CQ2

Switch connection side 0.5m Load connection side 0.5m A 38.5 (1.5) 42 (1.7) B 38.5 (1.5) 42 (1.7) Bore size (mm) 180 200 Dimensions are the same for single rod and double rod. Minimum Strokes for Mounting of Auto Switches Contact protection box internal circuits CD-P11 OUT Brown [Red] Surge absorber Choke coil D-Z7, Z8 D-Y5, Y6, Y7 D-Y7W D-Y7BAL OUT Blue [Black] 180, 200 2 pcs.

VXD21/22/23

53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5 44.5 ( ): N.O. 17-3-41

Vacuum Equipment

(Sequence in selection graph (4), ) T2: 12 seconds.

LJ1H

motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard

CEx-OMI0064

38 10 . 40 10-1 . 40 10-2 . 42 1 , 1. 2. 3.

0.01

A 72 27 B 41.8 15.8 SFD100-02 23 Hole shape for bracket mounting 26.2 SMC 23 14.7 90 1.5 3 51 17 Use a countersunk head screw (M3) for bracket mounting. 72 27 3.5 SFD200-C SFD200-C Dimensions Model A 125 B SFD200C08 C10 C12 8 10 126 12 126 SMC 42 24 Bracket mounting dimensions 96.5 36 4 x 3.5 114.5 4 x 7 Applicable tubing O.D.

AKH/AKB Series

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

VXZ

width across flats 22 Cable 6 to 12 Hexagon width across flats 22 LVQ Model N N.C.

VCA

VCA20-12-1A VCA30-12-1A VCA40-12-1A Connector All types equipped with surge voltage suppressor. 1 Direct Operated 2 Port for Air Series VCA Standard Specifications Direct operated poppet Valve construction Air/Inert gas Fluid Withstand pressure MPa 2.0 Body material Al Valve specifications Coil specifications Seal material HNBR Ambient temperature C 20 to 60 Fluid temperature C 10 to 60

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

%silltr

Supply should be "1", the outputs 2'and "4', the pilot port connecting"l" with 2" is then "12" etc. Table 7.2 shows the tour main sets of port identifications in use. Preterred are now the numbers.

•

SOmA Nil Relay, Sequence controller D-660 l00VAC Max.2SmA 200VAC Max. 12.SmA Model Load voltage Max. current or conduit range Indicator light Application D-A31 1 00VAC 2SmA Relay, Sequence controller 200VAC 12.SmA D-A37 24VOC S-30mA D-A39 24VDC 10-60mA Sequence controller DIN connector type D-A4 type Relay, Sequence controller Model Load voltage Max. current or conduit range Indicator

HEC-OM-S008

Name Alarm flag 1,2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Unused 1 ERR01 System error 1 2 ERR02 System error 2 3 ERR03 Back-up data error Alarm flag 1 4-10 Unused 11 ERR11 DC power supply failure 12 ERR12 Internal temperature sensor High temperature failure 13 ERR13 Internal temperature sensor Low temperature failure 14 ERR14 Thermostat alarm Alarm given off status

Check Valve Series AK 1

A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

AKH/AKB Series Check Valve with One-touch Fitting

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

SMC Basic Pneumatics

Supply should be "1", the outputs 2'and "4', the pilot port connecting"l" with 2" is then "12" etc. Table 7.2 shows the tour main sets of port identifications in use. Preterred are now the numbers.

Mechanical Valves Series NVM, NVFM, NVZNI

{3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6 (32) 1.20 :30.5) 0.24 (6) 4.45 rl 13) 3.23 IA2l I 22 (31 o.1i {3) ).06 1.5) t.5; 401 1.06

For Water Digital Flow Switch Series PFW

Refer to pages 1 through 7. 23 Series PFW Dimensions/Integrated Display Type for Water PFW704/720 Internal circuit and wiring examples 67 L 6 58 60 Brown 1.6 17 Load Main circuit Main circuit Load Black LED Green + OUT1 12 to 24VDC White LED Red FLOW SWITCH OUT2 UP Blue 54 44 34 SET PFW7--27 (-M) OUT2 OUT1 DOWN FOR WATER Brown OUT1 2-Port size 4-4.5 40 50 Black + 12 to 24VDC LED Green

PF2D

Display (PF2D30/31) Sensor 40 Brown 15 6 2 Analog output Switch output or Pulse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24 VDC ZSE ISE White 7 3 Black PSE A 62 52 42 5 1 Blue Z I SE3 PF2D5--1 A Model PF2D520 12.7 Display (PF2D30/31) PS PF2D504 4-4.5 9.52 Sensor Brown 2 6 Z I SE1 2 52 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco