80

Use a fluid with a kinematic viscosity of 50 mm2/s or less.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Rod end thread Bore size 20 25 32 40 50 63 80 100 Rod end female thread Rod end male thread Nil M 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Cylinder stroke (mm) Refer to page 2 for standard and intermediate strokes. Applicable Auto Switches/Refer to pages 16 to 21 for further information on auto switches.

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Series CV Valve Mounted Cylinder Precautions Be sure to read before handling.

KJ

(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5

DOC1001322

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Sulphate ion [mg/L] 50 or less 200 or less Standard item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

MHS

M30.5 2.5 0.6 25 M40.7 3 1.4 32 M50.8 4 5.1 40 M50.8 4 5.1 50 M61 5 8.6 63 M81.25 6 21.6 80 M101.5 8 24 100 M121.75 10 42.2 125 M142 12 67.7 19 MHSJ3 4 1J J 5 2 C C 6 3 mm Nm 16 M2.50.45 2 0.3 20 M30.5 2.5 0.6 25 M30.5 2.5 0.6 32 M40.7 3 1.4 40 M40.7 3 1.4 50 M50.8 4 2.8 63 M50.8 4 2.8 80 M61 5 4.8 20 MHSH3 4 1.

AZ1000

psig (0.14 MPa) AZ1500 2000 to 3000 psig (13.8 to 20.7 MPa) 500 psgi (3.4 MPa) Inlet pressure: 1000 psig (6.9 MPa) 200 psig (1.4 MPa) 50 0.34 0.69 100 0.62 90 80 40 0.28 0.55 Delivery pressure (slpm) Delivery pressure (MPa) Delivery pressure (MPa) Delivery pressure (psig) 0.48 70 0.41 60 30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate

HRX-OM-K003

Ph (25C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25C) (s/cm) * 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max. 50 2-/L) Max.200 Max.50 Sulfate ion (mgSO4 Acid consumption (Ph4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (mgCaCO3/L) Max.200 Max.70 Calcium hardness (mgCaCO3/L) Max.150 Max.50 Standards Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Nil S n Front mounting flange style Bore size 20 25 32 40 50 63 80 100 20 mm Auto switch 25 mm Nil Without auto switch (Built-in magnet) 32 mm 40 mm For the applicable auto switch model, refer to the table below. Port thread type 50 mm Nil TN TF Rc 63 mm Cylinder stroke (mm) Refer to Standard Stroke on page 357.

Transfer

30 40 50 100 200 300 Fs Fs + mgs Fsmgs 400 500 Absorbed energy E W2 max.

VQ5000

Nil E Yes Without light, with surge voltage suppressor Seal Metal seal Rubber seal 0 1 Coil voltage Function 1 2 3 Stations 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC D side U side Standard type (1 W) Low wattage type (0.5 W) External pilot Nil Y R (1) (2) Applicable to DC sepecifications.

VZ5000

VFS Cylinder Speed Chart Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm VS4 Series MB, CA1 Note) Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series VQ7 EVS 800 700 600 500 400 300 200 100 0 749 749 Perpendicular, upward actuation Horizontal actuation 610

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

IDX-OM-W089

Air Inlet Air Temperature 550 Operating Range MIN.Inlet Air Pressure 0.15MPa MAX.Inlet Air Pressure 1.0MPa (For option K, L: 1.6MPa) Ambient Temperature 2 ~ 40oC(Relative Humidity of 85% or less) Power source 1Phase AC200/200,220V10%50/60Hz Starting current A AC200V 50/60Hz 9/8 Specification Electrical Operating current A AC200V 50/60Hz 1.2/1.3 Power Sonsumption W AC200V 50/60Hz 180/202

Digital Flow Switch (Remote type sensor unit)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0010-J Dimensions PF3W504

CH

Standard Strokes Bore size (mm) 20 32 40 50 63 80 100 Standard strokes (mm) 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Fieldbus system Digital unit

mA or less Enclosure IP67 (With manifold assembled) 2 IP40 (With manifold assembled) Operating temperature range -10 to 50 oC (Max. surrounding air temperature rating: 50 oC) 3 Storage temperature range -20 to 60 oC Environment Operating humidity range 35 to 85%RH (No condensation) Withstand voltage 500 VAC for 1 minute between external terminals and FE Insulation resistance 500 VDC, 10

7.4

n: Station (Maximum 20 stations) 21.5 n L 1 2 3 4 5 6 7 8 9 10 L1 31 42 53 64 75 86 97 108 119 130 L2 50 62.5 75 87.5 100 112.5 125 125 137.5 150 L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 L3 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5

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Both sdes (2 to 20 siaiions) '!

3 Port Solenoid Valve

Lead wire length 2000 mm Hook Nil 6 10 15 20 25 30 50 300mm 600mm 1000mm 1500mm 2000mm 2500mm 3000mm 5000mm 2. Crimping of lead wires and sockets Strip 3.2 to 3.7 mm at the end of the lead wires, insert the ends of the core wires evenly into the sockets, and then crimp with a crimping tool.