Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

PSxx-OMS0004CN

0.2F.S.(25 IP65 AC500V 1 100M(DC500 V) -1060 -2070 () 3585RH() CERoHS 01 02 R1/8M50.8 R1/4M50.8 C3604+ Al2O3(96) OFKM+ M12 88 g 95 g M12 175 g 182 g AWG23 0.72 mm 1.14 mm 4 3 m -15No.PS-OMS0004CN-D [mA] [V] A B 01MPa 0 1MPa -100100 kPa -100 kPa 100 kPa 0500 kPa 0 500 kPa -16No.PS-OMS0004CN-D A B PSE57-01 8 R1/8 PSE57-02 12 R1/4 M12 ZS-37-A 1 2 4 3 M12 ZS-37-B 3 4 2 1

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

dimensions Port size Rc VS A Model B C D E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16

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Pressure set1ing range -1 OOkPa . l DOkPa {1.D2kgf/cm2 } 0. 1 MPa1MPa {1 O.2kgf/cm2} (MPa. kPa, kgf/cm2, mmHg. bar, PSI) mmHg, kPa, PSI MPa, PSI Unit indicalions kgf/cm:i, bar kgf/cm2, bar -Variety of switch output modes MPa:O.01. PSI:1 Min. dISplay dilferenllal kgf/cm2 :O.02. bar:O.D2 kgf/cm2:O. 1, bar:O.1 mmHg:l 0. kPa:2.

NARM Ser ies

8 1 8 (80 X n) + 23 Common IN .13 (57) NARM1000 1 8 1 8 (79 X n) + 25 Individual IN Common IN 1 4 1 8 (188 X n) + 43 NARM2000 .3 (136) Individual IN 1 8 1 8 (187 X n) + 45 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.

PSxx-OMH0002CN

Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015 MPa 1 02 Rc1/4 N02 NPT1/4 S M12 (5m) F02 G1/4(ISO1179) L M12 (5m) 1 27 2 NPN 2 M SI 2 43 NPN 1 1 PNP 1 P psi() 1 65 PNP 1 1 2MPa 67 2 PNP 2 ZS-31-A A

G15/G27

Model (Standard) Dimensions Pressure range (1) Connection thread Indication unit Model G15 MPa MPa G15-10-01 (2) R 1/8, M5 (Female thread) 0 to 1.0 0 to 1.0 1 16 G27-10-R1 R MPa Note 1) Do not apply more excessive pressure than max. pressure display. It will be a cause of malfunction.

VXZ

Refer to the table (1) given below for availability. Refer to page 17-3-65 for ordering a coil only.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Solenoid valve (Port size) Orifice symbol (Diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) Model VXK21 VXK22 VXK23 DC 01 (1/8) 02 (1/4) Port symbol (Port size) Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in fullwave rectifier type as a standard. 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (4) Bracket Part No.

E-P HYREG ® VY1 Series

Without sub-plate M5 D B 1 8 Without sub-plate Base mounted Symbol 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 (3) (3) A M5 3(R) 1 8 2(A) 1(P) (3) (3) 1 1 4 1 4 3 8 3 External pilot 1 2 Body ported 1 2 5 3 4 P1 1 1 VY1B0 (5) 7 1 1 4 1 4 1 1 2 1 3(R) 2(A) 1(P) 9 2 2 Note 3) Only bracket or foot may be mounted.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Universal type Port size in the cylinder side 6 8 12 10 4 (1) AS22 1FE-01 AS23 1FE-01 R 1/8 AS22 1FE-02 AS23 1FE-02 R 1/4 AS32 1FE-03 AS33 1FE-03 R 3/8 AS42 1FE-04 AS43 1FE-04 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.

AS

ASD Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS AS-FE 2 F A 1 AS 1 M5 06 0 E KE Body size 1 AS-FG F A 1 AS 2 01 06 2 0 S Body size 2/3/4 AS-FP AS-FM Body size Made to Order Refer to page 562 for details.

AS-FG

Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 678 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.

GD40-2-01

Provided with a protective cover to prevent hazards. T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

GD40-2-01

GD40-2-01 Model Compressed air 1 MPa 1.5 MPa 5 to 60C 1/8 0 to 0.2 MPa 0.006 MPa 40 300 AT Fluid Max. operating pressure Proof pressure Ambient and fluid temperature Port size Rc Scale range Accuracy Dial size Mass (g) IDF IDU IDFA IDFB Compact and lightweight Can be installed easily by merely providing a bypass circuit. Provided with a protective cover to prevent hazards.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

(N specifications) How to Order AS4200-04 AS3200-03 01 S AS 2 2 0 0 AS2200-02 AS2200-01 Option Body size AS1200-M5 None With seal Nil 1 2 3 4 M3, M5 standard S K N 1 8 1 4 , standard standard standard AS1400-M3 Hexagonal lock nut 8 3 Electroless nickel plated 2 1 If more than one option is required, write option part numbers in the order of S, K, N.

5

Low Speed (mm) Rail mounting Auto switch model MQ D-A7lH/A80H D-A73C/A80C D-F7l/J79 D-F7lW/J79W D-F7lV/F7lWV D-F79F D-J79C D-F7BA D-F7BAV D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV RHC D-A9m D-A9mV D-A7m D-A80 D-F7NT D-A79W RZQ A B A B A B A B A B A B Bore size 10 4.5 4.5 0.5 0.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 16 5 5 1 1 3.5 3.5 4 4 9 9 1 1 Adjust the auto switch after confirming the operating

Swivels

PS1690202-16-16 4.32 3.46 2.16 1.62 1-11 1/2 1-11 1/2 109.8 mm 87.9 mm 54.9 mm 41.3 mm NPTF NPTF 3 Piece Design D Swivels A B D Part Number A B C D Wrench Flats Dia.

1

Combination description Holder mounting bracket X416 1 2 1 1 1 1 1 1 1 X417 1 1 1 1 1 2 1 1 1 A, L, H, AS, LS, HS Nil W Z A L H AZ LZ HZ Nil W A L H MY1 B X168 Bore size Stroke Auto switch Suffix X416 on one side X416 on both sides X416 on one side, X417 on the other side X416 on A unit side X416 on L unit side X416 on H unit side X416 on A unit side, X417 on the other side X416 on L unit