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is properly adjusted. 100 0.54 2.90 = E Therefore, the rotary actuator rotation time is: Allowable kinetic energy Please refer to Table 3 for the Swing time adjustable range of each size.

Construction q t e r w IN Description No.

Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 Sequence 1: Servo ON instruction Sequence 2: Instruction to return to origin Sequence 3: Specify step data No. 0 to input the DRIVE

ROM E ROM6.5 E ROM OUT 0.0 0.0 (100ms) MODESHIFTSET DATA No.SET MODE No.

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 Series

16 59 63 End lock mechanism dimensions MGPL (ball bushing)/A, DB, E dimensions (mm) (mm) E A HN (Max.)

E E E E E E E KF flange F F F Fn n n n (KF) () Heater (option) Auto switch H H H H J J J J G G G G B B B B A A A A A A A A Model A B C D E Fn G H J K XLC-25 50 120 48 1 12 40 26 39 27.5 8 XLC-40 65 171 66 2 11 55 41 63 36 9 8 XL-OMO0001-A 5 Guaranteed period and range The warranty period is 2 million cycles (under SMC endurance test conditions), 18 months after delivery or 12 months in service

"A" part's center is straightly pushed in by tools, such as pliers. e-con is cannot be reused once crimped for connection. For the connection failure such as incorrect order of wire and incomplete insertion, please use the new e-con for sensor. -47No.EX-OMI0003-H Specifications Specifications Item Specification Model No.

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

This can be changed by the operation display panel. c) Function Command is assigned. d) Data Depending on the function, the address and the number of the register, the value of reading/writing are assigned. e) CRC CRC method.

Weightkg/ Top mounting Series LEG25M LEG32M LEG40M Strokemm 30 50 100 30 50 100 30 50 100 Product weightkg 2.9 3.1 3.6 5.3 5.7 7.1 6.4 7.0 8.5 Additional weight with lock/Coverkg 0.3 0.6 0.6 Weightkg/ In-line Series LEG25MD LEG32MD LEG40MD Strokemm 30 50 100 30 50 100 30 50 100 Product weightkg 2.8 3.0 3.5 5.0 5.5 6.9 6.2 6.7 8.2 0.3 0.6 0.6 Additional weight with lock/Coverkg -5- 1.3 Construction

e, axT01&5 I P[ot cotr asrmDty with oprator.

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

SY11 A 3 4 0.22 100 kPA to 0.6 100 kPA to 0 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.C. SY13(A): 15 SY14(A): 26 (14) SY13(A): 13 SY14(A): 24 (12) (1) SY12 3 4 100 kPA to 0 0.14 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Standard 0 to 0.7 N.O. (1) SY12 A 3 4 0.22 100 kPA to 0 100 kPA to 0.6 M3 x 0.5 M3 x 0.5 Large flow 0 to 0.7 N.O.

Model PSE30 Set (differential) pressure range 50 to 500 kPa 0.2 to 2 kPa 0.1 to 1 MPa 10 to 100 kPa 10 to 101 kPa 101 to 101 kPa Pressure range Note 1) For positive pressure For low pressure For vacuum For compound pressure For low difference pressure Rated (differential) pressure range 0 to 500 kPa 0 to 100 kPa 0 to 1 MPa 0 to 101 kPa 100 to 100 kPa 0 to 2 kPa 12 to 24 VDC, Ripple (p-p)