Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

10 14 14 22 22 23 23 30 30 42 42 U CX L Z + Stroke RR ZZ + Stroke Double clevis/(D) Port Cushion valve Double clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX +0.3 ZZ Z U RR L CD +0.1 CZ 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

Symbol -X80, -X81 Main Value Double Acting Type 1 A N 06 5 1 4 VP31 1 D Z X81 Body size CE marking Nil Q None CE-compliant 4 6 8 1/2 1 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 2 Port size (IN, OUT port) Thread type Symbol VP3145 VP3165 VP3185 Port size Nil F N T D/DO/DZ/DU only Rc G NPT NPTF 03 04 06 10 12 14 20 Type of actuation X80 X81 Double solenoid Single solenoid External pilot Passage, Type

LEC-OM02704CN

10 .2 10.1 .2 10.2 .3 10.3 CC-Link .3 10.4 .4 10.4.1 .4 10.4.2 .5 10.4.3 .14 10.5 .16 10 1 10 10 10.1 MR Configurator 1 LED LED CN6CN2CN3 1. 2.

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

2 Phase Stepper Motor/Without Motor Brake Series LXS

Positioning Time Guide (for Vertical Mount) For transfer load of 5kg For transfer load of 0kg Positioning time (sec) Positioning time (sec) 100 200 50 10 1 Positioning distance (mm) 100 150 50 10 1 Positioning distance (mm) 10 10 10 20 5 1 0.1 10.1 15.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 40 40 2.6 5.1 1.3 0.3 0.1 2.6 3.8 1.3 0.3 0.1 80 80 1.3 2.6 0.7 0.2 0.1 1.3 1.9 0.7 0.2 0.1 For transfer

SMC Pneumatic Clean Series

6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

SMC

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

SMC Pneumatic Clean Series

: 10 or more The mean q Non-unidirectional airflow: at least two locations NL = A x 64/(10M) 0.5 q Number of sampling locations: 2 to 9 95% UCL of the mean and the mean of the averages w Number of sampling locations: 1, or 10 or more The mean Derive it from the area of the cleanroom or clean air controlled space.

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

PF2A/PF2W

535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

IZT40/41/42

40 42 40 41 42 40 41 IZT40 IZT41 IZT42 Standard, AC type D 1 6H R F IZTB 40 16 Bar w q e r t y u i y Plug position q Model t One-touch fitting Symbol Model 40 Standard, AC type 42 Dual AC type Symbol Metric size 4H 4 Straight 6H 6 Straight 8H 8 Straight AH 10 Straight 4L 4 Elbow 6L 6 Elbow 8L 8 Elbow AL 10 Elbow Symbol Position Nil Without plug Q High-voltage cable side R Opposite side of

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

rep-modular-e

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

R2 port) 17.5 14 28 L plug connector (L): SYJ3 40-L-M5 M plug connector (M): SYJ3 40-M-M5 M8 connector (WO): SYJ3 40(R)-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5 [115.9] R1 P R2 R1 P R2 R1 P R2 91.9 [96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6 [39.8] 47.4 [49.6] 39.1