Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) 2-M4 x 0.7 depth 7 Main port Rc Model VND10D-6A VND10D-8A VND10D-10A 1 8 1 4 3 8 Port size 10A, 15A, 20A, 25A G (Valve open) Pilot port Indicator (Option) (Back side P2) Bracket (Option) Main port Main port Rc A B C D E F G M N P Q R S T U Model 3 8 1 2 3 4 1
8-16UNC ZHPmmmG-mmS 12.7 41.7 5/16-18UNC depth 11 ZHPmmmH-mmS 14.28 44.1 3/8-16UNC depth 11 EXH.
3 4 4 3 3 Refer to the table below for applicable auto switch part numbers.
F9NV F9PV F9BV F9NWV F9PWV F9BWV A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F Yes 100 V Relay PLC 2-wire 12 V 24 V Connector Grommet Diagnostic indication (2-color display) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Solid state switch Connector 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Diagnostic
Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 44
Contact P/A regarding the valves 3 to 5.
Note 3) Please contact SMC if the maximum manufacturable stroke is exceeded.
This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD
50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2
Male thread LDZB5L 196N 33mm/s LDZB5M 40,100,200 117N 100mm/s LDZB5H 72N 200mm/s Model Max. thrust Max. speed Lead screw Motor Stroke (mm) Mounting bracket Rod end thread Cover Auto switch Slide screw 8 Lead 2 25,40,100,200 LDZC3L 80N 33mm/s Slide screw 8 Lead 6 Slide screw 8 Lead 12 Slide screw 12 Lead 2 Slide screw 12 Lead 6 Slide screw 12 Lead 12 LDZC3M 43N 100mm/s LDZC3H 24N 200mm/s
O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350
8 B 3 8 B 1 2 Thermometer for outlet air temp.
3 !4 !5 Seal kit includes !3, !4, !5. Order the seal kit, based on each bore size. Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed. Grease pack part no.: GR-S-010 (10 g) Piston seal 2 Set of left nos. !3, !4, !5. Rod seal NBR 1 Gasket 1 61
CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS 20 25 32 40 CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS NBR Piston seal !8 Disassembly/Replacement Caution Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 1. Do not replace the bushings. The bushings are press-fit.
/8 3 3-1/4 3-1/2 3-3/4 4 4-1/2 5 5-1/2 6 1/4-20UNC -2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-1/2 3-3/4 4 4-1/4 4-3/4 5-1/4 5-3/4 6-1/4 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 1-3/4 1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-3/4 3 3-1/4 3-1/2 4 4-1/2 5 5-1/2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3-1/8 3-3/8 3-5/8 3-7/8 4-3/8 4-7/8 5-3/8 5-7/8 2-1/8 2-1/4 2-3/8 2
/PL / OSSD SIL 2 2 2 3 3 3 3 3 SIL CL 2 2 2 3 3 3 3 3 * 2 2 4 3 4 ** 4 3 Cat. 3 PL d d d e d e e d *:Cat. 3 EN13849-2 2 N.O. **:Cat. 18 No.EX##-OMY0006CN 3.3.8. SI 0 SI 0 A SI 1. 2.I/O 3.SI 4. 5. 10 0 I/O 0 "0"= SI 72 72 SI 72 SI SI 16 SI SI SI SI 0 16 19 No.EX##-OMY0006CN SI SI SI 16 SI SI 20 D 3.3.9. GSDMLFDCML 3.4.
Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed
Note 3) Through-hole in case of 5 to 15 mm stroke.
m Air/Non-corrosive gas Fluid 11 ON: When red LED turns on Indication light Piping specifications Temperature characteristics R06 6 reducer 3% F .S. or less Switch Specifications 1% F .S. or less Repeatability 0.4 4% F .S.
Controlled flow (Free flow) Effective area (mm2) Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-84 11 Dual Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting How to Order ASD 3 3 0 F 0106 S D Body size Type adjustable by a flat head screwdriver 2 3 4 5 6 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard With seal Note) In case that connecting