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1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

https://www.smcpneumatics.com/pdfs/xgt.pdf

In-line Air Filter

0 20 40 60 80 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74/7D 6, 1/4" ZFC75/7E 8, 5/16" ZFC76/7F 10, 3/8" 0.3 MPa 0.3 MPa 0.3 MPa 30 30 30 Pressure drop [kPa] Pressure drop [kPa] Pressure drop [kPa] 0.1 MPa 0.1 MPa 0.1 MPa 20 20 20 0.5 MPa 0.5 MPa 0.5 MPa 0.7 MPa 0.7 MPa 10 10 10 0.7 MPa 0 0 50 100 150 250 200 0 0 0 100 200 300 400 500 0 200 400 600 Flow

https://www.smcpneumatics.com/pdfs/zfc.pdf

ZP

50 0 to 100 X X X X Conductive NBR 50 10 to 200 X X X X X Conductive silicon rubber The above table covers only general characteristics of subject rubber materials.

https://www.smcpneumatics.com/pdfs/zpzp2zp3adaptercuplateralonetouch.pdf

HAA

VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source IDG 90 130 0.4 0.45 1.44 1.4 50 60 0.4 0.35 55 65 0.8 0.9 38 46 132 x 2 170 x 2 0.23 0.26 50 Hz 60 Hz 50 Hz 60 Hz AMG Power consumption (W) Compact size and lightweight Uses minimal floor space Built-in

https://www.smcpneumatics.com/pdfs/HAA.pdf

Air Cooled Aftercooler Series HAA 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 to 50 Indoor Three phases 200 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Single phase 200 VAC (50/60 Hz) Single phase 100 VAC (50/60 Hz) Three phases 200 VAC (50/60 Hz) Power source 90 130 0.4 0.45 1.44 1.4 50 60

https://www.smcpneumatics.com/pdfs/smc/70aphaa.pdf

Table of Contents

Series MSQ Rotary Table Rack & Pinion Style Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 . Features. Model Selection . Series MSQ Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Size: 1, 2, 3, 7. How to Order . Specifications. Construction. Dimensions . Series MSQ Rotary Table: Basic Type/High Precision Type Rack & Pinion Style Size: 10, 20, 30, 50, 70, 100, 200.

https://www.smcpneumatics.com/pdfs/smc/70arrotary.pdf

SMC LEY40DC-100-R36P3D actuator, electric, ELECTRIC ACTUATOR

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, .00000 lb

https://www.smcpneumatics.com/LEY40DC-100-R36P3D.html

SMC LEY40DC-50-S56P1D actuator, electric, ELECTRIC ACTUATOR

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, PC, 63MM LE ELECTRIC ACTUATOR, .00000 lb

https://www.smcpneumatics.com/LEY40DC-50-S56P1D.html

SMC LEY40DC-50MU-S11P1 actuator, electric, ELECTRIC ACTUATOR

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, ACTUATOR, ELECTRIC, ACTUATOR, ELECTRIC ACTUATOR, MC, 40MM LE ELECTRIC ACTUATOR, .00000 lb

https://www.smcpneumatics.com/LEY40DC-50MU-S11P1.html

SMC LEY40DC-100B mc, Auth/Grp: A/60

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, MC, ACTUATOR, Auth/Grp: A/60, 869, ELECTRIC ACTUATOR

https://www.smcpneumatics.com/LEY40DC-100B.html

SMC LEY40DC-150U-S56P5 actuator, electric, ELECTRIC ACTUATOR