sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

ZP OTHER SIZE RATING. .01494 lb. 1L.

SS5Y3 OTHER SIZE RATING. 1.08748 lb. 1L.

ZP OTHER SIZE RATING. .02004 lb. 1L.

ZP OTHER SIZE RATING. .01902 lb. 1L.

ZP OTHER SIZE RATING. .05511 lb. 1L.

ZP OTHER SIZE RATING. .27557 lb. 1L.

ZP OTHER SIZE RATING. .01141 lb. 1L.

ZP OTHER SIZE RATING. .03390 lb. 1L.

ZP OTHER SIZE RATING. .08177 lb. 1L.

ZP OTHER SIZE RATING. .06977 lb. 1L.

SMC Basic Pneumatics

Ap.1l;;-v s ' . ' \ t n ! + e Where Cv, kv =Coefficients ol flow and S =Equivalent Flow Section in mm2 Q = Flow rate standard liters/min p2 = Outlet pressure needed lo move load (bar) Ap or EAp = Permissible pressure drop (bar) 0 = Air temperature in *C With this, the dimension of 'a" O * To lind the llow capacily, these formulae are transtormed as follows: v C v = 4 0 0 .

Mechanical Valves Series NVM, NVFM, NVZNI

2.1 Ko) P.T, 0.17 in. (4.4 mm) TJ 0.08 in. i2 0 mm) 0.25 in (6.4 mm) '75 PSIG (5 Kgt/cm2) '75 PSIG (5 Kgf/cm2) @ll -=hl'o Panel Mounting A B c E F u H J K M N o 6 1 9 1 5 7 r ) 532 135 1 1 5 7 t40) o87 t22l 0 0 6 {t 5I o 1 2 {31 0 8 0 20 4\ 1 5 7 (40) 0 9 6 1 2 6 (32) 1 4 2 (36) 1 2 0 (6) A B o E F H J K M N o 6 0 1 152 6l 5,32 1 3 5 ' t 1 5 7 a40l 0 6 9 1 7 5 006 {1 5l o 1 2 f3l 0 8 0 20 1l

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

LX Series Compact Electric Actuators

Acaution 3:"l"1l"Jl'ffi':':::fflffi:*' "" the max tishrenins depth to How To Operate The LXF The standard LXF series actuator uses a s-phase uni-polar DC stepper motor, (0.74lo). The motor requires a driver to move lhe molor based on the input commands. The LXF can be operated with either the LC6D-5O7AD basic stepper driver or other compatible driver.

3 Port Solenoid Valve Series SYJ300/500/700

Electrical entry G H L LN LO M MN MO W0 Grommet, 300 mm lead wire Grommet, 600 mm lead wire With lead wire Without lead wire Without connector With lead wire Without lead wire Without connector Without connector cable V100-49-1L plug connector Cable length 1 2 3 4 7 300 mm 500 mm 1000 mm 2000 mm 5000 mm M plug connector M8 connector 4 For connector cable of M8 connector, refer to page 67.

Clean Room Regulator/Fluoro Resin Type Series SRF30

Refer to P/A's "High Purity Fluoropolymer Fitting & Tubings" ES70-17 catalogue for more details. 1 Series SRF30 Specifications Pressure Characteristics Proof pressure Maximum operating pressure Regulating pressure range Maximum pilot pressure Ambient and fluid temperature 1.0MPa Inlet pressure 0.3MPa Outlet pressure 0.1MPa Set pressure Flow rate 1l/min Fluid water 0.5MPa 0.12 0.02 to 0.4MPa

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) ARBQ5000-00-P (PA) ARBQ5000-00-P (PB) 0.7 0.7 0.6 0.6 Downstream pressure MPa Downstream pressure MPa 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 2500 2000 1500 1000 500 3000 0 0 2500 2000 1500 1000 500 3000 Flow rate l/min (ANR) Flow rate l/min (ANR) Note: 1MPa = 145psi 1l