Compact Rotary Actuator

E x t e r n a l s t o p p e r I n s t a l l p o s i t i o n o f e x t e r n a l s t o p p e r C auti on on usi ng exte rnal stoppe r R o t a r y a c t u a t o r w i t h A u t o s w i t c h A u t o s w i t c h s p e c i f i c a t i o n A u t o s w i t c h i n s t a l l a t i o n A u t o s w i t c h s e t p o s i t i o n I n t e r n a l s t r u c t u r e a n d o p e r a t i o n

Process Pump

From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 10 L/min (ANR). Air consumption (L/min [ANR]) SUP = 0.7 MPa 40 35 30 SUP = 0.5 MPa 25 20 SUP = 0.35 MPa Caution 15 SUP = 0.2 MPa 10 1.

Micro-Mist Separator with Prefilter Series AMH

L ~ ::;; '" O.06I---+--+---+---:>I"--+-::-::c:-::!-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..-f'''---c-l---l-l ~ /~/ VI Q) a. 0.3MPa_0.5MPs_ ~ 80021-W'--+---+---+0.3MP.~-1__1 ~ Max.fIowline ---o.7MPa 8 0.02 Max.fIow line ~~_-0.5M!,a -I _:---..

CP95

F, G, C and D [First angle projection] Mounting style (L) XA + Stroke SA + Stroke Mounting style (F, G) Head side mounting (G) ZF + Stroke Rod side mounting (F) Mounting style (C) Mounting style (D) XD + Stroke Bore size (mm) E1 R W MF ZF FB CD EB L XD UB CB EW MR TR AO AT XA SA AH AB TF UF E2 32 32 16 10 130 10 12 142 26 48 7 65 45 26 32 10 4.5 144 142 32 9.5 7 64 79 50 40 36 20 10 145

CP95

9 @0 @1 @2 @3 @4 No. q w e r t y u i o !0 !1 !2 !3 Steel wire Chrome-molybdenum steel Steel Resin Urethan rubber NBR NBR NBR NBR NBR Rod cover Head cover Cylinder tube Piston rod Piston Cushion ring A Cushion ring B Bushing Cushion valve Snap ring Tie-rod Tie-rod nut Piston nut Replacement Parts: Seal Kit Bore size (mm) Kit no.

ML1

CE2 ML2B ML1C Mounting Position (Stroke End)/Reed Switch Mounting Position (Stroke End)/Solid State Switch D-E73A (L), D-E76A (L), D-E80A (L) D-M5B (L), D-M5N (L), D-M5P (L) D-M5BW (L), D-M5NW (L), D-M5PW (L) D-M5NTL, D-M5PTL REA REC RHC MTS CC Lead wire clamp/Lead wire cap (option) Series Lead wire clamp Lead wire cap ML1C LC-01 LP-01 Unit: mm Lead wire clamp/Lead wire cap (option) 25 32

VCA

= 300 S U V Y (X) 25 l = 280 U side D side Stations 1 2 3 4 5 n For manual override J2 Manual override W T R N Z M 16 1 1 L 2 2 2 2 P = K (pitch) n-3/8, 1/2 (VCA30) n-1/2, 3/4 (VCA40) OUT port J1 J3 2-1/2 (VCA30), 3/4 (VCA40) IN port (front ported) L dimensions (mm) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side

Ionizer Nozzle type IZN10 Series IZS

With L-bracket B1 With pivoting bracket B2 With DIN rail mounting bracket B3 Output specification Refer to page 450.

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Manifold Specifications

1/8 Grommet (G), (H) (Pitch) (Mounting hole) 6-Rc 1/4 (1(P), 3/5(R) port) PE port G: 300 mm H: 600 mm Manual override (Non-locking) (Lead wire length) (mm) Stations 2 3 66 46 85 65 20 408 388 L1 L2 4 104 84 5 123 103 6 142 122 7 161 141 8 180 160 9 199 179 10 218 198 11 237 217 12 256 236 13 275 255 14 294 274 15 313 293 16 332 312 17 351 331 18 370 350 19 389 369 L plug connector (L) DIN

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1

Card Motor

) (80) L 5 m Wiring Diagram Terminal no.

EXxx-OMO0027

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. L/A IN and L/A OUT LEDs are OFF.

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

F/ISE

Panel mount E Lead wire length 3m L Panel mount + Front protection cover Analog output Suitable model: ZSE50F/ISE50--22/62(L)-(M) F Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) 5 5 1 1 Unit specification 1.0MPa 0 100kPa 100kPa Note 1) With unit switching function Nil M Note 2) Fixed SI unit Pressure Pressure Note 1) Under the New Measurement Law, which has been

ZSE F/ISE

Panel mount E Lead wire length 3 m L Panel mount + Front protection cover F Analog Output Suitable model: ZSE50F/ISE50--22/62(L)-(M) Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) Unit specification 5 5 Note 1) Nil M With unit switching function Note 2) Fixed SI unit 1 1 Note 1) Under the New Measurement Law, which has been in effect since October, 1999, sales

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Panel mount E Lead wire length 3m L Panel mount + Front protection cover Analog output Suitable model: ZSE50F/ISE50--22/62(L)-(M) F Series ISE50 Series ZSE50F Analog output value (V) Analog output value (V) 5 5 1 1 Unit specification 1.0MPa 0 100kPa 100kPa Note 1) Nil M With unit switching function Note 2) Fixed SI unit Pressure Pressure Note 1) Under the New Measurement Law, which has been

Filter Regulator IW Series

min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 1301 Pressure Characteristics

Fieldbus system EtherNet/IP TM compatible SI Unit

(When L/A IN LED is OFF.) (2)Check that the connectors of L/A IN and L/A OUT communication cables are connected and there are no broken wires. (3)Keep noise sources away from the communication cable. L/A IN and L/A OUT LEDs are OFF. LINK has not yet been established. 11 : The L/A OUT LED will be OFF if the BUS OUT connector is not used.