Series

For manifold type 31, S31, 32, S32 5 port (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 Electrical entry 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC E: Push-turn locking lever type Grommet L plug connector M plug connector M8 connector WO: Without connector cable M: With lead wire (

SYJ300

External pilot type is not available. 1 SYJ3 2 5 M M3 Body ported SYJ3 4 5 M 1 Base mounted Port size 3 port Nil: Without sub-plate M5: M5 port With sub-plate Coil specifications Nil Standard With power saving circuit (24, 12 VDC only) T Power saving circuit is not available in the case of W type.

10

Bore size [mm] Dd9 L l m d Part no.

Clean Gas Filter

(Filtration 0.01 m (Filtering efficiency 99.99%)) Made into a cartridge by fluoropolymer holder and fluororubber (FKM) gasket. Description Aluminum case (Refer to page 312.) X8 Symbol Nil Model type Symbol Type 10 Cartridge Elements are replaceable. Port size Port size Rc, NPT, TSJ, UOJ Female thread 1/4 M5 02 M5 Symbol Connection Bracket is included as a standard.

53

20 s Max.

CC

S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57

MB

Lead wire length symbols: 0.5 m Nil (Example) A54 3 m L (Example) A54L 5 m Z (Example) A54Z Besides the above models, there are some other auto switches that are applicable.

HEC_W-E

This item is applicable U n i t N u m b e r M O D E < 0 only when multiple units are used. 2. Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.

HRX-OM-W002

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

AS-FPQ/AS-FPG

2 Speed Controller for Clean Room Series AS-FPQ/FPG Construction Meter-out type M5 type Meter-in type M5 type Parts list No.

ZSE3/ISE3

258-9200-www.stevenengineering.com ZSP ISA2 IS ZSM PF2 IF Connector type Grommet type Heat-resistant vinyl electric wire 1.55 0.31 mm2 4-wire Oil-resistant vinyl cabtire code -21, -23: 3.5 0.14 mm2 4 cores -22, -24: 3.5 0.15 mm2 5 cores Lead wire Data Weight 40 g (including 0.6 m-long lead wire) R 1/8, M5 x 0.8, NPTF 1/8, M5 x 0.8 Port size R 1/8, M5 x 0.8 NPTF 1/8, M5 x 0.8 ZX ejector mounted

HRX-OM-X084

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

Digital Flow Switch

30 s, 40 s, 50 s, or 60 s.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

HRX-OM-X071

Altitude [m] 1. Max. ambient 2. Cooling capacity temp.

XL-OMY0002

S 6-2. XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.

Series AP3100

S H Surface finish Seat material Surface finish Ra max 15 in. (0.4 m) Standard 10 in. (0.25 m) 7 in. (0.18 m) 5 in. (0.13 m) Code Code Material PCTFE (Standard) Vespel 2) Face to face dimension 1) No code M V X No code VS Dimension 2.12 inch (53.8 mm) Standard 1.75 inch (44.5mm) Code No code 1.75 2) Not available with H material. 1) Only applies to S material with TW4 connections.

End Lock Cylinder Series CBJ2

6 15 8 0 -0.3 18.3 9.5 21 28 55.5 + Stroke 83.5 + Stroke With rear end lock / CBJ2B16-HN 0 h8-0.022 10 6 2-M10 x 1 Piping port 2-M5 x 0.8 8 M5 x 0.8 20 19.8 5 0 -0.3 18.3 12.5 15 8 12.5 50 + Stroke 8 28 86 + Stroke 3 Series CBJ2 Dimensions Flange With front end lock / CBJ2F16-RN 14.5 M10 x 1 Cover side (rear side) Piping port 2-M5 x 0.8 5 6 20 M5 x 0.8 20.3 19 20 2-5.5 Mounting hole 2.3

Booster Regulator/Air Tank

VBAT10A1 S Note) A safety valve port is provided only when option R or S is selected.

Clean Exhaust Filter

(Initial conditions) 200 0.05 32 SFE1 SFE3 Inlet pressure/Back pressure [MPa] 150 SFE5 0.04 25 100 SFE4 SFE7 95 20 0.03 50 10 0 0.02 0 100 200 300 400 500 600 700 800 Cylinder driving speed [mm/s] AN 0.01 AMC Example) Bore size: 32, Driving speed: 400 mm/s, Supply pressure: 0.5 MPaG 1. From the graph, exhaust flow rate is found to be 95 L/min (ANR). 2.