Auto Switch Guide

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

Auto Switch Guide

Conformed standard JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 Cable length Connector model Impact resistance 300 m/s2 S M L A B D 0.5 m 1.0 m 3.0 m M83 pin M84 pin M124 pin Enclosure IP-67 (IEC529 standard) Insulation resistance 100 M or more at 500 M VDC Note) Type D is available for the D-P5DW type only. Note) L is available for the D-P5DW type only.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

MHZ

MHC Axial Ported (with M5 Port) [M] MHT (mm) Auto switch mounting groove (4 locations) (Except 10) A B D2 E D1 Model MHY M5 x 0.8 Piping port S C S C S C S C 0.016 0.043 MHZ2-10 M 12f8 15 11 52.8 7 MHW MHZ2-16 M 0.016 0.043 16f8 20 15 58.7 10 End boss assembly MHZ2-20 M 0.020 0.053 20f8 22 19 70.5 12 MRHQ D2 0.020 0.053 MHZ2-25 M 25f8 25 24 82.9 15 Misc.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

2 m, 3 m, 5 m, 10 m 5 m Cable O.D. 6.4 mm 6.5 mm Applicable cable1 4.0 to 8.0 mm Conductor nominal cross section 0.14 mm2/AWG26 0.34 mm2/AWG22 0.14 to 0.34 mm2/AWG26 to 22 Wire O.D. 0.5 mm 1.55 mm Connection type QUICKON connection Wiring Rated current 1 A 4 A 1.75 A Rated voltage 100 V 48 VAC/60 VDC 60 V Contact resistance 10 m or less Insulation resistance 100 M or more Withstand voltage

0.4

One-touch fitting Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n

NCM

K L M B A C (inch) Part no.

Electric Actuator

to 120 200 to 230 100 to 120 200 to 230 100 to 120 200 to 230 A 10 m 5: The motor and encoder cables are included.

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

Table of Contents

6.5 10 8 13.5 6 14 17 22 16 24 43 45 39 80 62 80 H M 14 8 18.5 14 42 A 17 L 54.3 47.3 49.3 60.5 54.5 17 10 24 21 22 19 22 12 34 22 Connection thread Reference dimensions of R thread after installation.

NCQ8

NCDQ8A(B)Z-(C)(M) (in) NCDQ8A(B)Z-T(M) (025st to 100st) (in) D-A9, D-A9V D-M9(V), D-M9W(V) D-A9, D-A9V D-M9(V), D-M9W(V) D-F9BAL D-F9BAL Bore size Bore size A B HS A B HS A B HS A B HS A B HS A B HS 056 075 106 150 200 250 300 400 056 075 106 150 200 250 0.24 0.14 0.33 0.31 0.2 0.35 0.37 0.49 0.04 0.08 0.12 0.12 0.2 0.28 0.34 0.53 0.71 0.81 0.96 1.18 1.45 1.6 1.94 2.44 0.39 0.3 0.49 0.47

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

pulses) 10[V] 10[V] 10[pulse] 10[pulse] 0 0 10[pulse] 10[pulse] -10[V] -10[V] CW direction CW direction CCW direction CCW direction A Feedback position (Note 1,2) ( 10V/1 Mpulses) B Feedback position (Note 1,2) ( 10V/10 Mpulses) 10[V] 10[V] 1M[pulse] 10M[pulse] 0 0 1M[pulse] 10M[pulse] -10[V] -10[V] CW direction CW direction CCW direction C Feedback position (Note 1,2) ( 10V/100 Mpulses)

Vacuum System Peripherals:

, Built-in silencer 24 VDC 12 VDC Nil 12V Total number of ejector/valve stations Made to order 02 2 stations A, B port size (Valve only) SUP/EXH block assembly mounting position Double wiring specifications 10 stations ... ... 6 One-touch fitting C4 C6 Mixed M U D side D B Special specifications M 4 One-touch fitting U side 2 to 10 stations 10 Courtesy of Steven Engineering, Inc.-230 Ryan

KR

(mm) Model Applicable tubing M Weight (g) Applicable fitting size d Note) L A D KRR06-08 8 39.5 37 2.5 6 12.8 17 18.5 10.4 5.6 KRR06-10 10 4.0 9.3 KRR08-10 10 18.5 42 20 23 15.2 41 18.5 26.1 18.0 8 KRR08-12 12 4.6 33 KRR10-12 10 12 18.5 44.5 21 41.5 32.8 Applicable fitting size d Note) D: Max. diameter K Bulkhead Union: KRE M Effective area (mm 2) FR soft nylon FR double layer Applicable

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Without shims 10 mm 10 mm 10 mm 10 mm Model With shims 10 to 13 mm 10 to 13 mm 10 to 13 mm 10 to 13 mm CKQG CLKQG CKQP CLKQP Workpieces to be clamped should not be thicker than those shown in the table. 5. Clamp only the flat side of a workpiece. 6.

A

NPT A mm B mm C mm S Y M B O L S NAMF150-N02 14" 139 63 10 NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D

Rotary Actuator/Vane Style Series CRB2

Applicable shaft type: W CRQ2 MSQ (mm) MSZ Q2 Y L2 max Size (mm) Q1=M Q2=M CRQ2X MSQX 10 X Q1 L1 max Size M 4 7 to 8 Y-3 Y= 10 15 9 to 14 M4 X-5 M 5 8.5 to 9 Y-3.5 L2= L1= MRQ 15 20 M5 11 to 18 X-6 M 6 10 Y-4 X= 20 30 M6 13 to 20 X-7 M 8 13 Y-5 30 40 M8 16 to 22 X-8 M10 15 Y-6 Symbol: A5 Symbol: A6 The long shaft can be further shortened by machining it into a stepped round shaft.

Series AP500

psig (69MPa) 40 to 160F (40 to 71 C) (No freezing)1) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 3) Ra max 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld NPT 1/8 inch 4) 0.41 psig (0.0028 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel mount) 0.51 in3 (8.4 cm3) 2.8lbs (

Low Friction Cylinders Series MQ

10, 16, 20 25, 30, 40 CX MQ 2 x FD 4 x FD (mm) RHC Bore size (mm) Stroke range (mm) A L M FV FV RZQ 10 10 to 40 45 8 B + Stroke L FT FX FZ FX FZ 16 10 to 60 52 10 A + Stroke 20 10 to 60 55.5 10 25 10 to 50,75,100 62 12 D30 10 to 50,75,100 68.5 12 40 10 to 50,75,100 70 12 -X (Dimensions other than A and L are the same as the rod side flange type.)

Compact Guide Cylinder

mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less Load mass m [kg] Load mass m [kg] 10 10 5 5 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 17 Model Selection MGPK Series L L Plate Material Carbon Steel /MGPKL Horizontal Mounting m m MGPKL16