Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1

Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1

Pad Shape: [Other Shape] Flat Type, Pad Type: Ribbed, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Urethane Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1

Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1

Pad Shape: [Other Shape] Flat Type, Pad Type: Standard, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Silicone Rubber] Silicone Rubber, Environment: Standard, Vacuum Outlet Port: Female Thread, Pad diameter(ø): 50, Vacuum entry port thread diameter: M6 × 1

Adapter Material: Brass, Standard, Vacuum Inlet Direction: Vertical, Pad Diameter: ø13, Pad Styles: Flat Style, Material: Urethane Rubber, Vacuum Entry: Female Thread M6X1

Adapter Material: Brass, Standard, Vacuum Inlet Direction: Vertical, Pad Diameter: ø50, Pad Styles: Flat Style, Material: Fluoro Rubber, Vacuum Entry: Female Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø10, Pad Styles: Flat w/Ribs, Material: NBR, Vacuum Entry: Female Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø20, Pad Styles: Flat w/Ribs, Material: NBR, Vacuum Entry: Female Thread M6X1

Adapter Material: Stainless Steel, Vacuum Inlet Direction: Vertical, Pad Diameter: ø40, Pad Styles: Flat w/Ribs, Material: NBR, Vacuum Entry: Female Thread M6X1

Electric actuator/Integrated controller, ELECTRIC ACTUATOR, A06, 3.92000 lb

AZ1000

When the source pressure is 1700 psig (11.7 MPa), achievable delivery pressure is around 125 psig (0.86 MPa ) (HF and FC option 120 psig (0.83 MPa)). 2) 250 psig outlet pressure preset at 800 psig (5.5MPa) inlet pressure. Custom inlet/outlet pressure settings available.

Air-hydro Unit

For details on how the models are indicated, refer to How to Order. 315 or more 50 200 or more 63 CCT63 120 or more 80 75 or more 100 1164 Air-hydro Unit CC Series Data (A) Volume of Cylinder/Capacity of Converter 160 140 125 100 800 700 600 300 250 200 180 10,000 8,000 500 400 80 6,000 5,000 4,000 300 600 500 63 3,000 200 400 50 2,000 300 40 Effective oil level stroke (mm) 500 200 1,000

CJ5-S

RS Q G RS H A Relation of Liquid Entry and Sliding Distance Amount of liquid entry (g) x 15 RZQ 10 Standard cylinder MI W S Stainless steel cylinder 5 CEP1 0 50 100 150 200 Sliding distance (km) 250 300 CE1 Conditions Working fluid Air Pressure 0.5 MPa Liquid Water-soluble coolant Piston speed 200 mm/sec (60 cpm) CE2 ML2B Special scraper C J G5-S Exterior configuration reduces residual

39

Relation between clamp arm length and maximum clamping force The length of the clamp arm L should be the length given below or less. operating pressure 0.5 MPa 5000 Arm length L Model 4000 Clamping force (N) CKZ3N50 CKZ3T50 CKZ3N63 CKZ3T63 150 mm 63 3000 300 mm 2000 50 1000 0 350 300 250 200 150 100 50 0 Arm length L (mm) Series CKZ3N Allowable load for clamp arm end Refer to the graph on

Power Clamp Cylinder

Recommended shim thickness) Arm length L: 8 in 0.08 0.04 0.12 For Asia For North America For Europe For France Special 800 Clamping force (lbf) 0.7 MPa 600 0.5 MPa 0.3 MPa 400 200 0 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 Shim thickness (in) 80 Arm length L: 250 mm 7000 6000 5000 4000 3000 2000 1000 0 Clamping force (N) 0.7MPa 0.5 MPa 0.3 MPa 0 1 2 2.5 3.5 3 4 5 6 7 8 9 Shim thickness (mm) (Ex.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-REA63 63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Possible to transfer a workpiece at low-speed.

350 200 300 40 30 20 10 0 30 25 20 15 10 5 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 100 100 50 40 30 20 10 0 100 80 60 40 20 0 Load (N) Load (N) 336 MSQX Series Low-Speed Rotary Table Rack & Pinion Type Construction CRB2 CRB1 MSU CRJ CRA1 o i @5 @6 t y !

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30