Stations: 08 (8 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Stations: 07 (7 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 40 (5 to 40 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 40 (5 to 40 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 10 (10 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Stations: 06 (6 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 04 (4 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 40 (5 to 40 L/min), Supply/Return Port Size: 06 (3/4)

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: W (w/Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 40 (5 to 40 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Stations: 03 (3 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 04 (0.5 to 4 L/min), Supply/Return Port Size: 03 (3/8)

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

VH Series, 4 Way Hand Valve

N 3 4 2 1 VH422-N02 to N06 VH432-N02 to N06 2 (Position) Flow direction 2 Flow direction 4 Flow direction 2 Flow direction 4 90 45 45 3/4" 185(10.2) 1 2 21.34 (9.7) VH6 VH600-N06,N10 3 (Closed center) 3/4", 1" 1" 194(10.5) 3 4 2 How To Order Series VH How to Order VH 2 0 1 02 N Options Hand valve R In/Out Reverse Valve model (Cv) Port size (NPT) 2 3 4 6 (0.4) (1.1) (3.2) (10.5) 02 03 04

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: Rc, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 04 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Exhaust Cleaner Mounting Direction: -

IDX-OM-Y002

IDF60/70/80/90 Series 5.2 Regular maintenance 5-7 IDX-OM-Y002 Chapter 5 Checks, Maintenance and Adjustment (D) Replacement of the main valve (discharge valve) Purchase the replacement kit of the main valve and replace it referring to the attached Replacement Procedure. Replacement requires a specific tool.

IDX-OM-W014

A B P G [AC200V] C F J M K L N H 4x13 [AC100V] [AC200V] 10 (:1.9m) (17) :0.8m mm A B C D E F G H J K L M N P Q IDU3E Rc3/8 440 498 285 2751 15 455 IDU4E Rc1/2 13 483 31 568 470 270 3001 80 2402 15 32 230 802 355 422 IDU6E Rc3/4 15 485 IDU Series 6-3 6 3 IDX-OM-W014 6 6-4 IDU3E4E AC100/100,110 (50/60Hz) CM 1 2 ILS FM PTC OLR PC 1 PTC PTC ILS CM AC200/200 (50/60Hz) AC230V (

IDX-OM-W023

Q Guige Guige G C Guige Guige [AC200V] [AC200V] Guige Guige F 10 (10) (820) J H K P L N M 4x13 [AC200V] 17) [AC200V] [AC100V] [AC100V] Guige 17 Guige mm A B C D E F G H J K L M N P Q 859 IDU8E Rc3/4 270 485 31 902 365 1302 230 42 3002 80 3001 328 15 IDU11E Rc3/4 909 14 IDU15E1 Rc1 300 620 960 79 54 425 93 258 43 330 66 470 358 16 IDU Series 6-3 6 4 IDX-OM-W023 6 6-4 IDU8E