Vacuum System Peripherals:

Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor output Thread type Port size Option 60 2 1/4 0 Without (In the case of preset input) Analog output 1 to 5 VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20 mA DC 70 Nil Rc NPT NPTF G 1 80 N 2 T 90 3 50 100 150

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

0.5 MPa Max. oparating pressure 7.2mm2 (Cv0.4/3) C6 C10 14.4mm2(Cv0.8/4.3) Effective area (Cv/Effective orifice) 9mm2 (Cv0.5/3.4) C8 C12 17.5 mm2(Cv1/4.8) 13.8 6 Body orifice Valve Solenoid Response time (1) 20ms or less 5ms or less 30cps 100cps Max.oparating frequency (2) 10 to 50 C Ambient and fluid temperature VQ20 Not required Lubrication Locking style (Slotted) (3) Manual override 150

VCA

2.0 Body material Al Valve specifications Coil specifications Seal material HNBR Ambient temperature C 20 to 60 Fluid temperature C 10 to 60 (with no freezing) Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage cm/ min (ANR) 0.2 or less Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150

Series VCS

Seal material PTFE (FKM) Ambient temperature 20 to 100C (-4 to 212F) 184C (363F) or less (PTFE), 120C (248F) or less (FKM) Note 1) Fluid temperature Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage cm/ min 300 (PTFE), 0.1 (FKM) with air Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150

VCW

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

VQ

pressure 0.28mm2 (Cv 0.016) 0.14mm2 (Cv 0.008) 1 2 SY Effective area 2 3 0.36mm2 (Cv 0.02 ) 0.20mm2 (Cv 0.011) Response time (1) ON: 3.5ms, OFF: 2ms ON: 3.5ms, OFF: 2.5ms SYJ Valve Solenoid Valve Solenoid 10 to 50C (2) Ambient and fluid temperature VK Not required Lubrication Non-locking push/Locking slotted (3) Manual override VZ Free Mounting operation VT Shock/Vibration resistance (4) 150

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before

Shuttle Valve/AND Valve with One-Touch Fittings

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" 1000 680 440 480 420 210 150 Flow rate l/min ANR (SCFM) INOUT (35.0) (23.8) (15.4) (16.8) (14.7) (7.35) (5.25) Effective area mmCv 15.2 10.4 6.7 7.3 6.4 3.2 2.3 (0.84) (0.58) (0.37) (0.41) (0.36) (0.18) (0.13) Note 1) Flow rate values are at a pressure of 0.5MPa (72 psi) and temperature of 20C (68F).

VXA21/22

0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150 4.3 3 0.3 4 0.5 9 VXA3245-00 230 Note 1) OAdd the V type (VXA31) 80g, (VXA32)130g.

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

ZPT/ZPX

Silicon rubber Urethane rubber Fluoro rubber EPR ZP ZPX40H-B01-B8 ZPX100H-B01-B10 ZPX100H-B01-B12 ZPX125H-B01-B10 ZPX125H-B01-B12 418 414 482 478 148 150 160 158 229 219 258 254 40 50 63 80 100 125 ZPX40H-B01-B10 ZPX50H-B01-B8 ZPX50H-B01-B10 ZPX63H-B01-B10 ZPX63H-B01-B12 ZPX80H-B01-B10 ZPX80H-B01-B12 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

NCRAI seies

W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

Siiiil"Tivrc

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

NVEPA|VEFseies

N272 ElectroPneu matic Valve NVEPA|VEFseies Output Pressure or Flow is Controlled By An Electrical Input Signal Amplifier Supply Voltage is 1 1SVAC or 24yDC Operating Pressure Up To 150 psig 114" lo 314" Port Sizes Base Mount or Body Ported Built-ln PID Controller is Optional NVE NVEP The conventional pneumatic valve syslem consists of ON-OFF valves which are in a deenergized or energized

25

approximately 0.4 MPa. 0.7 0.7 0.7 SUP = 0.7 MPa PA 0.6 0.6 0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150

RB/RBL/RBQ

absorption (mm) 5 6 6 7 11 12 15 25 Collision speed (m/s) 0.05 to 5.0 Max. operating frequency (cycle/min) 80 80 70 70 45 45 25 10 Max. allowable thrust (N) 245 245 422 422 814 814 1961 2942 Ambient temperature range (C) 10 to 80 (No freezing) Extended 1.96 1.96 4.22 4.22 6.86 6.86 8.34 8.83 Spring force (N) Retracted 3.83 4.22 6.18 6.86 15.30 15.98 20.50 20.01 Basic type 15 15 23 23 65 65 150

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.