Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MX Shock-free A sine cushion is used at the end of the stroke. Smooth acceleration and deceleration are possible at 0.5 G or less. MTS 105 Particle concentration (particles/m3) MY Special cylinder tube 104 Class M3.5 [Class 100] CY A special cylinder tube is employed using extruded aluminum material.

XLDV Series

Note3) Air consumed by a reciprocating motion of a cylinder. Operating solenoid shifting valve is V114-** for XLDV-25 and V114-**,SYJ314-** for XLDV-40,50,63 ,80 ,100 and 160.

MLU

HS 40, 50 25, 32 D-A73C D-A80C D-J79C Approx. 30.5 Approx. 26.6 A A A A 25, 32 40, 50 D-A79W D-F7WV D-F7V D-F7BAVL Approx. 30.5 Approx. 22 A A A A 40, 50 D-P5DW Approx. 31 A A Approx.

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Sufx for cylinder (Rod boot) Port thread type Air cushion Rubber bumper Nil Without rod boot J Nylon tarpaulin K Heat resistant tarpaulin Rod end thread M5 x 0.8 20, 25 Rc 32 to 100 NPT 32 to 100 G 32 to 100 Nil Male rod end F Female rod end Nil Rc 20 to 100 TN NPT 20 to 100 In the case of w/rod boot, and a foot bracket or rod ange as a bracket, those parts are to be assembled at the time

Water-cooledThermo-chiller

Flourinert is a trademark of 3M. GALDEN is a registered trademark of Solvay Solexis, Inc.

E-MY2B_E_A

Allowable external resistance Nominal size Allowable external resistance 16 10N 25 20N When the floating bracket is used Installation of a holding bolt. Install the pin and the conical spring washer in the slider with a holding bolt.

25

Diaphragm Assembled in a clean room.

Sine Rodless Cylinder Series REBR Direct Mount Type

Plate A 18 Bore size (mm) Kit no.

No more element replacement!

100% 100% 100% 100% 0 0 0 0 Time it takes to clog the filter (min) The values in percentage indicate the percentage of times when the time it took to clog the filter for the first time (T1) is set to 100% Introduce a certain concentration of dust and back-flush the filter when the pressure loss reaches 0.2 MPa.

E-MY2_E_D

Mounting screw(M3) Tightening torgue 0.5 to 0.7Nm A DIN rail mount bracket fig. 3 When setting to DIN rail, place A of fig. 3 into DIN rail. While pushing it, fix it by the clamp of screw in fig. 4. Inadequate pushing may cause falling of parts.

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Weight [kg] Size: 30 Size Standard weight Additional weight 90 180 With auto switch* Foot bracket Flange bracket 30 0.27 0.36 0.1 0.1 50 1.3 1.5 0.2 0.3 0.5 63 2.2 2.6 0.4 0.5 0.9 80 3.9 4.4 0.6 0.9 1.5 100 7.3 8.3 0.9 1.2 2.0 Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Key 0 9 * With 2 auto switches y a w y A port B port 0 e 8 k 1 of y e a g n w Foot Bracket

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

104 13 16(15.8) 52 17.5 M6 x 1.0 69 5 14 12 40 5.5 9 71 10 57 10 7 40 10 to 50, 75, 100 116 M8 x 1.25 104 13 16(15.8) 64 17.5 M8 x 1.25 86 7 14 12 50 6.6 11 71 14 71 10 8 Note) Figures in ( ) are the dimensions for applying a wrench.

Heavy Duty Stopper Cylinder

The cancel cap holds the lever horizontally allowing a pallet to pass.

212

0 q 4 Series LVR Dimensions Integral ttings/LQ3 4 x 7 Mounting hole 1/8 (Rc, NPT) Pilot port A H D B G Model A B C D E LVR20-Z07(06) 40 40 49.3 68 20.1 LVR40-Z11(10) 82.5 82.5 89 115 33 LVR40-Z13(12) 82.5 82.5 89 115 33 LVR50-Z19 100 100 117.5 135 45 Breathing port M5 x 0.8 IN Model F G H J LVR20-Z07(06) 8 27 56 88 LVR40-Z11(10) 14 64.5 100 150.5 LVR40-Z13(12) 14 64.5 100 159.5 LVR50-Z19

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

HRX-OM-Y098

For a facility with a large installation area that can vent the air naturally: Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility with a small installation area that can not vent the air naturally: Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.

HRX-OM-W060

For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level. 3.