Magnet: D (Built-in), Mounting: C (Rear Clevis), Overall Length: Standard, Bore Size: 150 (1 1/2"), Stroke: 250 (2 1/2"), Body Option: C (Rubber Bumper)

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Precision measuring equipment (3-D measuring machines) Semiconductor manufacturing equipment Semiconductor inspection equipment Dental equipment Chemical analysis equipment Ozonizers, Hydrogen gas generating equipment Air (oxygen, nitrogen, etc.)

99

Filtration efficiency 99.9% Membrane FGH200 to 300 0.2 m EB ES X40 0.4 m Port size Element classification Note) 03 04 06 10 Rc3/8 Rc1/2 Rc3/4 Rc1 Element HEPO 2 Membrane Symbol J D Note) Refer to pages 70 to 73 for details about specifications, models, dimensions, etc. regarding the elements.

Material: C (SS400), Number of Arranged Elements: 4, Element Length: D [ℓ1000 (ℓ250 x 4)], Port Size: 20 [50 (2B)], Element Type: B (Sintered Metal, Bronze Material), Nominal Filtration Accuracy: 2 μm, Element Seal Material: N (NBR)

Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32

1 Controller mounting * Select the LECP2 when setting the stroke range using the stroke adjustment unit or an external stopper. 11LEJS Nil Without cable (Without communication plug connector)*2 Nil Screw mounting D DIN rail mounting* 1 1.5 m 3 3 m 5 5 m S Straight type communication plug connector*2 25A* DIN rail is not included. Order it separately.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

3 Controller/Driver mounting Nil Screw mounting D DIN rail mounting* * DIN rail is not included. Order it separately.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

2 Controller/Driver mounting Nil Without cable (Without communication plug connector)*3 1 1.5 3 3*2 5 5*2 S Straight type communication plug connector*3 T T-branch type communication plug connector*3 Nil Screw mounting D DIN rail mounting* 11LEJS * DIN rail is not included.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Refer to pages 20 and 21 for the D-P3DW type.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

-X 5 to 60 Operating temperature range (C) The shock absorber service life is different from that of the MY1H cylinder depending on operating conditions. Refer to the RB series Specific Product Precautions for the replacement period. 1209 Technical Data A

(Or None in the Case of No Switch), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0100 (1"), Option: Both Ends (Air Cushion), X Option: XB7 [Cold Resistant Cylinder, down to -22° F (-30° C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0200 (2"), Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0200 (2"), Option: Both Ends (Air Cushion), X Option: XB7 [Cold Resistant Cylinder, down to -22° F (-30° C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0250 (2 1/2"), Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0300 (3"), Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0300 (3"), Option: Both Ends (Air Cushion), X Option: XB7 [Cold Resistant Cylinder, down to -22° F (-30° C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0400 (4"), Option: Both Ends (Air Cushion), X Option: XB7 [Cold Resistant Cylinder, down to -22° F (-30° C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0500 (5"), Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0600 (6"), Option: Both Ends (Air Cushion), X Option: XB6 [Heat Resistant Cylinder, up to 300°F (150°C)]

Series: NCA1, Mounting: D (MP2, Detachable Rear Clevis), Bore Size: 250 (2 1/2"), Stroke: 0600 (6"), Option: Both Ends (Air Cushion), X Option: XB7 [Cold Resistant Cylinder, down to -22° F (-30° C)]