15

LEC Y Motorless Motorless Grease pack order number: GR-S-010 (10 g)/GR-S-020 (20 g) LAT LZ LC3F2 885

High Vacuum Angle Valve

XLD160-2-9-1A AS568-020V XLA(V) XLC(V) XLD(V) XLH XLF(V) XLG(V) Exterior seal e Exterior seal e Valve seal w Standard XL XL Special Standard XLQ Special Standard Common XM XY Special XLD50-2-9-1A AS568-016V AS568-009V XLD63-2-9-1A XLD80-2-9-1A XLD100-2-9-1A Standard S valve seal assembly r XLD(V) DXLD40-2-9-1A AS568-016 XLD50-2-9-1A AS568-016 XLD63-2-9-1AXLD80-2-9-1A XLD160-2-9-1A AS568-020

Compact Cylinder

Double clevis Double clevis pin material: Stainless steel Parts assembly CQ XC27 D 032 Double clevis pin material: Stainless steel Double clevis Bore size 012 016 020 025 032 040 050 063 080 100 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Y XC27 G012, Z015A, G02, G03 G04, G05, G08, G10 Double knuckle joint Double knuckle joint pin material: Stainless steel IY XC27 G012,

NCQ2/CQ2

Bore size 012 016 020 025 032 040 050 063 080 100 12 mm 16 mm 20 mm 25 mm Double knuckle joint 32 mm 40 mm Split pin 50 mm 63 mm 80 mm 100 mm Flat washer 6 2 C X Y G012, Z015A, G02, G03 G04, G05, G08, G10 Double knuckle joint With double knuckle joint pin, split pins and flat washers 6 2 C X Y I G012, J015, G02 G03, G04, G05, G08, G10 Clevis pin/Knuckle pin For mounting bracket, split pins

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

LEC-OM071xx

A.020: Parameter Checksum Error 1 (The parameter data in the DRIVER is incorrect.) Malfunction caused by noise from the AC power supply or grounding line, static electricity noise, etc. Turn the power supply ON and OFF several times. If the alarm still occurs, there may be noise interference. Take countermeasures against noise.

Made to Order

Double clevis pin Double clevis Bore size 012 016 020 025 032 040 050 063 080 100 12 mm Double knuckle joint 16 mm 20 mm Split pin 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Flat washer Y XC26 G012, Z015A, G02, G03 G04, G05, G08, G10 Double knuckle joint With double knuckle joint pin, split pins and flat washers IY XC26 G012, J015, G02, G03 G04, G05, G08, G10 Clevis pin/Knuckle pin For mounting

Table of Contents

(Including band and screw) Cylinder series Applicable bore size (mm) 20 25 32 40 CDM2, CDBM2 CDLM2 BM3-020 BM3-025 BM3-032 BM3-040 Auto Switch Mounting Bracket Part No.

Table of Contents

LVQ Model VXA212 VXA213 VXA21 VXA22 VX070-020 LQ 1 8 1 4 1 4 3 8 1 2 01 ( / ) 02 ( / ) 02 ( / ) 03 ( / ) 04 ( / ) VXA223 VXA224 VXA225 VXA226 VX070-022 LVN VX070-029 TI/ TIL PA Ordering example (Example) Series VXA21, Orifice size 4.5 mm, Normally closed, Rc 1/4 (Part no.) VXA2130-02 PAX PB 17-3-95 4 The VX series will be revised shortly.