Multistage Ejector Series ZL112/212 1 10 0 0 1 2 3 4 5 6 7 8 9 10 11 12 1 2 3 4 5 6 Time to reach vacuum (S) Time to reach vacuum (S)
SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003
5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003
6 6-1. 1 1P4P5 10 XL-OMY0003
6-2 1 2 b 3 1 2 O 4 a aa b O O
Symbol Nil R S RS Specifications Internal pilot specification External pilot specification Internal pilot specification/Built-in silencer External pilot specification/Built-in silencer Mounting position Symbol Applicable stations B 2 to 16 stations 2 to 10 stations 2 to 10 stations D U D side U side Both sides M Special specifications Indicate special specifications separately on a manifold
Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.
x 1.25 M10 x 1.25 M8 x 1.25 MM NN Z 40 32 25 20 Bore size 50 45 45 41 16 13 13 13 6 6 5 8 8 8 5 4 4 4 75 75 75 M26 x 1.5 M20 x 1.5 26-0.033 0 26-0.033 0 M26 x 1.5 32-0.039 0 8 10 36 82 M32 x 2 25 Series CM2R 10-/1121-/22Direct mount type cylinder 20, 25, 32, 40 How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto
VE 4 point preset output pressure Applicable in the programming function with up to 20 steps. 10 bit parallel input signal (maximum) Pressure can be set with 2 10 = 1024 steps. VY1 G Step 1 Step 2 Step 3 Step 4 . . . . . . . . . . . . .
HRL100/200-W-40 . 9-9 9.3 Flow Diagram . 9-10 9.3.1 HRL-A-40. 9-10 9.3.1 HRL-W-40. 9-11 9.4 Cooling Capacity . 9-12 9.4.1 HRL100A40 CH1 . 9-12 9.4.2 HRL200A40 CH1 . 9-12 9.4.3 HRL300-A-40 CH1 . 9-13 9.4.4 HRL100/200/300-A-40 CH2 . 9-13 9.4.5 HRL100-A-40-T2 CH1 . 9-14 9.4.6 HRL200-A-40-T2 CH2 . 9-14 9.4.7 HRL300-A-40-T2 CH1 . 9-15 9.4.8 HRL100/200/300-A-40-T2 CH2 . 9-15 9.4.9 HRL300-A-40-
HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15
A CAT.ES100-43 A For General Fluids High Precision Digital Pressure Switch F/ISE ZSE 50 60 50 60 Series High precision/High resolution pressure switch. Applicable for pressure detection with a wide range of fluids, by using a stainless steel diaphragm. Pressure detection for a wide range of fluids.
Applicable bore (mm) d H1 B1 C1 4T counterbore A' 6 10 16 20 25 32 NTP-006 NTP-010 NTJ-015A NT-015A NT-02 NT-03 M3 x 0.5 1.8 2.4 4 5 5 6 5.5 7 8 10 13 17 6.4 8.1 9.2 11.5 15.0 19.6 S + Stroke Auto switch M4 x 0.7 Z + Stroke M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Bore size (mm) A A' B C D E GA GB H J K L MM NN P Q QA 6 10 16 20 25 32 7 10 11 12 15.5 19.5 10 10 11.5 12.5 13 12.5 12.5 14 18
double P, R ports 0.25 to 0.7 Port size 3 position A, B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C8 (8 One-touch fitting) C6: PA/B4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B12.6 (0.7) A/BR 12.6 (0.7) SX5000 2 position single, double 3 position Max. operating frequency Hz Manual override Pilot exhaust SX3000 SX5000 Note 2) Valve
Dimensions MXS 16 With shock absorber (16) MXS16BS, BT, B 19 A 10 37.5 37.5 18 18 55 (mm) Stroke adjustment range Retracting 5 10 20 20 15 20 20 20 A dimension (Retracted side mounting) Extending Model Shock absorber at retraction end Stroke 10 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 11 21 31 31 26 32 32 32 Shock absorber at extension end A Stroke 75 to
When used as a stopper, select a model with a stroke of 30 mm or less. 2.
SCM220A, #10, #19 CM2E25SCM225A, #10 SCM225A, #10, #19 CM2E32SCM232A, #10 SCM232A, #10, #19 CM2E40SCM240A, #10 SCM240A, #10, #19 The data shows auto switch equipped styles.
. 9-1 9.1 Specifications . 9-1 9.1.1 HRR050-A-. 9-1 9.1.2 HRR050-W-. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR050-A-20. 9-6 9.2.2 HRR050-W-20. 9-7 9.2.3 HRR050-A-40. 9-8 9.2.4 HRR050-W-40. 9-9 9.3 Flow Chart . 9-10 9.3.1 HRR050-A-20/40.9-10 HRR Series HRX-OM-X071 Contents 9.3.2 HRR050-W-20/40. 9-10 9.4 Cooling
D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10
Series 10-/11-/12-/13Clean Series Available for clean environment. Particle generation in a clean room can be prevented.
O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l
O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l
10 m: Approx. 905g Weight 222-1 A Communication Cable/Connector M12 Example of Connection PLC r y OUT side IN side OUT side IN side Communication cable (With connector on both sides) t u t r EX260 Series EX600 Series Specifications Description Communication cable (With connector on one side) Field-wireable connector Part no.