Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(Green) Indicator light Load Enclosure IP40 Environment resistance Blue DC () 3.4 3-wire 25AWG 2 m Lead wire with connector 11

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Without sub-plate 00 VPA4 54, 4 74 JIS Symbol (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 (32A) 1 4 1 (40A) 1 2 1 03 2 position double 2 position single Body size VPA4150/4170 VPA4250/4270 04 06 10 0 1 VPA4 5 Piping standard 3 4 standard 11 4 Side ported Bottom ported W/o sub-plate 5 7 0 1 12 14 0 1 VPA4 7 4 Option Side piping only 3 position exhaust center 3 position closed center VPA4350 VPA4450

AME

2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

AT ID 1 Standard 11 2 Standard Accessory (Option) AMG Description Bracket Symbol Nil Rc Thread type Nil AFF B JIS Symbol F G N NPT N.C. auto-drain C AMG N.O. auto-drain D AM Refer to the table below for accessory/Option combinations. Port size Misc.

AMH

Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Accessory Option specifications C C D -J -R D J T AMH150 R AMH250 AMH350 AMH450 Applicable model Accessory (Option) AMH550 AMH650 AMH850 Port size N.C. auto-drain N.O. auto-drain Drain guide 01 B 06 10 14 B 3 4 1B 1 8 Accessory 02

PAB-OM-K007

To restrict exhausting noise, mount silencer (AN200-02 option) on air exhaust port AIR EXH. d; Exhaust air supplied from 3-way valve on supply port AIR SUP to stop pump. 3 - Typical circuit 3 port solenoid valve Process pump Regulator Air filter Ball valve FLUID OUT AIR SUP Air supply AIR EXH FLUID IN Strainer Transported fluid 2) Adjustment of discharged flow rate a; Use ball valve connected

DOC1003077

Do not disassemble the product, unless required by installation 11 Ambient temperature is too high. (out of 10-35oC) Correct the ambient temperature within the specification range. I L Filter clogged Clean the filter. instructions. C The fan breaks Check the fan operation. If the fan breaks, need to be replaced.

HEC-OM-S019

Signal Style and Part No. 5 4 3 2 1 5 4 3 2 1 Temperature sensor cable length N L E Nil Standard Option/function Remote function 1 : +24V 2 : 24V COM (See section 3 remote ON/OFF function) 7 Output Cut off Alarm Common 6 Output Cut off Alarm a contact (OPEN During Alarm) 8 Output Cut off Alarm b contact (CLOSE During Alarm) 9 Temperature Alarm a contact (OPEN During Alarm) 11 Temperature

Digital Gap Checker

248.0 5 ISA-5-6 285.5 6 Seal for extra station ISA-15 Threaded plug with seal ISA-12Piping type Part number Rc1/8 ISA-12-A : This is applicable in both G1/8 ISA-12-C piping specification C and F. -11No.PS-OMR0002-K 2 About this product Centralized lead wire ISA-19Bracket for centralized lead wire ISA-20 Stations Model 2 ISA-19-2 3 ISA-19-3 4 ISA-19-4 5 ISA-19-5 6 ISA-19-6 Regulator AR20-02

ARX Series

Dimensions Dimensions 4-R .1(2.5) .47 (12) .98 (25) 1.63 (41.5) .67 (17) 1.34 (34) .94 (24) .65 (16.5) 1.02 (26) Panel nut Gasket .43 (11) .06 (1.5) .94 (24) 1.73 (44) .21 (5.4) Max. panel thickness .18 (4.5) .06 (1.6) 2.13 (54) Install the gasket underneath the panel or bracket (bonnet side). Tighten the panel nut by hand without the use of tools. 3

TM

(mm) Mounting screw L2 H2 D W1 H1 P L1 W2 W3 Model (Nominal x Length) 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 6 4 2.2 2.8 2.8 3.2 3.2 2 x 6 2.6 x 8 2.6 x 8 3 x 8 3 x 8 TM-04 TM-06 TM-08 TM-10 TM-12 7.5 9.5 91.5 5.5 77.5 6 7.5 77.5 6 15 9 93 12.5 6.5 4.5 16.3 8.8 14.3 7.5 12 12 10 8 9.8 How to Use 2.

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: 02 (Rc1/4), Output Specification: F (Out 1: PNP; Out 2: Analog 4 to 20 mA), Lead Wire: Lead Wire w/Connector, Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Stations: 11 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: N (NPT), Kit Name: T (Terminal Box), Box Mounting Position: D (D Side Mounting)

Size: 32, Type: Q (Rapid Supply and Exhaust Function), Thread: N (NPT), Port Size: 02 (1/4), Tubing O.D: 11 (3/8")

Size: 32, Type: R (Pressure Reduction Function), Thread: N (NPT), Port Size: 02 (1/4), Tubing O.D: 11 (3/8")

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: Lead Wire w/Connector (2 m), Option: R (Bracket for w/o Flow Adjustment Valve: ZS-33-M