Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FSC (50 to 150 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12, SPEED CONTROL, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .03858 lb

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: E (8mm), Tube Size: 04 (ø4), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 1 (Meter-in), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 3 (Universal), Control Type: 0 (Meter-out), Control Range: FM (1 to 50 mm/s), Indicator Window Direction: 0° , or None for FC, FM, Thread: R, Port Size: M5 (M5 x 0.8), Width Across Flats [H]: 9mm or None for Body Size 2, Tube Size: 06 (ø6), Sealant: without Sealant, Push lock: A (Push-lock)

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

MXU

7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !

,

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

,

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Note 5) Impact resistance: No malfunction occurred when it is tested with a drop tester in the axial direction and at the right angles to the main valve and armature in both energized and de-energized states every once for each condition. (Values at the initial period) Vibration resistance: No malfunction occurred in a one-sweep test between 45 and 2000 Hz.