High Purity Chemical Valve

S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13

IZx-OMT0049

Procedures to Operation . 22 2-1. Flow chart to operation . 22 2-2. Initial setting (IZT41/42) Initial setting is not necessary for IZT40) . 22 3. Installation and wiring . 23 3-1. Installation of Ionizer . 23 3-1-1. Precautions for Installation . 23 3-1-2. Adjustment of Pressure (Flow adjustment) . 23 3-1-3. Selection of piping port size . 23 3-1-4.

HRX-OM-T002

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when the set time has passed. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

KS/KX

5.0 3.5 5.0 8 12 24 14 12.8 23 17 6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8 Applicable tubing M 17 15.2 26 18.5 6 1 4 3 8 1 4 3 8 1 2 3 8 1 2 8 17 21.6 14.9 Connection thread H 10 22 18.5 31.5 21 22 30.5 25.0 7 D 24 24 20.9 34 22 8 12 35.1 35.1 MS Reference dimensions after R thread installation

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Bore size 6 to 20 Type M5 x 0.8 Rc NPT G Symbol 21 22 Relief type Vacuum suction type CXSL CXSL Nil TN TF 25, 32 Cylinder stroke (mm) Model Lubrication Action Cushion Rubber Air Bore size (mm) Standard stroke (mm) Auto switch mounting Port size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief

NAAMS Standards Compliant

8.5 R7 22 20 R7 22 12.5 22 20 [mm] [mm] Model NAAMS code A B Weight [kg] CKZ-63A025 ACA025M 135.0 81.3 1.7 CKZ-63A026 ACA026M 165.0 111.3 1.9 CKZ-63A027 ACA027M 195.0 141.3 2.1 CKZ-63A028 ACA028M 225.0 171.3 2.3 CKZ-63A029 ACA029M 255.0 201.3 2.5 CKZ-63A030 ACA030M 285.0 231.3 2.7 Model NAAMS code A Weight [kg] CKZ-63A037 ACA037M 135.0 2.1 CKZ-63A038 ACA038M 165.0 2.3 CKZ-63A039 ACA039M

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

to 1000 150 to 700 150 to 700 21 19.5 19.5 15.5 14 12 10 8 20-0.033 56.2 46.5 37.5 33.5 7 5.5 5.5 5 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 26.5 22 20 20 51 42.5 34.5 30 181 159 146 146 M26 x 1.5 M26 x 1.5 M20 x 1.5 247 217 204 200 1/8 40 32 25 20 24 22 22 18 26-0.033 0 1/4 1/8 1/8 16 13 13 26-0.033 0 32-0.039 0 8 10 M32 x 2 1011Axial foot (L): RECL G H G F Width across flats B2 A K 2

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA Both Ends Tapped (mm) Bore size (mm) 63 O1 R O1 thread R R M10 x 1.5 18 80 M12 x 1.75 22 100 M12 x 1.75 22 H thread effective depth C 4-N through 8-O counterbore U Q F 2-P (Port size) (Rc, NPT, G) I 22 M E D Z 11 Lead wire min. bending radius 10 Auto switch D-A7, A8 K M E S J B + Stroke A + Stroke L Rod end male thread H1 Rod

New

14 19 22 30 30 40 48 30 40 48 15 15 20 24 15 20 24 62.5 73.5 72 75 78 76.5 79.5 30 35 35 35 40 40 40 9 9 9 20 22 22 22 24.5 24.5 24.5 8 8 9 14 8 9 14 15 15 22.2 19 15 22.2 19 18 18 22.2 20.6 18 22.2 20.6 6.4 6.4 7.6 6 6.4 7.6 6 47.5 50 50 50 52.5 52.5 52.5 38 47.5 46 47 52 50.5 51.5 23 25.5 25.5 25.5 28 28 28 44 54 52.5 53.5 58 56.5 57.5 VX2 2 11 9 9 3 11 13 Series VXN Air, Water, Medium

Vacuum Pad

15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

NCA1

See Pg 22 for auto switch options when using composite or stainless steel tube.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 C J G5-S 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 M14 x 1.5 32 CV (mm) Boss-cut ZZ Bore size (mm) MVGQ 20 25 32 40 103 107 CC 109 138 RB J D-X 20Data 10-4-11 12 Smooth Cylinder Series CG1Y 20, 25, 32, 40, 50,

Compact Cylinder

36 22 4 16 22 6.6 2.8 8 38 55 68 M5 27 7 22 M5 7 16 10 26 40 26 4 16 26 6.6 2.8 8 38 60 73 M5 29 7 22 M5 7 16 15 32.5 46 32 4 30 32.5 7 5 10 50 64 32 79 M6 33.5 7 24.5 M6 9 18 17.5 38 52 36 4 35 38 9 5 10 55 72 36 90 M6 38 10 26 M6 9 21 20 46.5 64 45 5 40 46.5 9 6 12 70 90 45 110 M8 45 10 31 M8 9 21 22.5 56.5 74 50 5 45 56.5 9 6 12 80 100 50 120 M8 50 10 31 M8 Single clevis bracket Hexagon

CJ2

Bore size (mm) 10 16 B FB GA NA WA WW S Z 15 14.5 7.5 21 14.5 4.5 66 122 18.3 19 7.5 21 14.5 5.5 67 123 6-3-21 22 22 Air Cylinder: Standard Type Single Acting, Spring Return/Extend Series CJ2 6, 10, 16 How to Order Bore size Spring extend Standard stroke (mm) 6 10 16 6 mm 10 mm 16 mm 6 10 16 15, 30, 45, 60 15, 30, 45, 60 15, 30, 45, 60, 75, 100, 125, 150 Intermediate strokes are available

HRX-OM-W058

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

HRX-OM-X027

Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when it reaches the set time. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.

HRX-OM-M005

The functions also apply to the Status screen 4 . 1 2 3 5 4 Figure 5-22 Status Screen 3 Table 5-12 Status Screen 3 No. Item Descriptions Date and time of operation listed below are recorded and displayed.

Soft Start-up Valve

No indication is necessary for R; however, indicate N for NPT. -22- Optional Parts Nos.

IDU/IDF

C IDU BP 22 C Applicable dryer Applicable dryer Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 Dryer IDU3D IDU4D Dryer IDU6D IDU8D IDU11C IDU15C Dryer IDU22C1 IDU37C1 IDU55C IDU75C Symbol 3 4 Symbol 6 8 11 15 Symbol 22 37 55 75 IDF FL 22 C IDF BP 22 C Applicable dryer Applicable dryer Dryer IDF1D IDF2D