S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

39.3 27.8 55 39.3 17 55 13.2 AS321F-03-08 AS321F-03-09 8 5/16" 15.2 18.5 29.5 41 23 29.5 57 41 18.5 57 19.8 45.4 40.4 40.2 35.2 15.2 3/8 45.4 40.4 40.2 35.2 19.8 23 3/8 AS321F-03-10 AS321F-03-11 31.8 43.3 21 59 17.9 10 18.5 21 43.3 31.8 59 3/8" AS321F-03-12 AS421F-04-11 12 3/8" 20.9 22 44.3 32.8 33.6 61 47.9 21 100 17.9 24 28.6 49.2 49.6 42.1 1/2 24.5 56.7 (23.8) AS421F-04-10 AS421F-04-13

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.

High Vacuum L Type Valve

11 75 52 72 29 9 XLC-63-2 88 212 100 55 11 87 95 70 76 33 9 XLC-80-2 90 257 117 65 11 114 110 83 104 39 9 13 XL-OMV0007 6.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5 23.3 26.5 23.3 26.5 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9

E-P HYREG ® Series VY1

4 7 1 4 11 2 1 2 2 9 Note) Only bracket or foot may be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1

Line filter

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AFF20) 23 to 24 2) Bowl assembly (AFF20) 25 1) Element assembly (AFF30/AFF40) 26 to 27 2) Bowl assembly (AFF30/AFF40) 28 to 29 11. Exploded Drawing 30 12.

Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AM20) 23 to 24 2) Bowl assembly (AM20) 25 1) Element assembly (AM30/AM40) 26 to 27 2) Bowl assembly (AM30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Micro Mist Separator

Bowl assembly specifications 11 to 18 7. Assembly of Optional parts 19 8. Operation and Adjustment 20 to 21 9. Troubleshooting 22 10. Replacement work procedure 23 to 29 1) Element assembly (AMD20) 23 to 24 2) Bowl assembly (AMD20) 25 1) Element assembly (AMD30/AM40) 26 to 27 2) Bowl assembly (AMD30/AM40) 28 to 29 11. Exploded Drawing 30 12.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) U H I J K L O Z M N P S A C D E F B Bore size (mm) 32 31.5 M10 x 1.5 60 4.5 14 8.5 9 depth 7 14 34 5.5 Rc 1/8 58.5 73.5 12 16 45 20 65 40 35 M10 x 1.5 69 5 14 8.5 9 depth 7 14 40 5.5 Rc 1/8 66 75.5 12 16 52 22 67 50 41 M12 x 1.75 86 7 18 11 11 depth 8 19 50 6.6 Rc 1/4 80 87 15 20 64 25 76 63 47.5 M12 x 1.75 103 7 18 11 14 depth 10.5 19 60 9 Rc 1/4 93 91 15 20 77 27 80 80 57.5 M16 x 2

High Vacuum L Type Valve

A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11 87 95 70 76 33 9 XLG-80-2 90 257 117 65 11 114 110 83

Multi-Axis Step Motor Controller

(Refer to page 12.) 11 Multi-Axis Step Motor Controller JXC73/83/92/93 Series Wiring Example 1 For 4 Axes 1 pc.

LJ1H

150 200 250 300 350 400 450 500 10kg 8kg 18kg 16kg 14kg Speed (mm/s) Speed (mm/s) Model Mounting orientation LJ1H30 12kg Load movement direction 10kg 600 14kg 400 L1 (mm) L3 (mm) 12kg 20kg 50 100 a = 1000 16kg 18kg 20kg Pitching Yawing Vertical Vertical m a a = 3000 a = 2000 200 100 200 300 400 500 600 0 100 200 300 400 500 600 0 L1 Mep Stroke (mm) Stroke (mm) 0 5 10 20 15 Transfer load

EXxx-OMO0027

Reload I/O Devices : The display above shows an example of the software configuration structure of the EX600 series. : Allocate the diagnostic data to Module 11 when its setting is other than the diagnostic mode 0.

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

Digital Flow Switch ( compatible)

If the minimum setting unit is 1 L/min, the flow can be displayed in 1 L/min units, i.e. 10, 11, 12. Minimum setting unit N Normal condition (NOR) Reference condition for volumetric flow: 101.3 kPa, 0 C The flow measurement which is converted at normal atmospheric pressure conditions at 0 C.

LEJ-OM004xx

LEJ-OM00401 PRODUCT NAME Electric Actuator / Slider Type AC Servo Motor For Clean Room Ball Screw type MODEL / Series 11-LEJ Series The description of this manual is only a peculiar content to "11-LEJS For Clean Room". Please match and confirm the manual of each model to a detailed content of the product.

CEx-OMP0016

Adjusting Method 35 Chapter 11: Stopping Operation 11-1. Over run 36 11-2. Dispersion of Stopping Position 36 Chapter 12: Manual Operating Procedure 37 Chapter 13: Installation / Wiring 13-1. Installation of Cylinder 3839 13-2. Electrical Wiring 40 13-3.

EXxx-OMU0020EN

Regarding mounting, refer to the Section 3.1.2. -56No.EX##-OMU0020-A 11. Dimensions 11.1. I/O Modules Manifold Fig. 11-1 Dimensions of the Modules manifold The following table shows the length of the I/O Modules manifold.

VEX-OMT0003

Caution Standard length is 300 mm, but the following lengths are also available.